Search Results (214)

This paper presents a novel approach employing localized annealing through Joule heating to enhance the performance of Thin-Film Piezoelectric-on-Silicon (TPoS) MEMS resonators that are crucial for applications in sensing, energy harvesting, frequency filtering, and timing control. Despite recent advancements, piezoelectric MEMS resonators still suffer from anchor-related energy losses and limited quality factors (Qs), posing significant challenges for high-performance applications. This study investigates interface modification to boost the quality factor (Q) and reduce the motional resistance, thus improving the electromechanical coupling coefficient and reducing insertion loss. To balance the trade-off between device miniaturization and performance, this work uniquely applies DC current-induced localized annealing to TPoS MEMS resonators, facilitating metal diffusion at the interface. This process results in the formation of platinum silicide, modifying the resonator’s stiffness and density, consequently enhancing the acoustic velocity and mitigating the side-supporting anchor-related energy dissipations. Experimental results demonstrate a Q-factor enhancement of over 300% (from 916 to 3632) and a reduction in insertion loss by more than 14 dB, underscoring the efficacy of this method for reducing anchor-related dissipations due to the highest annealing temperature at the anchors. The findings not only confirm the feasibility of Joule heating for interface modifications in MEMS resonators but also set a foundation for advancements of this post-fabrication thermal treatment technology. Full article

This report is on Co and Ti substituted M-type barium and strontium hexagonal ferrites that are reported to be single phase multiferroics due to a transition from Neel type ferrimagnetic order to a spiral spin structure that is accompanied by a ferroelectric polarization in an applied magnetic field. The focus here is the nature of magnetoelectric (ME) interactions in the bilayers of ferroelectric PZT and Co and Ti substituted BaM and SrM. The ME coupling in the ferrite-PZT bilayers arise due to the transfer of magnetostriction-induced mechanical deformation in a magnetic field in the ferrite resulting in an induced electric field in PZT. Polycrystalline Co and Ti doped ferrites, Ba (CoTi)_x Fe_12−2xO_19, (BCTx), and Sr (CoTi)_x Fe_12−2xO₁₉ (SCTx) (x = 0–4) were found to be free of impurity phases for all x-values except for SCTx, which had a small amount of α-Fe₂O₃ in the X-ray diffraction patterns for x ≤ 2.0. The magnetostriction for the ferrites increased with applied filed H to a maximum value of around 2 to 6 ppm for H~5 kOe. BCTx/SCTx samples showed ferromagnetic resonance (FMR) for x = 1.5–2.0, and the estimated anisotropy field was on the order of 5 kOe. The magnetization increased with the amount of Co and Ti doping, and it decreased rapidly with x for x > 1.0. Measurements of ME coupling strengths were conducted on the bilayers of BCTx/SCTx platelets bonded to PZT. The bilayer was subjected to an AC and DC magnetic field H, and the magnetoelectric voltage coefficient (MEVC) was measured as a function of H and frequency of the AC field. For BCTx-PZT, the maximum value of MEVC at low frequency was ~5 mV/cm Oe, and a 40-fold increase at electromechanical resonance (EMR). SCTx–PZT composites also showed a similar behavior with the highest MEVC value of ~14 mV/cm Oe at low frequencies and ~200 mV/cm Oe at EMR. All the bilayers showed ME coupling for zero magnetic bias due to the magnetocrystalline anisotropy field in the ferrite that provided a built-in bias field. Full article

