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Keywords = hetero-epitaxy

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15 pages, 4225 KB  
Article
Defect-Mediated Threshold Voltage Tuning in β-Ga2O3 MOSFETs via Fluorine Plasma Treatment
by Lisheng Wang, Yifan Zhang, Junxing Dong, Jingzhuo Wang, Zenan Wang, Yuan Feng, Xianghu Wang, Si Shen and Hai Zhu
Nanomaterials 2025, 15(24), 1896; https://doi.org/10.3390/nano15241896 - 17 Dec 2025
Viewed by 380
Abstract
We demonstrate high-performance MOSFETs on β-Ga2O3 films grown by plasma-assisted molecular beam epitaxy (PA-MBE). The high crystalline quality of the β-Ga2O3 epilayer was confirmed by X-ray diffraction and atomic force microscopy. An optimized CF4-plasma treatment [...] Read more.
We demonstrate high-performance MOSFETs on β-Ga2O3 films grown by plasma-assisted molecular beam epitaxy (PA-MBE). The high crystalline quality of the β-Ga2O3 epilayer was confirmed by X-ray diffraction and atomic force microscopy. An optimized CF4-plasma treatment was employed to introduce fluorine (F) into the near-surface region, effectively suppressing donor-like states. The resulting devices exhibit an ultralow off-state current of 1 × 10−9 mA/mm and a stable on/off ratio of 105. A controllable positive threshold voltage shift up to +12.4 V was achieved by adjusting the plasma duration. X-ray photoelectron spectroscopy indicates that incorporated F atoms form F–Ga-related bonds and compensate oxygen-related donor defects. Sentaurus TCAD simulations reveal reduced near-surface charge and a widened depletion region, providing a physical explanation for the experimentally observed increase in breakdown voltage from 453 V to 859 V. These results clarify the role of fluorine in modulating surface defect states in PA-MBE β-Ga2O3 and demonstrate an effective route for threshold-voltage engineering and leakage suppression in Ga2O3 power devices. Full article
(This article belongs to the Section Nanophotonics Materials and Devices)
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15 pages, 4327 KB  
Article
A Pathway to High-Quality Heteroepitaxial Ga2O3 Films via Metalorganic Chemical Vapor Deposition
by Yifan Li, Yachao Zhang, Kelin Wang, Guoliang Peng, Shengrui Xu, Qian Feng, Jinbang Ma, Yixin Yao, Yue Hao and Jincheng Zhang
Micromachines 2025, 16(12), 1363; https://doi.org/10.3390/mi16121363 - 29 Nov 2025
Viewed by 488
Abstract
This work systematically investigates the heteroepitaxial growth of β-Ga2O3 thin films under varied substrate and temperature conditions via metalorganic chemical vapor deposition (MOCVD). Comprehensive characterization reveals that both the substrate type and growth temperature significantly influence the crystalline quality, surface [...] Read more.
This work systematically investigates the heteroepitaxial growth of β-Ga2O3 thin films under varied substrate and temperature conditions via metalorganic chemical vapor deposition (MOCVD). Comprehensive characterization reveals that both the substrate type and growth temperature significantly influence the crystalline quality, surface morphology, chemical composition, and defect structure. Films grown at higher temperatures generally exhibit superior crystallinity and closer-to-stoichiometry composition, and thus suggest a reduction in oxygen deficiency. Certain substrates are shown to facilitate high-quality epitaxial growth with smooth surfaces and excellent crystallographic alignment. These findings offer key insights into optimizing growth parameters for high-performance β-Ga2O3-based devices. Full article
(This article belongs to the Topic Wide Bandgap Semiconductor Electronics and Devices)
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11 pages, 4012 KB  
Article
Direct Epitaxy of SnSe2/SnSe Hetero-Bilayer with a Type-III Band Gap Alignment
by Li-Guo Dou, Ruo-Nan Guo, Huiping Li, Cheng-Long Xue, Qian-Qian Yuan, Shu-Hua Yao, Yang-Yang Lv, Yanbin Chen, Wenguang Zhu and Shao-Chun Li
Appl. Sci. 2025, 15(20), 11110; https://doi.org/10.3390/app152011110 - 16 Oct 2025
Viewed by 945
Abstract
Van der Waals (vdW) heterostructures formed by stacking two distinct semiconductor monolayers have gained increasing research interest because of the various predicted and realized exotic phenomena that are absent in the corresponding monolayers. However, constructing such a vdW hetero-bilayer is very challenging and [...] Read more.
