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Journal: Sensors, 2023
Volume: 23
Number: 8226

Article: Artificial-Neural-Network-Driven Innovations in Time-Varying Process Diagnosis of Low-K Oxide Deposition
Authors: by Seunghwan Lee, Yonggyun Park, Pengzhan Liu, Muyoung Kim, Hyeong-U Kim and Taesung Kim
Link: https://www.mdpi.com/1424-8220/23/19/8226

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