While extensive research has addressed electromechanical systems interacting with power electronic converters, most studies lack a unified modeling framework that simultaneously captures converter switching behavior, nonlinear dynamics, and linearized control-oriented representations. In particular, the dynamic interaction between two-level full-bridge converters and angular-motion electromechanical switching devices (EMDs) is often simplified or abstracted, thereby limiting control system design and frequency-domain analysis. This work presents a comprehensive dynamic modeling methodology for an angular-motion EMD driven by a full-bridge dc-dc converter. The modeling framework includes (i) a detailed nonlinear switching model, (ii) an averaged nonlinear model suitable for control design, and (iii) a small-signal linearized model for deriving transfer functions and evaluating system stability. The proposed models are rigorously validated through time-domain simulations and Bode frequency analysis, confirming both theoretical equilibrium points and dynamic characteristics such as resonant frequencies and phase margins. The results demonstrate strong consistency across the modeling hierarchy and reveal critical features—such as ripple-induced resonance and low-frequency coupling—that are essential for robust controller design. This framework established a foundational tool for advancing the control and optimization of electromechanical switching systems in high-performance applications. Full article

This paper presents a simulation-based investigation of passive frequency tunability in frequency-selective surfaces (FSSs) enabled by Moiré pattern interference. By overlapping two identical hexagonal FSS layers and introducing rotational misalignment between them, we demonstrate that the resulting Moiré patterns induce significant shifts in the resonance frequency without any external bias or active components. Using full-wave simulations in HFSS, we show that rotating the second layer from 0° to 30° can shift the resonant frequency from 4.4 GHz down to 1.2 GHz. This tunable behavior emerges solely from geometrical manipulation, offering a low-complexity alternative to active tuning methods that rely on varactors or micro-electromechanical systems (MEMSs). We discuss the theoretical basis for this tuning mechanism based on effective periodicity modulation via rotational interference and highlight potential applications in passive reconfigurable filters and refractive index sensors. The proposed approach provides a promising route for implementing tunable electromagnetic structures without compromising simplicity, power efficiency, or integration compatibility. Full article

In the context of autonomous environmental monitoring, this study investigates a surface acoustic wave (SAW) sensor designed for selective carbon dioxide (CO₂) detection. The sensor is based on a LiTaO₃ piezoelectric substrate with copper interdigital transducers and a polyetherimide (PEI) layer, chosen for its high electromechanical coupling and strong CO₂ affinity. Finite element simulations were conducted to analyze the resonance frequency response under varying gas concentrations, film thicknesses, pressures, and temperatures. Results demonstrate a linear and sensitive frequency shift, with detection capability starting from 10 ppm. The sensor’s autonomy is ensured by a piezoelectric energy harvester composed of a cantilever beam structure with an attached seismic mass, where mechanical vibrations induce stress in a piezoelectric layer (PZT-5H or PVDF), generating electrical energy via the direct piezoelectric effect. Analytical and numerical analyses were performed to evaluate the influence of excitation frequency, material properties, and optimal load on power output. This integrated configuration offers a compact and energy-independent solution for real-time CO₂ monitoring in low-power or inaccessible environments. Full article

Electric helicopters represent a pivotal component in the advancement of urban air mobility (UAM), with considerable potential for future development. The electric propulsion system (EPS) is the core component of these systems. However, the inherent complexities of electromechanical coupling can induce excessive torsional vibrations, potentially compromising operational comfort and even threatening flight safety. This study proposes an active torsional vibration suppression method for EPS that explicitly incorporates electromechanical coupling characteristics. A nonlinear dynamic model has been developed, accounting for time-varying meshing stiffness, meshing errors, and multi-harmonic motor excitation. The motor and transmission system models are coupled using torsional angular displacement. A harmonic current command generation algorithm is then formulated, based on the analysis of harmonic torque-to-current transmission characteristics. To achieve dynamic tracking and the real-time compensation of high-order harmonic currents under non-steady-state conditions, a high-order resonant controller with frequency-domain decoupling characteristics was designed. The efficacy of the proposed harmonic current modulation is verified through simulations, showing an effective reduction of torsional vibrations in the EPS under both steady-state and non-steady-state conditions. It decreases the peak dynamic meshing force by 4.17% and the sixth harmonic amplitude by 88.15%, while mitigating overshoot and accelerating vibration attenuation during speed regulation. The proposed harmonic current modulation method provides a practical solution for mitigating torsional vibrations in electric propulsion systems, enhancing the comfort, reliability, and safety of electric helicopters. Full article

