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Keywords = piezoelectric transduction

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23 pages, 19870 KB  
Article
Dual-Mode, Orientation-Adaptive Broadband Rotational Energy Harvester for Diverse Noise and Vibration Environments
by Md Shamim Ahmed, Xianghong Ma and Yu Jia
Micromachines 2026, 17(7), 775; https://doi.org/10.3390/mi17070775 - 26 Jun 2026
Viewed by 221
Abstract
Rotational energy harvesters are often constrained by narrow operating bandwidths and sensitivity to specific rotational regimes, limiting their effectiveness under variable-speed conditions. This work presents an orientation-adaptive dual-mode piezoelectric rotational energy harvester capable of broadband energy extraction across diverse rotational and vibration environments. [...] Read more.
Rotational energy harvesters are often constrained by narrow operating bandwidths and sensitivity to specific rotational regimes, limiting their effectiveness under variable-speed conditions. This work presents an orientation-adaptive dual-mode piezoelectric rotational energy harvester capable of broadband energy extraction across diverse rotational and vibration environments. The proposed design combines gravity-induced magnetic excitation at low rotational speeds with centripetal-force-induced nonlinear dynamics at higher rotational speeds, enabling passive transition between operating modes without active tuning. A coupled nonlinear electromechanical model is developed to investigate the interactions among gravitational forcing, magnetic coupling, centripetal loading and piezoelectric transduction. Numerical simulations reveal the transition from gravity-dominated mono-stable behaviour to broadband nonlinear operation as rotational speed increases. Experimental validation is conducted using representative vibration profiles from aerospace, automotive, civil infrastructure and industrial environments. The results demonstrate clear orientation-dependent performance, with the downward cantilever configuration achieving a maximum average power output of 57.8 μW under aerospace elevation excitation, whilst the upward configuration exhibits improved robustness under broadband random vibrations. The proposed orientation-adaptive framework provides a compact, stator-independent solution for broadband rotational energy harvesting under realistic operating conditions. Full article
(This article belongs to the Special Issue Research Progress on Piezoelectric Energy Harvesting Devices)
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32 pages, 2699 KB  
Review
Advances in Wearable Biosensors for Non-Invasive Biofluid Monitoring
by Rajib Mondal and Manob Jyoti Saikia
Biosensors 2026, 16(6), 336; https://doi.org/10.3390/bios16060336 - 14 Jun 2026
Viewed by 822
Abstract
Chronic diseases such as cardiovascular disorders, diabetes, neurological conditions, and kidney disease continue to rise worldwide. These conditions create a growing demand for continuous, non-invasive, and personalized health monitoring technologies. Wearable biosensors meet this need by enabling real-time physiological and biochemical measurements outside [...] Read more.
Chronic diseases such as cardiovascular disorders, diabetes, neurological conditions, and kidney disease continue to rise worldwide. These conditions create a growing demand for continuous, non-invasive, and personalized health monitoring technologies. Wearable biosensors meet this need by enabling real-time physiological and biochemical measurements outside traditional clinical settings. Among wearable biosensors, those based on biofluids like sweat, tears, and saliva provide a painless alternative to blood sampling. These fluids also grant access to metabolites, electrolytes, hormones, proteins, and disease related biomarkers that reflect systemic health status. Advanced sensing technology allow us to continuously track health status by analyzing key biomarkers in these accessible biofluids. This review summarizes recent advances in non-invasive wearable biosensors and focuses on their sensing principles which includes biorecognition elements, signal transduction mechanisms, and data acquisition strategies. We also discussed key sensing modalities, including electrochemical, optical, thermal, and piezoelectric approaches, highlighting their advantages for wearable integration and performance in biofluid sensing. Finally the review also outlines recent developments and applications of these systems in biofluid sensing. In the end we highlights existing challenges, potential solutions, and future directions toward clinically deployable, AI-assisted precision healthcare systems. Full article
(This article belongs to the Special Issue Latest Wearable Biosensors—2nd Edition)
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35 pages, 31723 KB  
Article
A Bimodal Approach to Broadband Vibration Energy Harvesting Using Hybrid Piezoelectric–Electromagnetic Transduction
by Guangye Jia, Qiang Zhou and Huayang Zhao
Micromachines 2026, 17(5), 553; https://doi.org/10.3390/mi17050553 - 29 Apr 2026
Viewed by 544
Abstract
To address the issue of traditional bistable vibration energy harvesters (BVEHs) being prone to becoming trapped in a single potential well—which results in a narrowed energy harvesting bandwidth and reduced efficiency—this paper proposes a method that utilizes the nonlinear electromagnetic force generated during [...] Read more.
