Search Results (841)

This paper presents a theoretical model of a thin, penny-shaped piezoelectric actuator bonded to an isotropic thermo-elastic substrate under coupled electrical-thermal-diffusive loading. The problem is assumed to be axisymmetric, and the peeling stress of the film is neglected in accordance with membrane theory, yielding a simplified equilibrium equation for the piezoelectric film. By employing potential theory and the Hankel transform technique, the surface strain of the substrate is analytically derived. Under the assumption of perfect bonding, a governing integral equation is established in terms of interfacial shear stress. The solution to this integral equation is obtained numerically using orthotropic Chebyshev polynomials. The derived results include the interfacial shear stress, stress intensity factors, as well as the radial and hoop stresses within the system. Finite element analysis is conducted to validate the theoretical predictions. Furthermore, parametric studies elucidate the influence of material mismatch and actuator geometry on the mechanical response. The findings demonstrate that, the performance of the piezoelectric actuator can be optimized through judicious control of the applied electrical-thermal-diffusive loads and careful selection of material and geometric parameters. This work provides valuable insights for the design and optimization of piezoelectric actuator structures in practical engineering applications. Full article

Actuators and power electronics are fundamental components of modern control systems, enabling high-precision functionality, enhanced energy efficiency, and sophisticated automation. This study investigates evolving research trends and thematic developments in these areas spanning the last two decades (2005–2024). This study analyzed 1840 peer-reviewed abstracts obtained from the Web of Science database using BERTopic modeling, which integrates transformer-based sentence embeddings with UMAP for dimensionality reduction and HDBSCAN for clustering. The approach also employed class-based TF-IDF calculations, intertopic distance visualization, and hierarchical clustering to clarify topic structures. The analysis revealed a steady increase in research publications, with a marked surge post-2015. From 2005 to 2014, investigations were mainly focused on established areas including piezoelectric actuators, adaptive control, and hydraulic systems. In contrast, the 2015–2024 period saw broader diversification into new topics such as advanced materials, robotic mechanisms, resilient systems, and networked actuator control through communication protocols. The structural topic analysis indicated a shift from a unified to a more differentiated and specialized spectrum of research themes. This study offers a rigorous, data-driven outlook on the increasing complexity and diversity of actuator and power electronics research. The findings are pertinent for researchers, engineers, and policymakers aiming to advance state-of-the-art, sustainable industrial technologies. Full article

This work presents an innovative hydrothermal approach for fabricating flexible piezoelectric PZT thin films on 20 μm titanium foil substrates using TiO₂ and SrTiO₃ (STO) interlayers. Three heterostructures (Ti/PZT, Ti/TiO₂/PZT, and Ti/TiO₂/STO/PZT) were synthesized to enable low-temperature growth and improve ferroelectric performance for advanced flexible MEMS. Characterizations including XRD, PFM, and P–E loop analysis evaluated crystallinity, piezoelectric coefficient d₃₃, and polarization behavior. The results demonstrate that the multilayered Ti/TiO₂/STO/PZT structure significantly enhances performance. XRD confirmed the STO buffer layer effectively reduces lattice mismatch with PZT to ~0.76%, promoting stable morphotropic phase boundary (MPB) composition formation. This optimized film exhibited superior piezoelectric and ferroelectric properties, with a high d₃₃ of 113.42 pm/V, representing an ~8.65% increase over unbuffered Ti/PZT samples, and displayed more uniform domain behavior in PFM imaging. Impedance spectroscopy showed the lowest minimum impedance of 8.96 Ω at 10.19 MHz, indicating strong electromechanical coupling. Furthermore, I–V measurements demonstrated significantly suppressed leakage currents in the STO-buffered samples, with current levels ranging from 10⁻¹² A to 10⁻⁹ A over ±3 V. This structure also showed excellent fatigue endurance through one million electrical cycles, confirming its mechanical and electrical stability. These findings highlight the potential of this hydrothermally engineered flexible heterostructure for high-performance actuators and sensors in advanced MEMS applications. Full article

With the acceleration of industrialization, deformable mechanisms that can adapt to complex environments have gained widespread applications. Joints serve as carriers for transmitting forces and motions between components, and their stiffness significantly influences the static and dynamic characteristics of deformable mechanisms. A variable stiffness joint is crucial for ensuring the safety and reliability of the system, as well as for enhancing environmental adaptability. However, existing variable stiffness joints fail to meet the requirements for miniaturization, lightweight construction, and fast response. This paper proposes a piezoelectric-actuated variable stiffness miniature rotary joint featuring a compact structure, monitorable loading state, and rapid response. Given that the piezoelectric stack expands and contracts when energized, this paper proposes a transmission principle for stiffness adjustment by varying the pressure and friction between active and passive components. This joint utilizes a flexible hinge mechanism for displacement amplification and incorporates a torque sensor based on strain monitoring. A static model is developed based on piezoelectric equations and displacement amplification characteristics, and simulations confirm the feasibility of the stiffness adjustment scheme. The mechanical characteristics of various flexible hinge structures are analyzed, and the effects of piezoelectric actuation capability and external load on stiffness adjustment are examined. The experimental results demonstrate that the joint can adjust stiffness, and the sensor is calibrated using the least squares algorithm to monitor the stress state of the joint in real time. Full article