This paper focuses on the mathematical and numerical modeling of a non-classical macro fiber composite (MFC) piezoelectric transducer, MFC-P2, integrated with an aluminum cantilever beam for energy harvesting applications. It seeks to harness the transverse vibration energy in the environment to power small electronic devices, such as wireless sensors, where conventional power sources are inconvenient. The P2-type macro fiber composites (MFC-P2) are specifically designed for transverse energy harvesting applications. They offer high electric source capacitance and improved electric charge generation due to the strain developed perpendicularly to the voltage produced. The system is modeled analytically using Euler–Bernoulli beam theory and piezoelectric constitutive equations, capturing the electromechanical coupling in the d31 mode. Numerical simulations are conducted using COMSOL Multiphysics 6.29 to reduce the complexity of the mathematical model and analyze the effects of material properties, geometric configurations, and excitation conditions. The theoretical model is based on the transverse vibrations of a cantilevered beam using Euler–Bernoulli theory. The natural frequencies and mode shapes for the first four are determined. Depending on these, the resonance frequency, voltage, and power outputs are evaluated across a 12 kΩ resistive load. The results demonstrate that the energy harvester effectively operates near its fundamental resonant frequency of 10.78 Hz, achieving the highest output voltage of approximately 0.1952 V and a maximum power output of 0.0031 mW. The generated power is sufficient to drive ultra-low-power devices, validating the viability of MFC-based cantilever structures for autonomous energy harvesting systems. The application of piezoelectric phenomena and obtaining electrical energy from mechanical vibrations can be powerful solutions in such systems. The application of piezoelectric phenomena to convert mechanical vibrations into electrical energy presents a promising solution for self-powered mechatronic systems, enabling energy autonomy in embedded sensors, as well as being used for structural health monitoring applications. Full article

Industrial motors generate vibration energy that can be converted into electrical energy using piezoelectric vibration energy harvesters (pVEHs). These energy harvesters can power devices or function as self-powered sensors. However, optimal electromechanical designs of pVEHs are required to improve their output performance under different vibration frequency and amplitude conditions. To address this challenge, we performed the electromechanical modeling of a multilayer pVEH that harvests vibration energy from induction electric motors at frequencies close to 30 Hz. In addition, a parametric analysis of the geometry of the multilayer piezoelectric device was conducted to optimize its deflection and output voltage, considering the substrate length, piezoelectric patch position, and dimensions of the central hole. Our analytical model predicted the deflection and first bending resonant frequency of the piezoelectric device, with good agreement with predictions from finite element method (FEM) models. The proposed piezoelectric device achieved an output voltage of 143.2 V and an output power of 3.2 mW with an optimal resistance of 6309.5 kΩ. Also, the principal stresses of the pVEH were assessed using linear trend analysis, finding a safe operating range up to an acceleration of 0.7 g. The electromechanical design of the pVEH allowed for effective synchronization with the vibration frequency of an induction electric motor. This energy harvester has a potential application in industrial electric motors to transform their vibration energy into electrical energy to power sensors. Full article

This study proposes a membrane-type metamaterial with digitally controlled piezoelectric actuation for low-frequency sound absorption applications. The hybrid structure integrates an aluminum membrane functionally bonded with programmable piezoelectric patches (PZTs) and a sealed air cavity. Two innovative control strategies—Resistance Enhancement and Resonance Enhancement—dynamically adjust circuit impedance to maximize electromechanical energy conversion efficiency, thereby optimizing absorption at targeted frequencies. These strategies are implemented via a real-time digital feedback system. A coupled piezoelectric-structural-acoustic model is established to characterize the system’s transfer function, with validation through both finite element simulations and impedance tube experiments. Numerical and experimental results demonstrate nearly complete absorption around the resonant frequency, and the bandwidth can be further broadened through multi-resonance superposition. Theoretical analysis confirms that the active control strategies simultaneously modulate the acoustic impedance components (resistance and reactance), thereby optimizing electromechanical energy conversion efficiency. This work establishes a novel active-control methodology for low-frequency and high-efficiency noise mitigation. Full article