To address the issue of traditional bistable vibration energy harvesters (BVEHs) being prone to becoming trapped in a single potential well—which results in a narrowed energy harvesting bandwidth and reduced efficiency—this paper proposes a method that utilizes the nonlinear electromagnetic force generated during the induction process to modulate the kinematic behavior of the oscillator. The characteristics and influencing factors of the nonlinear force produced during electromagnetic induction are analyzed. A dual-cantilever beam structure is designed, with an iron-core coil and a magnet placed at the respective free ends. A mathematical model of a piezoelectric–electromagnetic coupled bimodal broadband vibration energy harvester is established and numerically simulated. Furthermore, a vertical vibration experimental platform is constructed to conduct frequency sweep tests. The experimental results demonstrate that the proposed piezoelectric–electromagnetic coupled bimodal broadband vibration energy harvester effectively improves energy harvesting efficiency. Within the frequency range of 5–20 Hz, the system exhibits two vibration modes, with resonant frequencies of approximately 7.7 Hz and 15.7 Hz. For a single-layer PVDF piezoelectric film, the maximum output power at the first and second resonance points is 8.9 μW and 9.7 μW, respectively. The electromagnetic module achieves maximum output powers of 0.39 W and 0.71 W. Moreover, within the frequency ranges of 6.3–9.8 Hz and 14–17.7 Hz (a total bandwidth of 7.2 Hz), the device maintains a stable power output. The effective bandwidth is broadened by approximately 80%, demonstrating excellent broadband performance. Full article
(This article belongs to the Special Issue Micro-Energy Harvesting Technologies and Self-Powered Sensing Systems)
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28 pages, 1815 KB  
Review
Low-Intensity Pulsed Ultrasound in Peripheral and Central Nerve Repair: Mechanisms and Emerging Therapeutic Strategies
by Cheng Ma, Saijie Song, Jianwu Dai and He Shen
J. Funct. Biomater. 2026, 17(3), 113; https://doi.org/10.3390/jfb17030113 - 26 Feb 2026
Viewed by 2560
Abstract
Low-intensity pulsed ultrasound (LIPUS) has emerged as a versatile, non-invasive physical modality with growing potential in regenerative medicine and neural repair. Advances in ultrasound physics and biomedical engineering have enabled precise spatiotemporal control of acoustic stimulation, positioning therapeutic ultrasound as an alternative to [...] Read more.
