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Journal: Sensors, 2023
Volume: 23
Number: 3808
Article:
A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10,000
Authors:
by
Wenli Liu, Yujie Lu, Zeji Chen, Qianqian Jia, Junyuan Zhao, Bo Niu, Wei Wang, Yalu Hao, Yinfang Zhu, Jinling Yang and Fuhua Yang
Link:
https://www.mdpi.com/1424-8220/23/8/3808
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