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Keywords = complementary metal oxide semiconductor—CMOS—temperature sensor

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17 pages, 68021 KiB  
Article
A Low-Power Differential Temperature Sensor with Chopped Cascode Transistors and Switched-Capacitor Integration
by Junyi Yang, Thomas Gourousis, Mengting Yan, Ruyi Ding, Ankit Mittal, Milin Zhang, Francesco Restuccia, Aatmesh Shrivastava, Yunsi Fei and Marvin Onabajo
Electronics 2025, 14(12), 2381; https://doi.org/10.3390/electronics14122381 - 11 Jun 2025
Viewed by 470
Abstract
Embedded differential temperature sensors can be utilized to monitor the power consumption of circuits, taking advantage of the inherent on-chip electrothermal coupling. Potential applications range from hardware security to linearity, gain/bandwidth calibration, defect-oriented testing, and compensation for circuit aging effects. This paper introduces [...] Read more.
Embedded differential temperature sensors can be utilized to monitor the power consumption of circuits, taking advantage of the inherent on-chip electrothermal coupling. Potential applications range from hardware security to linearity, gain/bandwidth calibration, defect-oriented testing, and compensation for circuit aging effects. This paper introduces the use of on-chip differential temperature sensors as part of a wireless Internet of Things system. A new low-power differential temperature sensor circuit with chopped cascode transistors and switched-capacitor integration is described. This design approach leverages chopper stabilization in combination with a switched-capacitor integrator that acts as a low-pass filter such that the circuit provides offset and low-frequency noise mitigation. Simulation results of the proposed differential temperature sensor in a 65 nm complementary metal-oxide-semiconductor (CMOS) process show a sensitivity of 33.18V/°C within a linear range of ±36.5m°C and an integrated output noise of 0.862mVrms (from 1 to 441.7 Hz) with an overall power consumption of 0.187mW. Considering a figure of merit that involves sensitivity, linear range, noise, and power, the new temperature sensor topology demonstrates a significant improvement compared to state-of-the-art differential temperature sensors for on-chip monitoring of power dissipation. Full article
(This article belongs to the Special Issue Advances in RF, Analog, and Mixed Signal Circuits)
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20 pages, 8428 KiB  
Article
The Role of Pd-Pt Bimetallic Catalysts in Ethylene Detection by CMOS-MEMS Gas Sensor Dubbed GMOS
by Hanin Ashkar, Sara Stolyarova, Tanya Blank and Yael Nemirovsky
Micromachines 2025, 16(6), 672; https://doi.org/10.3390/mi16060672 - 31 May 2025
Cited by 1 | Viewed by 1775
Abstract
The importance and challenges of ethylene detection based on combustion-type low-cost commercial sensors for agricultural and industrial applications are well-established. This work summarizes the significant progress in ethylene detection based on an innovative Gas Metal Oxide Semiconductor (GMOS) sensor and a new catalytic [...] Read more.
The importance and challenges of ethylene detection based on combustion-type low-cost commercial sensors for agricultural and industrial applications are well-established. This work summarizes the significant progress in ethylene detection based on an innovative Gas Metal Oxide Semiconductor (GMOS) sensor and a new catalytic composition of metallic nanoparticles. The paper presents a study on ethylene and ethanol sensing using a miniature catalytic sensor fabricated by Complementary Metal Oxide Semiconductor–Silicon-on-Insulator–Micro-Electro-Mechanical System (CMOS-SOI-MEMS) technology. The GMOS performance with bimetallic palladium–platinum (Pd-Pt) and monometallic palladium (Pd) and platinum (Pt) catalysts is compared. The synergetic effect of the Pd-Pt catalyst is observed, which is expressed in the shift of combustion reaction ignition to lower catalyst temperatures as well as increased sensitivity compared to monometallic components. The optimal catalysts and their temperature regimes for low and high ethylene concentrations are chosen, resulting in lower power consumption by the sensor. Full article
(This article belongs to the Collection Women in Micromachines)
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13 pages, 2958 KiB  
Article
ISFET Biosensor with Loop-Mediated Isothermal Amplification for Electronic Rapid Detection of Mycoplasma Pneumoniae
by Jie Zou, Jie Hu, Yan Shen, Limei Zhang, Weiyi Bai, Lei Wang, Jianlong Li, Lin Yan, Zhifeng Zhang, Hao Bai and Wenchuang Hu
Sensors 2025, 25(5), 1562; https://doi.org/10.3390/s25051562 - 4 Mar 2025
Viewed by 1292
Abstract
Mycoplasma pneumoniae (MP) is the main culprit of community-acquired pneumonia. Commonly used laboratory testing methods have many shortcomings. Serological diagnosis has low sensitivity, causing false negatives, while a quantitative real-time polymerase chain reaction (qPCR) requires large equipment and professional staff. To make up [...] Read more.