Van der Waals (vdW) heterostructures formed by stacking two distinct semiconductor monolayers have gained increasing research interest because of the various predicted and realized exotic phenomena that are absent in the corresponding monolayers. However, constructing such a vdW hetero-bilayer is very challenging and mostly relies on top-down mechanical methods. Here, we report a direct growth of an SnSe2/SnSe hetero-bilayer by using molecular beam epitaxy (MBE), in which elaborate interface engineering is the key to success. Scanning tunneling microscopy (STM) characterization demonstrated the well-defined and uniform moiré patterns, indicating an atomic-scale clean and uniform SnSe2/SnSe interface. In combination with first-principles density functional theory (DFT) calculations, we further unveiled a type-III band gap alignment between the SnSe2 and SnSe monolayers. This work provides a new method for building vertical SnSe2/SnSe hetero-bilayers and a novel platform for exploring functional devices based on the type-III band alignment. Full article
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24 pages, 12807 KB  
Article
Oriented-Attachment-Driven Heteroepitaxial Growth During Early Coalescence of Single-Crystal Diamond on Iridium: A Combined Multiscale Simulation and Experimental Validation
by Yang Wang, Junhao Chen, Zhe Li, Shilin Yang and Jiaqi Zhu
Crystals 2025, 15(9), 803; https://doi.org/10.3390/cryst15090803 - 12 Sep 2025
Cited by 2 | Viewed by 1209
Abstract
The scalable synthesis of high-quality single-crystal diamond films remains pivotal for next-generation extreme-performance devices. Iridium substrates offer exceptional promise for heteroepitaxy, yet early-stage growth mechanisms limiting crystal quality are poorly understood. An integrated multiscale investigation combining first-principles DFT calculations, molecular dynamics simulations, and [...] Read more.
The scalable synthesis of high-quality single-crystal diamond films remains pivotal for next-generation extreme-performance devices. Iridium substrates offer exceptional promise for heteroepitaxy, yet early-stage growth mechanisms limiting crystal quality are poorly understood. An integrated multiscale investigation combining first-principles DFT calculations, molecular dynamics simulations, and experimental validation is presented to resolve the oriented attachment process governing diamond growth on Ir(100). Robust interfacial bonding at the interface and optimal carbon coverage are revealed to provide thermodynamic driving forces for primary nucleation. A critical angular tolerance enabling defect-free coalescence through crystallographic realignment is identified by molecular dynamics. Concurrent nucleation growth pathways are experimentally confirmed through SEM, AFM, and Raman spectroscopy, where nascent crystallites undergo spontaneous orientational registry to form continuous epitaxial domains. Grain boundary annihilation is observed upon lattice rotation aligning adjacent grains below the critical angle. Crucially, intrinsic atomic steps are generated on the resultant coalesced layer, eliminating conventional etching requirements for homoepitaxial thickening. This work advances fundamental understanding of single-crystal diamond growth mechanisms, facilitating enhanced quality control for semiconductor device manufacturing and quantum applications. Full article
(This article belongs to the Section Inorganic Crystalline Materials)
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10 pages, 2570 KB  
Article
Demonstration of Monolithic Integration of InAs Quantum Dot Microdisk Light Emitters and Photodetectors Directly Grown on On-Axis Silicon (001)
by Shuaicheng Liu, Hao Liu, Jihong Ye, Hao Zhai, Weihong Xiong, Yisu Yang, Jun Wang, Qi Wang, Yongqing Huang and Xiaomin Ren
Micromachines 2025, 16(8), 897; https://doi.org/10.3390/mi16080897 - 31 Jul 2025
Cited by 1 | Viewed by 1269
Abstract
Silicon-based microcavity quantum dot lasers are attractive candidates for on-chip light sources in photonic integrated circuits due to their small size, low power consumption, and compatibility with silicon photonic platforms. However, integrating components like quantum dot lasers and photodetectors on a single chip [...] Read more.