Low-intensity pulsed ultrasound (LIPUS) has emerged as a versatile, non-invasive physical modality with growing potential in regenerative medicine and neural repair. Advances in ultrasound physics and biomedical engineering have enabled precise spatiotemporal control of acoustic stimulation, positioning therapeutic ultrasound as an alternative to conventional pharmacological and surgical interventions that often suffer from limited targeting and substantial side effects. Unlike high-intensity focused ultrasound, which relies primarily on thermal ablation, LIPUS operates within a low-energy, non-thermal regime and modulates cellular behavior through mechanical cues, mechano-transduction, and downstream biological responses. Accumulating evidence demonstrates that LIPUS regulates calcium dynamics, cytoskeletal remodeling, neurotrophic factor expression, inflammation, myelination, and local vascular remodeling, thereby promoting functional recovery in both peripheral and central nerve injury models. Moreover, the integration of LIPUS with biomaterials, including piezoelectric scaffolds and acoustically responsive drug delivery systems, has expanded its functionality from direct stimulation to on-demand electrical signaling and controlled therapeutic release. Despite these advances, challenges remain regarding parameter standardization, mechanistic consistency, and clinical translation. In this review, we summarize the systems, parameters, and biological mechanisms underlying LIPUS, discuss its applications in peripheral and central nerve injury repair, and highlight emerging strategies and translational barriers toward intelligent, multimodal, and personalized ultrasound-based therapies. Full article
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18 pages, 6107 KB  
Article
Design, Modeling, and Fabrication of a High-Q AlN Annular Gyroscope with Sub-10°/h Bias Instability
by Zhenxiang Qi, Jie Gu, Bingchen Zhu, Zhaoyang Zhai, Xiaorui Bie, Wuhao Yang and Xudong Zou
Micromachines 2026, 17(2), 268; https://doi.org/10.3390/mi17020268 - 20 Feb 2026
Viewed by 1786
Abstract
This work presents a high-performance piezoelectric MEMS yaw gyroscope fabricated on a single-crystal silicon platform, which achieves a quality factor of 75 k—the highest reported to date among silicon-based piezoelectric gyroscopes. The device employs a wide annular resonator that operates at 132 kHz [...] Read more.
This work presents a high-performance piezoelectric MEMS yaw gyroscope fabricated on a single-crystal silicon platform, which achieves a quality factor of 75 k—the highest reported to date among silicon-based piezoelectric gyroscopes. The device employs a wide annular resonator that operates at 132 kHz in the in-plane wineglass mode. To maximize transduction efficiency, we develop an analytical model that relates output charge to the area-integrated in-plane stress under modal deformation, and we use this model to guide parametric optimization of the annular width. The resulting geometry simultaneously enhances the mechanical quality factor and the piezoelectric coupling. A back-etching fabrication process is used to eliminate front-side release holes, thereby preserving structural continuity and suppressing thermoelastic damping. In open-loop rate mode operation with a native frequency split of 28 Hz, the gyroscope demonstrates an angle random walk of 0.34°/√h and a bias instability of 8.19°/h. These performance metrics are comparable to those of state-of-the-art lead zirconate titanate (PZT)-based annular gyroscopes, while the use of lead-free aluminum nitride as the transduction material ensures compliance with RoHS environmental regulations. Full article
(This article belongs to the Special Issue Artificial Intelligence for Micro Inertial Sensors)
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29 pages, 6683 KB  
Article
A Hybrid Flow Energy Harvester to Power an IoT-Based Wireless Sensor System for the Digitization and Monitoring of Pipeline Networks
by Wahad Ur Rahman and Farid Ullah Khan
Machines 2025, 13(11), 1025; https://doi.org/10.3390/machines13111025 - 6 Nov 2025
Cited by 2 | Viewed by 1703
Abstract
This study presents a novel energy harvesting device that combines piezoelectric and electromagnetic transduction to extract energy from fluid flow within pipelines to supply power to wireless sensor nodes for the digital transformation of pipeline networks. The proposed harvester consisted of a permanent [...] Read more.
