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Micromachines 2019, 10(2), 85;

MEMS Actuators for Optical Microendoscopy

Department of Biomedical Engineering, Institute for Quantitative Health Science and Engineering, Michigan State University, East Lansing, MI 48824, USA
Departments of Biomedical Engineering, Faculty of Engineering King Mongkut’s Institute of Technology Ladkrabang (KMITL), Bangkok 10520, Thailand
Author to whom correspondence should be addressed.
Received: 28 November 2018 / Revised: 26 December 2018 / Accepted: 28 December 2018 / Published: 24 January 2019
(This article belongs to the Special Issue MEMS Technology for Biomedical Imaging Applications)
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Growing demands for affordable, portable, and reliable optical microendoscopic imaging devices are attracting research institutes and industries to find new manufacturing methods. However, the integration of microscopic components into these subsystems is one of today’s challenges in manufacturing and packaging. Together with this kind of miniaturization more and more functional parts have to be accommodated in ever smaller spaces. Therefore, solving this challenge with the use of microelectromechanical systems (MEMS) fabrication technology has opened the promising opportunities in enabling a wide variety of novel optical microendoscopy to be miniaturized. MEMS fabrication technology enables abilities to apply batch fabrication methods with high-precision and to include a wide variety of optical functionalities to the optical components. As a result, MEMS technology has enabled greater accessibility to advance optical microendoscopy technology to provide high-resolution and high-performance imaging matching with traditional table-top microscopy. In this review the latest advancements of MEMS actuators for optical microendoscopy will be discussed in detail. View Full-Text
Keywords: MEMS actuators; microendoscopy; confocal; two-photon; wide-filed imaging; photoacoustic; fluorescence; scanner MEMS actuators; microendoscopy; confocal; two-photon; wide-filed imaging; photoacoustic; fluorescence; scanner

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Qiu, Z.; Piyawattanametha, W. MEMS Actuators for Optical Microendoscopy. Micromachines 2019, 10, 85.

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