Mycoplasma pneumoniae (MP) is the main culprit of community-acquired pneumonia. Commonly used laboratory testing methods have many shortcomings. Serological diagnosis has low sensitivity, causing false negatives, while a quantitative real-time polymerase chain reaction (qPCR) requires large equipment and professional staff. To make up for these shortcomings, we proposed a label-free, low-cost, and small-sized ion-sensitive field-effect transistor (ISFET) array based on a low-buffered loop-mediated isothermal amplification (LAMP) assay. A complementary metal oxide semiconductor (CMOS)-based ISFET array with 512 × 512 sensors was used in this system, which responds specifically to H+ with a sensitivity of 365.7 mV/pH. For on-chip amplification, a low-buffered LAMP system designed for the conserved sequences of two genes, CARDS and gyrB, was applied. The rapid release of large amounts of H+ in the low-buffered LAMP solution led to a speedy increase in electrical signals captured by the ISFET array, eliminating the need for a sophisticated temperature cycling and optical system. The on-chip results showed that the device can accurately complete MP detection with a detection limit of about 103 copies/mL (approximately 1 copy per reaction). In the final clinical validation, the detection results of eight throat swab samples using the ISFET sensors were fully consistent with the clinical laboratory diagnostic outcomes, confirming the accuracy and reliability of the ISFET sensors for use in clinical settings. And the entire process from sample lysis to result interpretation takes about 60 min. This platform has potential to be used for the point-of-care testing (POCT) of pathogen infections, providing a basis for the timely adjustment of diagnosis and treatment plans. Full article
(This article belongs to the Section Biosensors)
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17 pages, 7797 KiB  
Article
A 32 μm2 MOS-Based Remote Sensing Temperature Sensor with 1.29 °C Inaccuracy for Thermal Management
by Ruohan Yang, Kwabena Oppong Banahene, Bryce Gadogbe, Randall Geiger and Degang Chen
Computers 2025, 14(1), 26; https://doi.org/10.3390/computers14010026 - 16 Jan 2025
Viewed by 1024
Abstract
This paper introduces a compact NMOS-based temperature sensor designed for precise thermal management in high-performance integrated circuits. Fabricated using the TSMC 180 nm process with a 1.8 V supply, this sensor employs a single diode-connected NMOS transistor, achieving a significant size reduction and [...] Read more.
This paper introduces a compact NMOS-based temperature sensor designed for precise thermal management in high-performance integrated circuits. Fabricated using the TSMC 180 nm process with a 1.8 V supply, this sensor employs a single diode-connected NMOS transistor, achieving a significant size reduction and improved voltage headroom. The sensor’s area is 32 µm2 per unit, enabling dense integration around thermal hotspots. A novel voltage calibration method ensures accurate temperature extraction. The measurement results demonstrate three-sigma errors within ±0.1 °C in the critical range of 75 °C to 95 °C and +1.29/−1.08 °C outside this range, confirming the sensor’s high accuracy and suitability for advanced thermal management applications. Full article
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17 pages, 3750 KiB  
Article
A Smart Active Phase-Change Micropump Based on CMOS-MEMS Technology
by Wenzui Jin, Yimin Guan, Qiushi Wang, Peng Huang, Qin Zhou, Kun Wang and Demeng Liu
Sensors 2023, 23(11), 5207; https://doi.org/10.3390/s23115207 - 30 May 2023
Cited by 2 | Viewed by 1843
Abstract
The rational integration of many microfluidic chips and micropumps remains challenging. Due to the integration of the control system and sensors in active micropumps, they have unique advantages over passive micropumps when integrated into microfluidic chips. An active phase-change micropump based on complementary [...] Read more.