This study presents a novel energy harvesting device that combines piezoelectric and electromagnetic transduction to extract energy from fluid flow within pipelines to supply power to wireless sensor nodes for the digital transformation of pipeline networks. The proposed harvester consisted of a permanent magnet, an unimorph circular piezoelectric plate, an adjustable housing, two wound coils, and a coil holder. In laboratory tests, the harvester demonstrated an ability to produce 831.7 µW of AC power and 680 µW of DC power at a flow pressure of 2.90 kPa and a flow rate of 11.083 L/s. The energy harvester charged a power backup from 1.01 V to 4.49 V in a time duration of 120 min. Additionally, a low-power wireless system for monitoring pipeline pressure was developed and integrated with this energy harvesting system. By incorporating this technology into the digitization of pipeline systems, continuous power generation is possible, ensuring the reliable and autonomous operation of sensors for real-time data collection and monitoring of the pipeline network. The hybrid flow energy harvester surpasses both earlier standalone electromagnetic and piezoelectric flow energy harvesters. Full article
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25 pages, 5983 KB  
Article
Theoretical Modeling of Light-Fueled Self-Harvesting in Piezoelectric Beams Actuated by Liquid Crystal Elastomer Fibers
by Lin Zhou, Haiming Chen, Wu Bao, Xuehui Chen, Ting Gao and Dali Ge
Mathematics 2025, 13(19), 3226; https://doi.org/10.3390/math13193226 - 8 Oct 2025
Viewed by 822
Abstract
Traditional energy harvesting systems, such as photovoltaics and wind power, often rely on external environmental conditions and are typically associated with contact-based vibration wear and bulky structures. This study introduces light-fueled self-vibration to propose a self-harvesting system, consisting of liquid crystal elastomer fibers, [...] Read more.
Traditional energy harvesting systems, such as photovoltaics and wind power, often rely on external environmental conditions and are typically associated with contact-based vibration wear and bulky structures. This study introduces light-fueled self-vibration to propose a self-harvesting system, consisting of liquid crystal elastomer fibers, two resistors, and two piezoelectric cantilever beams arranged symmetrically. Based on the photothermal temperature evolution, we derive the governing equations of the liquid crystal elastomer fiber–piezoelectric beam system. Two distinct states, namely a self-harvesting state and a static state, are revealed through numerical simulations. The self-oscillation results from light-induced cyclic contraction of the liquid crystal elastomer fibers, driving beam bending, stress generation in the piezoelectric layer, and voltage output. Additionally, the effects of various system parameters on amplitude, frequency, voltage, and power are analyzed in detail. Unlike traditional vibration energy harvesters, this light-fueled self-harvesting system features a compact structure, flexible installation, and ensures continuous and stable energy output. Furthermore, by coupling the light-responsive LCE fibers with piezoelectric transduction, the system provides a non-contact actuation mechanism that enhances durability and broadens potential application scenarios. Full article
(This article belongs to the Special Issue Mathematical Models in Mechanics and Engineering)
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15 pages, 4427 KB  
Article
AlScN Thin Films for the Piezoelectric Transduction of Suspended Microchannel Resonators
by Yara Abdelaal, Marco Liffredo and Luis Guillermo Villanueva
Sensors 2025, 25(17), 5370; https://doi.org/10.3390/s25175370 - 31 Aug 2025
Cited by 1 | Viewed by 3230
Abstract
Suspended microchannel resonators (SMRs) are powerful tools for mass, density, and viscosity sensing. Among various transduction methods, full piezoelectric transduction offers key advantages, including on-chip integration, low energy dissipation, and linear response. This work explores sub-200 nm Al0.6Sc0.4N thin [...] Read more.
Suspended microchannel resonators (SMRs) are powerful tools for mass, density, and viscosity sensing. Among various transduction methods, full piezoelectric transduction offers key advantages, including on-chip integration, low energy dissipation, and linear response. This work explores sub-200 nm Al0.6Sc0.4N thin films for SMR transduction, benchmarking them against their well-established AlN predecessor. By integrating the piezoelectric stack into low-stress silicon nitride (ls-SiNx) beam resonators, we investigate the impact of bottom electrode design, photoresist removal prior to deposition, and deposition bias on film quality. Characterization includes X-ray diffraction (XRD), scanning electron microscopy (SEM), d31 piezoelectric coefficient, relative dielectric permittivity, and breakdown field measurements. Results illustrate the impacts of the studied parameters and demonstrate a fourfold increase in d31, compared to AlN, confirming the strong potential of Al0.6Sc0.4N for high-performance SMR transduction. Full article
(This article belongs to the Special Issue Feature Papers in Physical Sensors 2025)
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26 pages, 10383 KB  
Review
Flexible and Wearable Tactile Sensors for Intelligent Interfaces
by Xu Cui, Wei Zhang, Menghui Lv, Tianci Huang, Jianguo Xi and Zuqing Yuan
Materials 2025, 18(17), 4010; https://doi.org/10.3390/ma18174010 - 27 Aug 2025
Cited by 15 | Viewed by 4312
Abstract
Rapid developments in intelligent interfaces across service, healthcare, and industry have led to unprecedented demands for advanced tactile perception systems. Traditional tactile sensors often struggle with adaptability on curved surfaces and lack sufficient feedback for delicate interactions. Flexible and wearable tactile sensors are [...] Read more.
