A novel method for transfer of tactile sensors using stiction effect temporary handling (SETH) is presented to simplify the microelectromechanical-system (MEMS)/CMOS integration process, improve the process reliability and electrical performance, and...
As MEMS design encounters growing challenges, particularly stiction between movable and stationary electrodes, dielectric charging, pull-in instability, and multi-valued response characteristics, the integration of dimple-equipped structures has emer...
Tactile sensation is a highly desired function in robotics. Furthermore, tactile sensor arrays are crucial sensing elements in pulse diagnosis instruments. This paper presents the fabrication of an integrated piezoresistive normal force sensor throug...
Stiction, run-in wear and friction of lubricated polyoxymethylene homopolymer (POM)- and aliphatic polyamide (PA46)-steel tribosystems were investigated for mild-loaded mixed lubrication conditions with and without thermal conditioning of the polymer...
In the current study, we explore the sensitivity of the actuation dynamics of electromechanical systems on novel materials, e.g., Bi2Se3, which is a well-known 3D Topological Insulator (TI), and compare their response to metallic conductors, e.g., Au...