The rational integration of many microfluidic chips and micropumps remains challenging. Due to the integration of the control system and sensors in active micropumps, they have unique advantages over passive micropumps when integrated into microfluidic chips. An active phase-change micropump based on complementary metal–oxide–semiconductor–microelectromechanical system (CMOS-MEMS) technology was fabricated and studied theoretically and experimentally. The micropump structure is simple and consists of a microchannel, a series of heater elements along the microchannel, an on-chip control system, and sensors. A simplified model was established to analyze the pumping effect of the traveling phase transition in the microchannel. The relationship between pumping conditions and flow rate was examined. Based on the experimental results, the maximum flow rate of the active phase-change micropump at room temperature is 22 µL/min, and long-term stable operation can be achieved by optimizing heating conditions. Full article
(This article belongs to the Section Sensing and Imaging)
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9 pages, 3403 KiB  
Communication
Optical Temperature Sensor Based on Polysilicon Waveguides
by Xinru Xu, Yuexin Yin, Chunlei Sun, Lan Li, Hongtao Lin, Bo Tang, Peng Zhang, Changming Chen and Daming Zhang
Sensors 2022, 22(23), 9357; https://doi.org/10.3390/s22239357 - 1 Dec 2022
Cited by 3 | Viewed by 2480
Abstract
Traditional temperature detection has limitations in terms of sensing accuracy and response time, while chip-level photoelectric sensors based on the thermo-optic effect can improve measurement sensitivity and reduce costs. This paper presents on-chip temperature sensors based on polysilicon (p-Si) waveguides. Dual-microring resonator (MRR) [...] Read more.
Traditional temperature detection has limitations in terms of sensing accuracy and response time, while chip-level photoelectric sensors based on the thermo-optic effect can improve measurement sensitivity and reduce costs. This paper presents on-chip temperature sensors based on polysilicon (p-Si) waveguides. Dual-microring resonator (MRR) and asymmetric Mach–Zehnder interferometer (AMZI) sensors are demonstrated. The experimental results show that the sensitivities of the sensors based on AMZI and MRR are 86.6 pm/K and 85.7 pm/K, respectively. The temperature sensors proposed in this paper are compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication technique. Benefitting from high sensitivity and a compact footprint, these sensors show great potential in the field of photonic-electronic applications. Full article
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7 pages, 1827 KiB  
Proceeding Paper
Air Temperature Measurement Using CMOS-SOI-MEMS Sensor Dubbed Digital TMOS
by Moshe Avraham, Harel Yadid, Tanya Blank and Yael Nemirovsky
Eng. Proc. 2022, 27(1), 64; https://doi.org/10.3390/ecsa-9-13224 - 1 Nov 2022
Cited by 2 | Viewed by 1518
Abstract
Air temperature is an important meteorological parameter and is used for numerous purposes. Air temperature is usually observed using a radiation shield with ventilation, to obtain proper measurements by providing shade from direct solar radiation and increasing the heat exchange between the sensor [...] Read more.