Silicon-based microcavity quantum dot lasers are attractive candidates for on-chip light sources in photonic integrated circuits due to their small size, low power consumption, and compatibility with silicon photonic platforms. However, integrating components like quantum dot lasers and photodetectors on a single chip remains challenging due to material compatibility issues and mode field mismatch problems. In this work, we have demonstrated monolithic integration of an InAs quantum dot microdisk light emitter, waveguide, and photodetector on a silicon platform using a shared epitaxial structure. The photodetector successfully monitored variations in light emitter output power, experimentally proving the feasibility of this integrated scheme. This work represents a key step toward multifunctional integrated photonic systems. Future efforts will focus on enhancing the light emitter output power, improving waveguide efficiency, and scaling up the integration density for advanced applications in optical communication. Full article
(This article belongs to the Special Issue Silicon-Based Photonic Technology and Devices)
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10 pages, 4230 KB  
Article
Enhanced UVC Responsivity of Heteroepitaxial α-Ga2O3 Photodetector with Ultra-Thin HfO2 Interlayer
by SiSung Yoon, SeungYoon Oh, GyuHyung Lee, YongKi Kim, SunJae Kim, Ji-Hyeon Park, MyungHun Shin, Dae-Woo Jeon and GeonWook Yoo
Micromachines 2025, 16(7), 836; https://doi.org/10.3390/mi16070836 - 21 Jul 2025
Cited by 3 | Viewed by 1503
Abstract
In this study, the influence of HfO2 interlayer thickness on the performance of heteroepitaxial α-Ga2O3 layer-based metal–insulator–semiconductor–insulator–metal (MISIM) ultraviolet photodetectors is examined. A thin HfO2 interlayer enhances the interface quality and reduces the density of interface traps, thereby [...] Read more.
In this study, the influence of HfO2 interlayer thickness on the performance of heteroepitaxial α-Ga2O3 layer-based metal–insulator–semiconductor–insulator–metal (MISIM) ultraviolet photodetectors is examined. A thin HfO2 interlayer enhances the interface quality and reduces the density of interface traps, thereby improving the performance of UVC photodetectors. The fabricated device with a 1 nm HfO2 interlayer exhibited a significantly reduced dark current and higher photocurrent than a conventional metal–semiconductor–metal (MSM). Specifically, the 1 nm HfO2 MISIM device demonstrated a photocurrent of 2.3 μA and a dark current of 6.61 pA at 20 V, whereas the MSM device exhibited a photocurrent of 1.1 μA and a dark current of 73.3 pA. Furthermore, the photodetector performance was comprehensively evaluated in terms of responsivity, response speed, and high-temperature operation. These results suggest that the proposed ultra-thin HfO2 interlayer is an effective strategy for enhancing the performance of α-Ga2O3-based UVC photodetectors by simultaneously suppressing dark currents and increasing photocurrents and ultimately demonstrate its potential for stable operation under extreme environmental conditions. Full article
(This article belongs to the Special Issue Photodetectors and Their Applications)
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16 pages, 3258 KB  
Article
Breaking the Efficiency–Quality Tradeoff via Temperature–Velocity Co-Optimization: Multiscale Calculations and Experimental Study of Epitaxial Growth of Iridium on MgO(100)
by Yang Wang, Junhao Chen, Shilin Yang and Jiaqi Zhu
Crystals 2025, 15(6), 580; https://doi.org/10.3390/cryst15060580 - 19 Jun 2025
Viewed by 813
Abstract
The precise control of thermal–kinetic parameters governs epitaxial perfection in functional oxide heterostructures. Herein, using Iridium/MgO(100) as a model system, the traditional “low-speed/high-temperature” paradigm is revolutionized through the combination of ab initio calculations, multiscale simulations, and subsequent deposition experiments. First-principles modeling reveals the [...] Read more.