Rapid developments in intelligent interfaces across service, healthcare, and industry have led to unprecedented demands for advanced tactile perception systems. Traditional tactile sensors often struggle with adaptability on curved surfaces and lack sufficient feedback for delicate interactions. Flexible and wearable tactile sensors are emerging as a revolutionary solution, driven by innovations in flexible electronics and micro-engineered materials. This paper reviews recent advancements in flexible tactile sensors, focusing on their mechanisms, multifunctional performance and applications in health monitoring, human–machine interactions, and robotics. The first section outlines the primary transduction mechanisms of piezoresistive (resistance changes), capacitive (capacitance changes), piezoelectric (piezoelectric effect), and triboelectric (contact electrification) sensors while examining material selection strategies for performance optimization. Next, we explore the structural design of multifunctional flexible tactile sensors and highlight potential applications in motion detection and wearable systems. Finally, a detailed discussion covers specific applications of these sensors in health monitoring, human–machine interactions, and robotics. This review examines their promising prospects across various fields, including medical care, virtual reality, precision agriculture, and ocean monitoring. Full article
(This article belongs to the Special Issue Advances in Flexible Electronics and Electronic Devices)
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31 pages, 9769 KB  
Review
Recent Advances of Hybrid Nanogenerators for Sustainable Ocean Energy Harvesting: Performance, Applications, and Challenges
by Enrique Delgado-Alvarado, Enrique A. Morales-Gonzalez, José Amir Gonzalez-Calderon, Ma. Cristina Irma Peréz-Peréz, Jesús Delgado-Maciel, Mariana G. Peña-Juarez, José Hernandez-Hernandez, Ernesto A. Elvira-Hernandez, Maximo A. Figueroa-Navarro and Agustin L. Herrera-May
Technologies 2025, 13(8), 336; https://doi.org/10.3390/technologies13080336 - 2 Aug 2025
Cited by 6 | Viewed by 3036
Abstract
Ocean energy is an abundant, eco-friendly, and renewable energy resource that is useful for powering sensor networks connected to the maritime Internet of Things (MIoT). These sensor networks can be used to measure different marine environmental parameters that affect ocean infrastructure integrity and [...] Read more.
