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Journal: Sensors, 2023
Volume: 23
Number: 4248

Article: MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature
Authors: by Muhannad Ghanam, Frank Goldschmidtboeing, Thomas Bilger, Andreas Bucherer and Peter Woias
Link: https://www.mdpi.com/1424-8220/23/9/4248

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