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Multielement Ring Array Based on Minute Size PMUTs for High Acoustic Pressure and Tunable Focus Depth
 
 

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Journal: Sensors, 2021
Volume: 21
Number: 8447

Article: Enhancing AlN PMUTs’ Acoustic Responsivity within a MEMS-on-CMOS Process
Authors: by Eyglis Ledesma, Ivan Zamora, Arantxa Uranga, Francesc Torres and Núria Barniol
Link: https://www.mdpi.com/1424-8220/21/24/8447

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