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Open AccessArticle

A Flow-Through Microfluidic Relative Permittivity Sensor

Integrated Devices and Systems group, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
Bronkhorst High-Tech B.V., Nijverheidsstraat lA, 7261 AK Ruurlo, The Netherlands
Author to whom correspondence should be addressed.
Micromachines 2020, 11(3), 325;
Received: 19 February 2020 / Revised: 17 March 2020 / Accepted: 18 March 2020 / Published: 20 March 2020
(This article belongs to the Special Issue MFHS 2019)
In this paper, we present the design, simulation, fabrication and characterization of a microfluidic relative permittivity sensor in which the fluid flows through an interdigitated electrode structure. Sensor fabrication is based on an silicon on insulator (SOI) wafer where the fluidic inlet and outlet are etched through the handle layer and the interdigitated electrodes are made in the device layer. An impedance analyzer was used to measure the impedance between the interdigitated electrodes for various non-conducting fluids with a relative permittivity ranging from 1 to 41. The sensor shows good linearity over this range of relative permittivity and can be integrated with other microfluidic sensors in a multiparameter chip. View Full-Text
Keywords: capacitance sensor; interdigitated electrodes; relative permittivity sensor capacitance sensor; interdigitated electrodes; relative permittivity sensor
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MDPI and ACS Style

Zeng, Y.; Sanders, R.; Wiegerink, R.; Lötters, J. A Flow-Through Microfluidic Relative Permittivity Sensor. Micromachines 2020, 11, 325.

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