Lead zirconate titanate (PZT) piezoelectric ceramics are widely used functional materials due to their strong and stable piezoelectric properties. A leveling method based on lead zirconate titanate piezoelectric ceramics is proposed for the high level of accuracy required in microelectromechanical fields such as aerospace, industrial robotics, biomedical, and photolithography. A leveling mechanism consisting of core components such as piezoelectric ceramic actuators and sensors is designed. The closed-loop leveling of the working platform is performed using the electromechanical coupling effect of the PZT piezoelectric material. Combined with the theory of the dielectric inverse piezoelectric effect in electric fields, a simulation is used to analyze the four force and deformation cases generated by the drive legs when the load is attached at different positions of the working platform, and the leveling is realized by applying the drive voltage to generate micro-motion displacement. Simulation and calculation results show that the leveling method can reduce the tilt angle of the working platform by 60% when the driving voltage is in the range of 10~150 V. The feasibility of the leveling method and the uniformity of the theoretical calculation and simulation are verified. Full article

To meet the demand for submillimeter-level gripping capabilities in micro-grippers, an amplification mechanism based on a flexible four-bar linkage is proposed. The micro-gripper designed using this mechanism features a large gripping stroke in the millimeter range. First, the amplification effect of the flexible four-bar linkage was structurally designed and theoretically analyzed. Through kinematic analysis, a theoretical model was developed, demonstrating that the flexible four-bar linkage can achieve an extremely high amplification factor, thus providing a theoretical foundation for the design of the micro-gripper. Then, kinematic and mechanical simulations of the micro-gripper were conducted and validated using ANSYS 2025 simulation software, confirming the correctness of the theoretical analysis. Finally, an experimental platform was set up to analyze the characteristics of the micro-gripper, including its stroke, resolution, and gripping force. The results show that the displacement amplification factor of the gripper designed based on the flexible four-bar linkage can reach 40, with a displacement resolution of 50 nm and a gripping range of 0–880 μm. By using capacitive displacement sensors and strain sensors, integrated force and displacement control can be realized. The large-stroke micro-gripper based on the flexible four-bar linkage is compact, with a large stroke, and has broad application prospects. Full article

This paper presents a modeling framework for hysteretically nonlinear piezoelectric composite beams using functional differential equations (FDEs). While linear piezoelectric models are well established, they fail to capture the complex nonlinear behaviors that emerge at higher electric field strengths, particularly history-dependent hysteresis effects. This paper develops a cascade model that integrates a high-dimensional linear piezoelectric composite beam representation with a nonlinear Krasnosel’skii–Pokrovskii (KP) hysteresis operator. The resulting system is formulated using a state-space model where the input voltage undergoes a history-dependent transformation. Through modal expansion and discretization of the Preisach plane, we derive a tractable numerical implementation that preserves essential nonlinear phenomena. Numerical investigations demonstrate how system parameters, including the input voltage amplitude, and hysteresis parameters significantly influence the dynamic response, particularly the shape and amplitude of limit cycles. The results reveal that while the model accurately captures memory-dependent nonlinearities, it depends on numerous real and distributed parameters, highlighting the need for efficient reduced-order modeling approaches. This work provides a foundation for understanding and predicting the complex behavior of piezoelectric systems with hysteresis, with potential applications in vibration control, energy harvesting, and precision actuation. Full article

An active rotor with trailing edge flaps (TEFs) is an effective method for helicopter vibration elimination. The nonlinear hysteresis of piezoelectric actuators used to drive TEFs can adversely affect helicopter vibration control performance. In this paper, a hysteresis modeling and compensation study is performed for piezoelectric actuators used in TEFs. Firstly, the hysteresis characteristics of a rhombic frame actuator with input voltages at different frequencies are investigated by bench-top tests. Subsequently, the Bouc–Wen model is adopted to establish the hysteresis model of the piezoelectric actuator, with its parameters identified through the particle swarm optimization (PSO) algorithm. Experimental results demonstrate that the proposed model is capable of accurately capturing the hysteresis phenomenon of the piezoelectric actuator within the frequency range of 10–60 Hz. Finally, a compound control regime is established by integrating inverse Bouc–Wen model control with fuzzy PID feedback control. The experimental results indicate that the developed compound control regime can significantly suppress the piezoelectric actuator hysteresis of TEFs within the frequency bandwidth of 10–60 Hz, which lays the foundation for improving the vibration control performance of the active rotor with TEFs in the future. Full article