Ocean energy is an abundant, eco-friendly, and renewable energy resource that is useful for powering sensor networks connected to the maritime Internet of Things (MIoT). These sensor networks can be used to measure different marine environmental parameters that affect ocean infrastructure integrity and harm marine ecosystems. This ocean energy can be harnessed through hybrid nanogenerators that combine triboelectric nanogenerators, electromagnetic generators, piezoelectric nanogenerators, and pyroelectric generators. These nanogenerators have advantages such as high-power density, robust design, easy operating principle, and cost-effective fabrication. However, the performance of these nanogenerators can be affected by the wear of their main components, reduction of wave frequency and amplitude, extreme corrosion, and sea storms. To address these challenges, future research on hybrid nanogenerators must improve their mechanical strength, including materials and packages with anti-corrosion coatings. Herein, we present recent advances in the performance of different hybrid nanogenerators to harvest ocean energy, including various transduction mechanisms. Furthermore, this review reports potential applications of hybrid nanogenerators to power devices in marine infrastructure or serve as self-powered MIoT monitoring sensor networks. This review discusses key challenges that must be addressed to achieve the commercial success of these nanogenerators, regarding design strategies with advanced simulation models or digital twins. Also, these strategies must incorporate new materials that improve the performance, reliability, and integration of future nanogenerator array systems. Thus, optimized hybrid nanogenerators can represent a promising technology for ocean energy harvesting with application in the maritime industry. Full article
(This article belongs to the Special Issue Technological Advances in Science, Medicine, and Engineering 2024)
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81 pages, 10454 KB  
Review
Glancing Angle Deposition in Gas Sensing: Bridging Morphological Innovations and Sensor Performances
by Shivam Singh, Kenneth Christopher Stiwinter, Jitendra Pratap Singh and Yiping Zhao
Nanomaterials 2025, 15(14), 1136; https://doi.org/10.3390/nano15141136 - 21 Jul 2025
Cited by 5 | Viewed by 3820
Abstract
Glancing Angle Deposition (GLAD) has emerged as a versatile and powerful nanofabrication technique for developing next-generation gas sensors by enabling precise control over nanostructure geometry, porosity, and material composition. Through dynamic substrate tilting and rotation, GLAD facilitates the fabrication of highly porous, anisotropic [...] Read more.
Glancing Angle Deposition (GLAD) has emerged as a versatile and powerful nanofabrication technique for developing next-generation gas sensors by enabling precise control over nanostructure geometry, porosity, and material composition. Through dynamic substrate tilting and rotation, GLAD facilitates the fabrication of highly porous, anisotropic nanostructures, such as aligned, tilted, zigzag, helical, and multilayered nanorods, with tunable surface area and diffusion pathways optimized for gas detection. This review provides a comprehensive synthesis of recent advances in GLAD-based gas sensor design, focusing on how structural engineering and material integration converge to enhance sensor performance. Key materials strategies include the construction of heterojunctions and core–shell architectures, controlled doping, and nanoparticle decoration using noble metals or metal oxides to amplify charge transfer, catalytic activity, and redox responsiveness. GLAD-fabricated nanostructures have been effectively deployed across multiple gas sensing modalities, including resistive, capacitive, piezoelectric, and optical platforms, where their high aspect ratios, tailored porosity, and defect-rich surfaces facilitate enhanced gas adsorption kinetics and efficient signal transduction. These devices exhibit high sensitivity and selectivity toward a range of analytes, including NO2, CO, H2S, and volatile organic compounds (VOCs), with detection limits often reaching the parts-per-billion level. Emerging innovations, such as photo-assisted sensing and integration with artificial intelligence for data analysis and pattern recognition, further extend the capabilities of GLAD-based systems for multifunctional, real-time, and adaptive sensing. Finally, current challenges and future research directions are discussed, emphasizing the promise of GLAD as a scalable platform for next-generation gas sensing technologies. Full article
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33 pages, 4065 KB  
Review
Conducting Polymers-Based Gas Sensors: Principles, Materials, and Applications
by Rongqing Dong, Mingna Yang, Yinxiu Zuo, Lishan Liang, Huakun Xing, Xuemin Duan and Shuai Chen
Sensors 2025, 25(9), 2724; https://doi.org/10.3390/s25092724 - 25 Apr 2025
Cited by 46 | Viewed by 9875
Abstract
Conducting polymers (CPs) have emerged as promising materials for gas sensors due to their organic nature coupled with unique and versatile optical, electrical, chemical, and electrochemical properties. This review provides a comprehensive overview of the latest developments in conducting polymer-based gas sensors. First, [...] Read more.
