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Journal: MicromachinesVolume: 13Number: 412
Article: Long Stroke Design of Piezoelectric Walking Actuator for Wafer Probe Station
  • Authors:
  • Cheng Yang 1,
  • Yin Wang 2,* and
  • Wei Fan 2
Link: https://www.mdpi.com/2072-666X/13/3/412

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