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Sensors 2017, 17(9), 2156;

CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates

Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi 4418122, Japan
Author to whom correspondence should be addressed.
Received: 29 August 2017 / Revised: 15 September 2017 / Accepted: 16 September 2017 / Published: 20 September 2017
(This article belongs to the Special Issue Gas Sensors based on Semiconducting Metal Oxides)
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Demand for the detection of carbon dioxide (CO 2 ) is increasing in various fields, including air-quality monitoring, healthcare, and agriculture. On the other hand, smart gas sensors, in which micromachined gas sensors are integrated with driving circuits, are desirable toward the development of the society of the internet of things. In this study, micromachined hotplate-based CO 2 sensors were fabricated and their characteristics were investigated. The sensors have La 2 O 3 /SnO 2 stacked layers as a sensing material and Pt interdigitated electrodes. A CO 2 response of 2.9 for a CO 2 concentration of 1000 ppm was obtained at 350 °C with low power consumption (approximately 17 mW). A relatively large response was obtained compared with previous studies even though a compact sputtered-SnO 2 film was used. This high response was speculated to be due to a significant contribution of the resistance component near the electrode. Furthermore, CO 2 sensing was successfully performed in the CO 2 range of 200–4000 ppm with at least 200-ppm resolution. View Full-Text
Keywords: CO2 sensor; micromachined hotplate; La2O3; SnO2 CO2 sensor; micromachined hotplate; La2O3; SnO2

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Iwata, T.; Matsuda, K.; Takahashi, K.; Sawada, K. CO2 Sensing Characteristics of a La2O3/SnO2 Stacked Structure with Micromachined Hotplates. Sensors 2017, 17, 2156.

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