Conducting polymers (CPs) have emerged as promising materials for gas sensors due to their organic nature coupled with unique and versatile optical, electrical, chemical, and electrochemical properties. This review provides a comprehensive overview of the latest developments in conducting polymer-based gas sensors. First, the fundamental gas sensing mechanisms in CPs-based sensors are elucidated, covering diverse transduction modes including electrochemical, chemiresistive, optical, piezoelectric, and field-effect transistor-based sensing. Next, the various types of conducting polymers employed in gas sensors, such as polypyrrole, polyaniline, polythiophene, and their composites are introduced, with emphasis on their synthesis methods, structural characteristics, and gas sensing response properties. Finally, the wide range of applications of these sensors is discussed, spanning industrial process control, environmental monitoring, food safety, biomedical diagnosis, and other fields, as well as existing issues such as long-term stability and humidity interference, and a summary of the biocompatibility and regulatory standards of these conductive polymers is provided. By integrating insights from sensing mechanisms, materials, and applications, this review offers a holistic understanding of CPs-based gas sensors. It also highlights future research directions, including device miniaturization, AI-assisted gas identification, multifunctional integrated sensing systems, wearable and flexible sensor platforms, and enhanced sensitivity, selectivity, and on-site detection capabilities. Full article
(This article belongs to the Special Issue Recent Advances in Sensors for Chemical Detection Applications)
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26 pages, 949 KB  
Review
Biosensors for Detecting Food Contaminants—An Overview
by António Inês and Fernanda Cosme
Processes 2025, 13(2), 380; https://doi.org/10.3390/pr13020380 - 30 Jan 2025
Cited by 34 | Viewed by 13031
Abstract
Food safety is a pressing global concern due to the risks posed by contaminants such as pesticide residues, heavy metals, allergens, mycotoxins, and pathogenic microorganisms. While accurate, traditional detection methods like ELISA, HPLC, and mass spectrometry are often time-consuming and resource-intensive, highlighting the [...] Read more.
Food safety is a pressing global concern due to the risks posed by contaminants such as pesticide residues, heavy metals, allergens, mycotoxins, and pathogenic microorganisms. While accurate, traditional detection methods like ELISA, HPLC, and mass spectrometry are often time-consuming and resource-intensive, highlighting the need for innovative alternatives. Biosensors based on biological recognition elements such as enzymes, antibodies, and aptamers, offer fast, sensitive, and cost-effective solutions. Using transduction mechanisms like electrochemical, optical, piezoelectric, and thermal systems, biosensors provide versatile tools for detecting contaminants. Advances in DNAzyme- and aptamer-based technologies enable the precise detection of heavy metals, while enzyme- and protein-based biosensors monitor metal-induced changes in biological activity. Innovations like microbial biosensors and DNA-modified electrodes enhance detection accuracy. Biosensors are also highly effective in identifying pesticide residues, allergens, mycotoxins, and pathogens through immunological, enzymatic, and nucleic acid-based techniques. The integration of nanomaterials and bioelectronics has significantly improved the sensitivity and performance of biosensors. By facilitating real-time, on-site monitoring, these devices address the limitations of conventional methods to ensure food quality and regulatory compliance. This review highlights the transformative role of biosensors and how biosensors are improved by emerging technologies in food contamination detection, emphasizing their potential to mitigate public health risks and enhance food safety throughout the supply chain. Full article
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34 pages, 15971 KB  
Review
MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications
by Qingyi Wang, Yang Zhang, Sizhe Cheng, Xianyang Wang, Shengjun Wu and Xufeng Liu
Micromachines 2025, 16(1), 43; https://doi.org/10.3390/mi16010043 - 30 Dec 2024
Cited by 17 | Viewed by 14737
Abstract
MEMS acoustic sensors are a type of physical quantity sensor based on MEMS manufacturing technology for detecting sound waves. They utilize various sensitive structures such as thin films, cantilever beams, or cilia to collect acoustic energy, and use certain transduction principles to read [...] Read more.
