- Article
CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates
- Tatsuya Iwata,
- Kyosuke Matsuda,
- Kazuhiro Takahashi and
- Kazuaki Sawada
Demand for the detection of carbon dioxide (CO 2 ) is increasing in various fields, including air-quality monitoring, healthcare, and agriculture. On the other hand, smart gas sensors, in which micromachined gas sensors are integrated with dri...