Although shear horizontal waves have advantages over longitudinal waves, including a higher resolution, less wave mode conversion, and much better reflection coefficients at void and crack interfaces in nondestructive detection, they require good contact surface flatness and efficient coupling agents. In this paper, we analyze and design the basic components of the dry-coupled ultrasonic shear wave probe through theoretical analyses and numerical simulations. The admittance characteristics, resonant frequency, and electromechanical coupling coefficients of the double-laminated vibrator under different size parameters in both 2D and 3D models are simulated, and the probe structures are optimized based on the simulation results and operational requirements. The simulation results of the wave field excited by the double-laminated vibrator show the effectiveness of the optimized probe models. Additionally, the dry coupling method of the probe is simulated to study the acoustic energy distribution under various dry-coupled structures. Finally, we compare the measured admittance with the simulated values, and they are in good agreement. Full article

With the development of piezoelectric-on-insulator (POI) substrates, X-cut LiNbO₃ thin-film resonators with interdigital transducers are widely investigated due to their adjustable resonant frequency (f_s) and effective electromechanical coupling coefficient ($K_{eff}^2$). This paper presents an in-depth study of simulations and measurements of laterally excited bulk acoustic wave resonators based on an X-cut LiNbO₃/SiO₂/Si substrate and a LiNbO₃ thin film to analyze the effects of electrode angle rotation ($\theta$) on the modes, f_s, and $K_{eff}^2$. The rotated $\theta$ leads to different electric field directions, causing mode changes, where the resonators without cavities are longitudinal leaky SAWs (LLSAWs, $\theta$ = 0$°$) and zero-order shear horizontal SAWs (SH₀-SAWs, $\theta$ = 90$°$) and the resonators with cavities are zero-order-symmetry (S₀) lateral vibrating resonators (LVRs, $\theta$ = 0$°$) and SH₀ plate wave resonators (PAW, $\theta$ = 90$°$). The resonators are fabricated based on a 400 nm X-cut LiNbO₃ thin-film substrate, and the measured results are consistent with those from the simulation. The fabricated LLSAW and SH₀-SAW without cavities show a $K_{eff}^2$ of 1.62% and 26.6% and a Bode-Q_max of 1309 and 228, respectively. Meanwhile, an S₀ LVR and an SH₀-PAW with cavities present a $K_{eff}^2$ of 4.82% and 27.66% and a Bode-Q_max of 3289 and 289, respectively. In addition, the TCF with a different rotated $\theta$ is also measured and analyzed. This paper systematically analyzes resonators on X-cut LiNbO₃ thin-film substrates and provides potential strategies for multi-band and multi-bandwidth filters. Full article

With the rapid development of fifth-generation (5G) mobile communication technology, the performance requirements for radio frequency front-end surface acoustic wave (SAW) devices have become increasingly stringent. Surface acoustic wave devices on piezoelectric thin film-based layered structures with high electromechanical coupling coefficients and low-frequency temperature compensation characteristics have emerged as a key solution. In this work, a SAW resonator based on an Al/41° Y-X LiNbO₃/SiO₂/poly-Si/Si multi-layered structure is proposed. FEM modeling of the proposed resonator and the influences of the thicknesses of the LiNbO₃, SiO₂, and Al electrodes on performances such as the parasitic noise, bandwidth, and electromechanical coupling coefficient are analyzed. Optimal parameters for the multi-layer piezoelectric structure are identified for offering large coupling up to 24%. Based on these findings, a single-port SAW resonator with an Al/41° Y-X LiNbO₃/SiO₂/poly-Si/Si substrate structure is fabricated. The experimental results align well with the simulation results; meanwhile, the SAW filter based on the proposed resonator demonstrates that a center frequency of 2.3 GHz, a 3-dB fractional bandwidth of 23.48%, and a minimum in-band insertion loss of only 0.343 dB are simultaneously achieved. This study provides guidance for the development of multi-layer film SAW resonator-based filters with high-performance. Full article