The precise control of thermal–kinetic parameters governs epitaxial perfection in functional oxide heterostructures. Herein, using Iridium/MgO(100) as a model system, the traditional “low-speed/high-temperature” paradigm is revolutionized through the combination of ab initio calculations, multiscale simulations, and subsequent deposition experiments. First-principles modeling reveals the mechanisms of Volmer–Weber (VW, island growth mode) nucleation at low coverage and Stranski–Krastanov (SK, layer-plus-island growth) transitions driven by interface metallization, stress release, and energy reduction, which facilitates coherent monolayer formation by lowering the energy barrier by ~34%. Molecular dynamics simulations demonstrate that the strategic co-optimization of substrate temperature (Tsub) and deposition rate (Vdep) induces an abrupt cliff-like drop in mosaic spread. Experimental validations confirm that this T-V synergy achieves unprecedented interfacial coherence, whereby AFM roughness reaches 0.34 nm (RMS) and the XRC-FWHM of 0.13° approaches single-crystal benchmarks. Notably, our novel “accelerated heteroepitaxy” protocol reduces growth time without compromising quality, addressing the efficiency–quality paradox in industrial-scale diamond substrate fabrication. These findings establish universal thermal–kinetic design principles applicable to refractory metal/oxide heterostructures for next-generation quantum sensors and high-power electronic devices. Full article
(This article belongs to the Special Issue Crystallization Process and Simulation Calculation, Third Edition)
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25 pages, 16286 KB  
Article
Mechanism and Structural Defects of Zinc Film Deposited on a Copper Substrate: A Study via Molecular Dynamics Simulations
by Xin He, Xiangge Qin and Lan Zhan
Coatings 2025, 15(2), 174; https://doi.org/10.3390/coatings15020174 - 4 Feb 2025
Cited by 1 | Viewed by 1499 | Correction
Abstract
Epitaxial growth can be used to guide the controllable growth of one metal on the surface of another substrate by matching the interface lattice, thus improving the dendrite tendency of metal growth. The atomic arrangement of the Cu (111) crystal plane of the [...] Read more.
Epitaxial growth can be used to guide the controllable growth of one metal on the surface of another substrate by matching the interface lattice, thus improving the dendrite tendency of metal growth. The atomic arrangement of the Cu (111) crystal plane of the FCC structure is similar to that of the Zn (0002) crystal plane of the HCP structure, which is theoretically expected to promote the heterogeneous epitaxial nucleation growth of metal zinc under low strain. In this paper, the molecular dynamics method is used to simulate the atomic process of zinc film growth on the Cu (111) surface. It is found that the behavior of zinc-adsorbed atoms on the substrate surface conforms to the epitaxial growth mode. The close-packed structure grown along the (0002) direction of the layered clusters is tiled on the Cu (111) surface, forming a highly ordered low-lattice-mismatch interface. When a large area of layered zinc clusters cover the substrate, the growth mode will change from heteroepitaxial growth to homoepitaxial growth of Zn atoms on the zinc film, forming a lamellar distribution composed of FCC and HCP structure grains. Polycrystalline zinc film with a planar structure with a (0002) surface preferred a crystal plane. The increase in incident energy is helpful in improving the quality of zinc films, while the deposition rate, corresponding to the deposition temperature and electrolyte ion concentration, has no significant effect on the surface morphology and crystal structure of single metal films. In summary, the atomic arrangement of the Cu (111) surface has a strong guiding effect on the atomic ordered arrangement in the zinc film crystal, which is suitable for the epitaxial deposition of the substrate to induce the ordered growth of the Zn (0002) crystal plane. Full article
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17 pages, 10712 KB  
Article
Optical Properties of Yttrium Ferrite Films Prepared by Pulse Laser Deposition
by Dinara Sobola, Saleh H. Fawaeer, Pavla Kočková, Richard Schubert, Rashid Dallaev and Tomáš Trčka
Coatings 2024, 14(11), 1464; https://doi.org/10.3390/coatings14111464 - 18 Nov 2024
Viewed by 1775
Abstract
This study investigates the optical properties of yttrium ferrite thin films fabricated via pulse laser deposition. Yttrium orthoferrite, a ferrimagnetic material known for its potential applications in spintronics and photonics, was deposited on single-crystal substrates under controlled conditions to analyze its optical characteristics. [...] Read more.