This study investigates the propagation of shear horizontal transverse waves in a functionally graded piezoelectric half-space (FGPHS), where the material properties vary linearly and quadratically. The analysis focuses on deriving and understanding the dispersion characteristics of such waves in in-homogeneous media. The WKB approximation method is employed to obtain the dispersion relation analytically, considering the smooth variation of material properties. To validate and study the wave behavior numerically, two advanced techniques were utilized: the Semi-Analytical Finite Element with Perfectly Matched Layer (SAFE-PML) and the Semi-Analytical Infinite Element (SAIFE) method incorporating a (1/r) decay model to simulate infinite media. The numerical implementation uses the Rayleigh–Ritz method to discretize the wave equation, and Gauss 3-point quadrature is applied for efficient numerical integration. The dispersion curves are plotted to illustrate the wave behavior in the graded piezoelectric medium. The results from SAFE-PML and SAIFE are in excellent agreement, indicating that these techniques effectively model the shear horizontal transverse wave propagation in such structures. This study also demonstrates that combining finite and infinite element approaches provides accurate and reliable simulation of wave phenomena in functionally graded piezoelectric materials, which has applications in sensors, actuators, and non-destructive testing. Full article

Defective phononic crystals (PnCs) have garnered significant attention for their ability to localize and amplify elastic wave energy within defect sites or to perform narrowband filtering at defect-band frequencies. The necessity for continuously tunable defect characteristics is driven by the variable excitation frequencies encountered in rotating machinery. Conventional tuning methodologies, including synthetic negative capacitors or inductors integrated with piezoelectric defects, are constrained to fixed, offline, and incremental adjustments. To address these limitations, the present study proposes an active feedback approach that facilitates online, wide-range steering of defect bands in a one-dimensional PnC. Each defect is equipped with a pair of piezoelectric sensors and actuators, governed by three independently tunable feedback gains: displacement, velocity, and acceleration. Real-time sensor signals are transmitted to a multivariable proportional controller, which dynamically modulates local electroelastic stiffness via the actuators. This results in continuous defect-band frequency shifts across the entire band gap, along with on-demand sensitivity modulation. The analytical model that incorporates these feedback gains has been demonstrated to achieve a level of agreement with COMSOL benchmarks that exceeds 99%, while concurrently reducing computation time from hours to seconds. Displacement- and acceleration-controlled gains yield predictable, monotonic up- or down-shifts in defect-band frequency, whereas the velocity-controlled gain permits sensitivity adjustment without frequency drifts. Furthermore, the combined-gain operation enables the concurrent tuning of both the center frequency and the filtering sensitivity, thereby facilitating an instantaneous remote reconfiguration of bandpass filters. This framework establishes a new class of agile, adaptive ultrasonic devices with applications in ultrasonic imaging, structural health monitoring, and prognostics and health management. Full article

This work presents the theoretical design and finite element modeling of high-sensitivity microcantilevers for biosensing applications, integrating piezoelectric actuation with novel ultrananocrystalline diamond (UNCD) structures. Microcantilevers were designed based on projections to grow a multilayer metal/AlN/metal/UNCD stack on silicon substrates, optimized to detect adsorption of biomolecules on the surface of exposed UNCD microcantilevers at the picogram scale. A central design criterion was to match the microcantilever’s eigenfrequency with the resonant frequency of the AlN-based piezoelectric actuator, enabling efficient dynamic excitation. The beam length was tuned to ensure a ≥2 kHz resonant frequency shift upon adsorption of 1 pg of mass distributed on the exposed surface of a UNCD-based microcantilever. Subsequently, a Gaussian distribution mass function with a variance of 5 µm was implemented to evaluate the resonant frequency shift upon mass addition at a certain point on the microcantilever where a variation from 600 Hz to 100 Hz was observed when the mass distribution center was located at the tip of the microcantilever and the piezoelectric borderline, respectively. Both frequency and time domain analyses were performed to predict the resonance behavior, oscillation amplitude, and quality factor. To ensure the reliability of the simulations, the model was first validated using experimental results reported in the literature for an AlN/nanocrystalline diamond (NCD) microcantilever. The results confirmed that the AlN/UNCD architecture exhibits higher resonant frequencies and enhanced sensitivity compared to equivalent AlN/Si structures. The findings demonstrate that using a UNCD-based microcantilever not only improves biocompatibility but also significantly enhances the mechanical performance of the biosensor, offering a robust foundation for the development of next-generation MEMS-based biochemical detection platforms. The research reported here introduces a novel design methodology that integrates piezoelectric actuation with UNCD microcantilevers through eigenfrequency matching, enabling efficient picogram-scale mass detection. Unlike previous approaches, it combines actuator and cantilever optimization within a unified finite element framework, validated against experimental data published in the literature for similar piezo-actuated sensors using materials with inferior biocompatibility compared with the novel UNCD. The dual-domain simulation strategy offers accurate prediction of key performance metrics, establishing a robust and scalable path for next-generation MEMS biosensors. Full article

