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Journal: Sensors, 2025
Volume: 25
Number: 3255
Article:
In Situ Time-Based Sensor for Process Identification Using Amplified Back-End-of-Line Resistance and Capacitance
Authors:
by
Jen-Chieh Hsueh, Mike Kines, Yousri Ahmed Tantawy, Dale Shane Smith, Jamin McCue, Brian Dupaix, Vipul J. Patel and Waleed Khalil
Link:
https://www.mdpi.com/1424-8220/25/11/3255
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