Non-uniform composite structures for transducers exhibit considerable potential in enhancing impedance matching and efficiency. Here, a functionally graded material composite spherical piezoelectric transducer (FGM-cSPT) is proposed, and a three-port electromechanical equivalent circuit model is established. The correctness of the theoretical model is verified using the finite element method and experiment. Based on the theoretical model, the effects of the non-uniform coefficient and the geometric dimension of FGM-cSPT on the electromechanical vibration characteristics (resonance frequency, anti-resonance frequency, and effective electromechanical coupling coefficient) of the transducer are analyzed. The results show that the non-uniform coefficient and geometric dimension can effectively regulate the vibration characteristics of the FGM-cSPT, which can be used to guide engineering design. Our methodology will offer possibilities for designing FGM-cSPTs and may promote applications in various fields, such as marine exploitation, structural health detection, and energy collection. Full article

This study introduces a novel 1-1-3-type piezoelectric array structure and investigates variations in the piezoelectric phase’s volume fraction. Its performance and consistency are compared with that of a conventional 1-3-type piezoelectric array of identical volume fraction. Finite element analysis was applied to study the effects of the positions of the elements in 1-1-3-type and 1-3-type piezoelectric arrays on the electrical conductivity curves, as well as the differences in vibration modes. To validate the theoretical models, experimental fabrication and testing were performed, and we developed a high-precision testing fixture designed to minimize experimental errors. The results demonstrate that the resonance frequency fluctuations in the 1-1-3-type piezoelectric array are maintained within 1%, and conductance fluctuations within 13.4%, significantly enhancing consistency compared to the 1-3-type array. Furthermore, the electromechanical coupling coefficient of the 1-1-3 array was also found to be superior to that of the 1-3-type, indicating improved performance parameters. Full article

PMUTs have been widely studied in recent years, particularly those based on the SOI (silicon-on-insulator) process, which have been partially commercialized and are extensively used in advanced applications such as ultrasonic ranging and spatial positioning. However, there has been little research on their high-temperature reliability, a critical area for their use in extreme environmental conditions. In this study, we investigate the high-temperature characteristics of air-coupled PMUTs based on SOI under various structural conditions, employing both finite element analysis (FEA) and experimental validation. We assess the performance of PMUTs at elevated temperatures by examining key parameters such as resonant frequency, the electromechanical coupling coefficient, mechanical amplitude, and warpage, all analyzed as functions of temperature. The experimental results show that temperature-induced drift becomes more significant as the back cavity size increases and the top silicon layer thickness decreases. These findings are consistent with the trends observed in the finite element analysis. Specifically, a PMUT with a back cavity diameter of 1000 $\mathsf{\mu }$m and a top silicon thickness of 4 $\mathsf{\mu }$m exhibits a temperature drift rate of up to 47.3% when the operating temperature rises from room temperature to 200 °C. Furthermore, at elevated temperatures, the maximum electromechanical coupling coefficient improves by 68.6%, and the mechanical amplitude increases by 66.1%. Heating experiments using a 3D profiler reveal that warpage increases from 0.3 $\mathsf{\mu }$m to 2.15 $\mathsf{\mu }$m as the temperature reaches 150 °C. These findings offer important theoretical insights into the temperature-induced drift behavior of PMUTs under high-temperature conditions. This study provides a comprehensive understanding of the performance variations of PMUTs, including changes in electromechanical coupling, mechanical amplitude, and structural warpage, which are critical for their reliable operation in extreme environments. The results presented here can serve as a foundation for the design and optimization of PMUTs in applications that require high-temperature stability, ensuring their enhanced reliability and performance in such demanding conditions. Full article