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Journal: Micromachines, 2021
Volume: 12
Number: 910
Article:
Optimisation of Lapping Process Parameters for Single-Crystal 4H–SiC Using Orthogonal Experiments and Grey Relational Analysis
Authors:
by
Jiayun Deng, Qiusheng Yan, Jiabin Lu, Qiang Xiong and Jisheng Pan
Link:
https://www.mdpi.com/2072-666X/12/8/910
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