This study investigates the optical properties of yttrium ferrite thin films fabricated via pulse laser deposition. Yttrium orthoferrite, a ferrimagnetic material known for its potential applications in spintronics and photonics, was deposited on single-crystal substrates under controlled conditions to analyze its optical characteristics. The influence of deposition time on the film quality and optical properties was examined. Atomic force microscopy in contact mode revealed surface roughness variations up to 35 nm, indicating the films’ ability to cover substrate defects. Reflectance measurements determined the optical band gap, which decreased from 3.17 eV for thinner films (44 nm) to 2.91 eV for thicker films (93 nm). Forbidden electronic transitions were also observed, attributed to heteroepitaxial growth and phonon interactions. These results demonstrate the effect of film thickness on morphology and optical properties, making YFeO3 films promising for a range of optoelectronic applications. Full article
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13 pages, 14616 KB  
Article
Impedance Spectroscopy Study of Charge Transfer in the Bulk and Across the Interface in Networked SnO2/Ga2O3 Core–Shell Nanobelts in Ambient Air
by Maciej Krawczyk, Ryszard Korbutowicz and Patrycja Suchorska-Woźniak
Sensors 2024, 24(19), 6173; https://doi.org/10.3390/s24196173 - 24 Sep 2024
Viewed by 1504
Abstract
Metal oxide core–shell fibrous nanostructures are promising gas-sensitive materials for the detection of a wide variety of both reducing and oxidizing gases. In these structures, two dissimilar materials with different work functions are brought into contact to form a coaxial heterojunction. The influence [...] Read more.
Metal oxide core–shell fibrous nanostructures are promising gas-sensitive materials for the detection of a wide variety of both reducing and oxidizing gases. In these structures, two dissimilar materials with different work functions are brought into contact to form a coaxial heterojunction. The influence of the shell material on the transportation of the electric charge carriers along these structures is still not very well understood. This is due to homo-, hetero- and metal/semiconductor junctions, which make it difficult to investigate the electric charge transfer using direct current methods. However, in order to improve the gas-sensing properties of these complex structures, it is necessary to first establish a good understanding of the electric charge transfer in ambient air. In this article, we present an impedance spectroscopy study of networked SnO2/Ga2O3 core–shell nanobelts in ambient air. Tin dioxide nanobelts were grown directly on interdigitated gold electrodes, using the thermal sublimation method, via the vapor–liquid–solid (VLS) mechanism. Two forms of a gallium oxide shell of varying thickness were prepared via halide vapor-phase epitaxy (HVPE), and the impedance spectra were measured at 189–768 °C. The bulk resistance of the core–shell nanobelts was found to be reduced due to the formation of an electron accumulation layer in the SnO2 core. At temperatures above 530 °C, the thermal reduction of SnO2 and the associated decrease in its work function caused electrons to flow from the accumulation layer into the Ga2O3 shell, which resulted in an increase in bulk resistance. The junction resistance of said core–shell nanostructures was comparable to that of SnO2 nanobelts, as both structures are likely connected through existing SnO2/SnO2 homojunctions comprising thin amorphous layers. Full article
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25 pages, 3593 KB  
Article
Simulations of Infrared Reflectivity and Transmission Phonon Spectra for Undoped and Doped GeC/Si (001)
by Devki N. Talwar and Jason T. Haraldsen
Nanomaterials 2024, 14(17), 1439; https://doi.org/10.3390/nano14171439 - 3 Sep 2024
Cited by 4 | Viewed by 2333
Abstract
Exploring the phonon characteristics of novel group-IV binary XC (X = Si, Ge, Sn) carbides and their polymorphs has recently gained considerable scientific/technological interest as promising alternatives to Si for high-temperature, high-power, optoelectronic, gas-sensing, and photovoltaic applications. Historically, the effects of phonons on [...] Read more.
