- Article
A „Hybrid“ Thin-Film pH Sensor with Integrated Thick-Film Reference
- Anette Simonis,
- Thomas Krings,
- Hans Lüth,
- Joseph Wang and
- Michael J. Schöning
A reference electrode fabricated by means of thick-film technique is deposited onto a silicon substrate and combined with a thin-film pH sensor to a “hybrid” chip system. To evaluate the suitability of this combination, first investigations were carr...