Article Versions Notes

Fahrbach M, Xu M, Nyang’au WO, Domanov O, Schwalb CH, Li Z, Kuhlmann C, Brand U, Peiner E. Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography. Sensors. 2023; 23(4):2003. https://doi.org/10.3390/s23042003

Fahrbach, Michael, Min Xu, Wilson Ombati Nyang’au, Oleg Domanov, Christian H. Schwalb, Zhi Li, Christian Kuhlmann, Uwe Brand, and Erwin Peiner. 2023. "Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography" Sensors 23, no. 4: 2003. https://doi.org/10.3390/s23042003

Fahrbach, M., Xu, M., Nyang’au, W. O., Domanov, O., Schwalb, C. H., Li, Z., Kuhlmann, C., Brand, U., & Peiner, E. (2023). Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography. Sensors, 23(4), 2003. https://doi.org/10.3390/s23042003