Exploring the phonon characteristics of novel group-IV binary XC (X = Si, Ge, Sn) carbides and their polymorphs has recently gained considerable scientific/technological interest as promising alternatives to Si for high-temperature, high-power, optoelectronic, gas-sensing, and photovoltaic applications. Historically, the effects of phonons on materials were considered to be a hindrance. However, modern research has confirmed that the coupling of phonons in solids initiates excitations, causing several impacts on their thermal, dielectric, and electronic properties. These studies have motivated many scientists to design low-dimensional heterostructures and investigate their lattice dynamical properties. Proper simulation/characterization of phonons in XC materials and ultrathin epilayers has been challenging. Achieving the high crystalline quality of heteroepitaxial multilayer films on different substrates with flat surfaces, intra-wafer, and wafer-to-wafer uniformity is not only inspiring but crucial for their use as functional components to boost the performance of different nano-optoelectronic devices. Despite many efforts in growing strained zinc-blende (zb) GeC/Si (001) epifilms, no IR measurements exist to monitor the effects of surface roughness on spectral interference fringes. Here, we emphasize the importance of infrared reflectivity Rω  and transmission Tω spectroscopy at near normal θi = 0 and oblique θi ≠ 0 incidence (Berreman effect) for comprehending the phonon characteristics of both undoped and doped GeC/Si (001) epilayers. Methodical simulations of Rω and Tω revealing atypical fringe contrasts in ultrathin GeC/Si are linked to the conducting transition layer and/or surface roughness. This research provided strong perspectives that the Berreman effect can complement Raman scattering spectroscopy for allowing the identification of longitudinal optical ωLO phonons, transverse optical ωTO phonons, and LO-phonon–plasmon coupled ωLPP+  modes, respectively. Full article
(This article belongs to the Special Issue Carbon Nanostructures as Promising Future Materials: 2nd Edition)
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10 pages, 4579 KB  
Article
Synthesis of Samarium Nitride Thin Films on Magnesium Oxide (001) Substrates Using Molecular Beam Epitaxy
by Kevin D. Vallejo, Zachery E. Cresswell, Volodymyr Buturlim, Brian S. Newell, Krzysztof Gofryk and Brelon J. May
Crystals 2024, 14(9), 765; https://doi.org/10.3390/cryst14090765 - 28 Aug 2024
Cited by 5 | Viewed by 2265
Abstract
Rare-earth nitrides are an exciting family of materials with a wide variety of properties desirable for new physics and applications in spintronics and superconducting devices. Among them, samarium nitride is an interesting compound reported to have ferromagnetic behavior coupled with the potential existence [...] Read more.
Rare-earth nitrides are an exciting family of materials with a wide variety of properties desirable for new physics and applications in spintronics and superconducting devices. Among them, samarium nitride is an interesting compound reported to have ferromagnetic behavior coupled with the potential existence of p-wave superconductivity. Synthesis of high-quality thin films is essential in order to manifest these behaviors and understand the impact that vacancies, structural distortions, and doping can have on these properties. In this study, we report the synthesis of samarium nitride monocrystalline thin films on magnesium oxide (001) substrates with a chromium nitride capping layer using molecular beam epitaxy (MBE). We observed a high-quality monocrystalline SmN film with matching orientation to the substrate, then optimized the growth temperature. Despite the initial 2 nm of growth showing formation of a potential samarium oxide layer, the subsequent layers showed high-quality SmN, with semiconducting behavior revealed by an increase in resistivity with decreasing temperature. These promising results highlight the importance of studying diverse heteroepitaxial schemes and open the door for integration of rare-earth nitrides and transition metal nitrides for future spintronic devices. Full article
(This article belongs to the Special Issue Materials and Devices Grown via Molecular Beam Epitaxy)
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9 pages, 3530 KB  
Article
Investigation of the Dislocation Behavior of 6- and 8-Inch AlGaN/GaN HEMT Structures with a Thin AlGaN Buffer Layer Grown on Si Substrates
by Yujie Yan, Jun Huang, Lei Pan, Biao Meng, Qiangmin Wei and Bing Yang
Inorganics 2024, 12(8), 207; https://doi.org/10.3390/inorganics12080207 - 30 Jul 2024
Viewed by 2663
Abstract
Developing cost-effective methods to synthesize large-size GaN films remains a challenge owing to the high dislocation density during heteroepitaxy. Herein, AlGaN/GaN HEMTs were grown on 6- and 8-inch Si(111) substrates using metal–organic chemical vapor deposition, and their basic properties and dislocation evolution characteristics [...] Read more.