Gas bubbles are one of the main disturbances encountered when dispensing drugs of microliter volumes using portable miniaturized systems based on piezoelectric diaphragm micropumps. The presence of a gas bubble in the pump chamber leads to the inaccurate administration of the required dose due to its impact on the flowrate. This is particularly important for highly concentrated drugs such as insulin. Different types of sensors are used to detect gas bubbles: inline on the fluidic channels or inside the pump chamber itself. These solutions increase the complexity, size, and cost of the microdosing system. To address these problems, a radically new approach is taken by utilizing the sensing capability of the piezoelectric diaphragm during micropump actuation. This work demonstrates the workflow to build a self-sensing micropump based on artificial intelligence methods on an embedded system. This is completed by the implementation of an electronic circuit that amplifies and samples the loading current of the piezoelectric ceramic with a microcontroller STM32G491RE. Training datasets of 11 micropumps are generated at an automated testbench for gas bubble injections. The training and hyper-parameter optimization of artificial intelligence algorithms from the TensorFlow and scikit-learn libraries are conducted using a grid search approach. The classification accuracy is determined by a cross-training routine, and model deployment on STM32G491RE is conducted utilizing the STM32Cube.AI framework. The finally deployed model on the embedded system has a memory footprint of 15.23 kB, a runtime of 182 µs, and detects gas bubbles with an accuracy of 99.41%. Full article

Piezoelectric polymer composites, particularly polyvinylidene fluoride (PVDF) blended with barium titanate (BT), show promise for wearable technologies as both energy harvesters and haptic actuators. However, these composites typically exhibit limited electromechanical coupling and insufficient β-phase formation. This study presents a novel approach using ionic liquids (ILs) to enhance PVDF-based piezoelectric composite performance. Through solution-casting methods, we examined the effect of IL concentration on the structural, mechanical, and piezoelectric properties of PVDF/BT composites. Results demonstrate that the use of IL significantly improves β-phase crystallization in PVDF while enhancing electrical properties and mechanical flexibility, which are key requirements for effective energy harvesting and haptic feedback applications. The optimized composites show a 25% increase in β-phase content, enhanced flexibility, and a 100% improvement in piezoelectric voltage output compared to other more conventional PVDF/BT systems. The IL-modified composite exhibits superior piezoelectric response, generating an output voltage of 9 V and an output power of 40.1 µW under mechanical excitation and a displacement of 138 nm when subjected to 13 V peak-to-peak voltage, making it particularly suitable for haptic interfaces. These findings establish a pathway toward high-performance, flexible piezoelectric materials for multifunctional wearable applications in human–machine interfaces. Full article

Piezoelectric actuators are commonly used in high precision, micro-displacement applications. However, nonlinear phenomena, like hysteresis, may reduce their performance. This article compares several control approaches—based on the combination of sliding mode control and artificial neural networks—for coping with these nonlinearities and improving actuator positioning accuracy and robustness. In particular, it discusses the application of diverse order sliding mode control techniques, such as conventional, twisting algorithms, super-twisting algorithms, and the prescribed convergence law, in combination with artificial neural networks. Moreover, it validates experimentally, with a commercial piezoelectric actuator, the application of these control structures using a dSPACE 1104 controller board. Finally, it evaluates the computational time consumption for the control strategies presented. This work intends to guide the designers of PEA commercial applications to select the best control algorithm and identify the hardware requirements. Full article

This paper presents a cost-effective and versatile pico-dispensing technique as an efficient and straightforward approach for depositing zinc oxide nanoparticle (ZnO—NP) thin films on micromechanical devices (MEMS). Due to its piezoelectric properties, bulk ZnO is commonly used as a material for micro-/nanocantilever actuation. The pico-dispensing process provides precise control over the deposition, allowing uniform and localized application of ZnO—NP on microcantilevers. Compared to traditional ZnO deposition techniques (e.g., sputtering or sol–gel), pico-dispensing of ZnO—NP offers advantages in simplicity, reduced material waste, and significantly lower costs. Furthermore, it is easy to tailor the composition and properties by incorporating nanoparticles of other materials. Experimental results demonstrate that ZnO—NP thin films deposited via pico-dispensing enable actuation with amplitudes of several nanometers and bandwidths up to 250 kHz, making them potentially suitable for actuation of micromechanical devices such as in dynamic AFM modes. Full article