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Journal: Sensors, 2017
Volume: 17
Number: 779
Article:
Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness
Authors:
by
Attilio Frangi, Andrea Guerrieri and Nicoló Boni
Link:
https://www.mdpi.com/1424-8220/17/4/779
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