Developing cost-effective methods to synthesize large-size GaN films remains a challenge owing to the high dislocation density during heteroepitaxy. Herein, AlGaN/GaN HEMTs were grown on 6- and 8-inch Si(111) substrates using metal–organic chemical vapor deposition, and their basic properties and dislocation evolution characteristics were investigated thoroughly. With the insertion of a 100 nm thin AlGaN buffer layer, bow–warp analysis of the epitaxial wafers revealed excellent stress control for both the 6- and 8-inch wafers. HR-XRD and AFM analyses validated the high crystal quality and step-flow growth mode of GaN. Further, Hall measurements demonstrated the superior transport performance of AlGaN/GaN heterostructures. It is worth noting that dislocations tended to annihilate in the AlN nucleation layer, the thin AlGaN buffer layer, and the GaN buffer layer in the initial thickness range of 200–300 nm, which was indicated by ADF-STEM. To be specific, the heterointerfaces exhibited a significant effect on the annihilation of c-type (b = <0001>) dislocations, which led to the formation of dislocation loops. The thin inserted layers within the AlGaN buffer layer played a key role in promoting the annihilation of c-type dislocations, while they exerted less influence on a-type (b = 1/3<112¯0>) and (a+c)-type (b = 1/3<112¯3>) dislocations. Within an initial thickness of 200–300 nm in the GaN buffer layer, a-type and (a+c)-type dislocations underwent strong interactions, leading to considerable dislocation annihilation. In addition, the EELS results suggested that the V-shaped pits in the AlN nucleation layer were filled with the AlGaN thin layer with a low Al content. Full article
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14 pages, 31777 KB  
Article
Heteroepitaxial Growth of InBi(001)
by Thomas J. Rehaag and Gavin R. Bell
Molecules 2024, 29(12), 2825; https://doi.org/10.3390/molecules29122825 - 13 Jun 2024
Cited by 3 | Viewed by 1658
Abstract
InBi is a topological nodal line semimetal with strong spin–orbit coupling. It is epitaxially compatible with III–V semiconductors and, hence, an attractive material for topological spintronics. However, growth by molecular beam epitaxy (MBE) is challenging owing to the low melting point of InBi [...] Read more.
InBi is a topological nodal line semimetal with strong spin–orbit coupling. It is epitaxially compatible with III–V semiconductors and, hence, an attractive material for topological spintronics. However, growth by molecular beam epitaxy (MBE) is challenging owing to the low melting point of InBi and the tendency to form droplets. We investigate approaches for epitaxial growth of InBi films on InSb(001) substrates using MBE and periodic supply epitaxy (PSE). It was not possible to achieve planar, stoichiometric InBi heteroepitaxy using MBE growth over the parameter space explored. However, pseudomorphic growth of ultra-thin InBi(001) layers could be achieved by PSE on InSb(001). A remarkable change to the in-plane epitaxial orientation is observed. Full article
(This article belongs to the Special Issue Recent Advances in Epitaxial Growth: Materials and Methods)
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11 pages, 4830 KB  
Article
Study of AlN Epitaxial Growth on Si (111) Substrate Using Pulsed Metal–Organic Chemical Vapour Deposition
by Muhammad Iznul Hisyam, Ahmad Shuhaimi, Rizuan Norhaniza, Marwan Mansor, Adam Williams and Mohd Rofei Mat Hussin
Crystals 2024, 14(4), 371; https://doi.org/10.3390/cryst14040371 - 16 Apr 2024
Cited by 5 | Viewed by 3308
Abstract
A dense and smooth aluminium nitride thin film grown on a silicon (111) substrates using pulsed metal–organic chemical vapor deposition is presented. The influence of the pulsed cycle numbers on the surface morphology and crystalline quality of the aluminium nitride films are discussed [...] Read more.
A dense and smooth aluminium nitride thin film grown on a silicon (111) substrates using pulsed metal–organic chemical vapor deposition is presented. The influence of the pulsed cycle numbers on the surface morphology and crystalline quality of the aluminium nitride films are discussed in detail. It was found that 70 cycle numbers produced the most optimized aluminium nitride films. Field emission scanning electron microscopy and atomic force microscopy images show a dense and smooth morphology with a root-mean-square-roughness of 2.13 nm. The narrowest FWHM of the X-ray rocking curve for the AlN 0002 and 10–12 reflections are 2756 arcsec and 3450 arcsec, respectively. Furthermore, reciprocal space mapping reveals an in-plane tensile strain of 0.28%, which was induced by the heteroepitaxial growth on the silicon (111) substrate. This work provides an alternative approach to grow aluminium nitride for possible application in optoelectronic and power devices. Full article
(This article belongs to the Special Issue Epitaxial Growth and Application of Metallic Oxide Thin Films)
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