MEMS acoustic sensors are a type of physical quantity sensor based on MEMS manufacturing technology for detecting sound waves. They utilize various sensitive structures such as thin films, cantilever beams, or cilia to collect acoustic energy, and use certain transduction principles to read out the generated strain, thereby obtaining the targeted acoustic signal’s information, such as its intensity, direction, and distribution. Due to their advantages in miniaturization, low power consumption, high precision, high consistency, high repeatability, high reliability, and ease of integration, MEMS acoustic sensors are widely applied in many areas, such as consumer electronics, industrial perception, military equipment, and health monitoring. Through different sensing mechanisms, they can be used to detect sound energy density, acoustic pressure distribution, and sound wave direction. This article focuses on piezoelectric, piezoresistive, capacitive, and optical MEMS acoustic sensors, showcasing their development in recent years, as well as innovations in their structure, process, and design methods. Then, this review compares the performance of devices with similar working principles. MEMS acoustic sensors have been increasingly widely applied in various fields, including traditional advantage areas such as microphones, stethoscopes, hydrophones, and ultrasound imaging, and cutting-edge fields such as biomedical wearable and implantable devices. Full article
(This article belongs to the Special Issue Recent Advances in Silicon-Based MEMS Sensors and Actuators)
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18 pages, 4912 KB  
Article
Piezoelectrically and Capacitively Transduced Hybrid MEMS Resonator with Superior RF Performance and Enhanced Parasitic Mitigation by Low-Temperature Batch Fabrication
by Adnan Zaman, Ugur Guneroglu, Abdulrahman Alsolami and Jing Wang
Appl. Sci. 2024, 14(18), 8166; https://doi.org/10.3390/app14188166 - 11 Sep 2024
Cited by 3 | Viewed by 2758
Abstract
This study investigates a hybrid microelectromechanical system (MEMS) acoustic resonator through a hybrid approach to combine capacitive and piezoelectric transduction mechanisms, thus harnessing the advantages of both transducer technologies within a single device. By seamlessly integrating both piezoelectric and capacitive transducers, the newly [...] Read more.
This study investigates a hybrid microelectromechanical system (MEMS) acoustic resonator through a hybrid approach to combine capacitive and piezoelectric transduction mechanisms, thus harnessing the advantages of both transducer technologies within a single device. By seamlessly integrating both piezoelectric and capacitive transducers, the newly designed hybrid resonators mitigate the limitations of capacitive and piezoelectric resonators. The unique hybrid configuration holds promise to significantly enhance overall device performance, particularly in terms of quality factor (Q-factor), insertion loss, and motional impedance. Moreover, the dual-transduction approach improves the signal-to-noise ratio and reduces feedthrough noise levels at higher frequencies. In this paper, the detailed design, complex fabrication processes, and thorough experimental validation are presented, demonstrating substantial performance enhancement potentials. A hybrid disk resonator with a single side-supporting anchor achieved an outstanding loaded Q-factor higher than 28,000 when operating under a capacitive drive and piezoelectric sense configuration. This is comparably higher than the measured Q-factor of 7600 for another disk resonator with two side-supporting anchors. The hybrid resonator exhibits a high Q-factor at its resonance frequency at 20 MHz, representing 2-fold improvement over the highest reported Q-factor for similar MEMS resonators in the literature. Also, the dual-transduction approach resulted in a more than 30 dB improvement in feedthrough suppression for devices with a 500 nm-thick ZnO layer, while hybrid resonators with a thicker piezoelectric layer of 1300 nm realized an even greater feedthrough suppression of more than 50 dB. The hybrid resonator integration strategy discussed offers an innovative solution for current and future advanced RF front-end applications, providing a versatile platform for future innovations in on-chip resonator technology. This work has the potential to lead to advancements in MEMS resonator technology, facilitating some significant improvements in multi-frequency and frequency agile RF applications through the original designs equipped with integrated capacitive and piezoelectric transduction mechanisms. The hybrid design also results in remarkable performance metrics, making it an ideal candidate for integrating next-generation wireless communication devices where size, cost, and energy efficiency are critical. Full article
(This article belongs to the Section Acoustics and Vibrations)
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