Air temperature is an important meteorological parameter and is used for numerous purposes. Air temperature is usually observed using a radiation shield with ventilation, to obtain proper measurements by providing shade from direct solar radiation and increasing the heat exchange between the sensor and the atmosphere. In rural areas, such auxiliary equipment is not available and it is still a challenge to obtain the air temperature accurately without aspiration. In this study, we describe a novel, qualified, complementary metal-oxide-semiconductor-Microelectromechanical systems (CMOS-MEMS) low-cost sensor, dubbed Digital Thermal-MOS (TMOS), for remote temperature sensing of air temperature. The novel key ideas of this study are (i) the use of the Digital TMOS, (ii) a narrow optical bandpass filter (4.26 um +/− 90 nm) corresponding to the CO2 carbon dioxide absorption band; (iii) simultaneously measuring the weather parameters. Full article
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60 pages, 21158 KiB  
Review
Application of Two-Dimensional Materials towards CMOS-Integrated Gas Sensors
by Lado Filipovic and Siegfried Selberherr
Nanomaterials 2022, 12(20), 3651; https://doi.org/10.3390/nano12203651 - 18 Oct 2022
Cited by 22 | Viewed by 6127
Abstract
During the last few decades, the microelectronics industry has actively been investigating the potential for the functional integration of semiconductor-based devices beyond digital logic and memory, which includes RF and analog circuits, biochips, and sensors, on the same chip. In the case of [...] Read more.
During the last few decades, the microelectronics industry has actively been investigating the potential for the functional integration of semiconductor-based devices beyond digital logic and memory, which includes RF and analog circuits, biochips, and sensors, on the same chip. In the case of gas sensor integration, it is necessary that future devices can be manufactured using a fabrication technology which is also compatible with the processes applied to digital logic transistors. This will likely involve adopting the mature complementary metal oxide semiconductor (CMOS) fabrication technique or a technique which is compatible with CMOS due to the inherent low costs, scalability, and potential for mass production that this technology provides. While chemiresistive semiconductor metal oxide (SMO) gas sensors have been the principal semiconductor-based gas sensor technology investigated in the past, resulting in their eventual commercialization, they need high-temperature operation to provide sufficient energies for the surface chemical reactions essential for the molecular detection of gases in the ambient. Therefore, the integration of a microheater in a MEMS structure is a requirement, which can be quite complex. This is, therefore, undesirable and room temperature, or at least near-room temperature, solutions are readily being investigated and sought after. Room-temperature SMO operation has been achieved using UV illumination, but this further complicates CMOS integration. Recent studies suggest that two-dimensional (2D) materials may offer a solution to this problem since they have a high likelihood for integration with sophisticated CMOS fabrication while also providing a high sensitivity towards a plethora of gases of interest, even at room temperature. This review discusses many types of promising 2D materials which show high potential for integration as channel materials for digital logic field effect transistors (FETs) as well as chemiresistive and FET-based sensing films, due to the presence of a sufficiently wide band gap. This excludes graphene from this review, while recent achievements in gas sensing with graphene oxide, reduced graphene oxide, transition metal dichalcogenides (TMDs), phosphorene, and MXenes are examined. Full article
(This article belongs to the Special Issue Abridging the CMOS Technology)
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17 pages, 10098 KiB  
Article
Thermoelectric Energy Micro Harvesters with Temperature Sensors Manufactured Utilizing the CMOS-MEMS Technique
by Yi-Xuan Shen, Yao-Chuan Tsai, Chi-Yuan Lee, Chyan-Chyi Wu and Ching-Liang Dai
Micromachines 2022, 13(8), 1258; https://doi.org/10.3390/mi13081258 - 5 Aug 2022
Cited by 9 | Viewed by 2202
Abstract
This study develops a TEMH (thermoelectric energy micro harvester) chip utilizing a commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process. The chip contains a TEMH and temperature sensors. The TEMH is established using a series of 54 thermocouples. The use of the [...] Read more.
This study develops a TEMH (thermoelectric energy micro harvester) chip utilizing a commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process. The chip contains a TEMH and temperature sensors. The TEMH is established using a series of 54 thermocouples. The use of the temperature sensors monitors the temperature of the thermocouples. One temperature sensor is set near the cold part of the thermocouples, and the other is set near the hot part of the thermocouples. The performance of the TEMH relies on the TD (temperature difference) at the CHP (cold and hot parts) of the thermocouples. The more the TD at the CHP of the thermocouples increases, the higher the output voltage and output power of the TEMH become. To obtain a higher TD, the cold part of the thermocouples is designed as a suspended structure and is combined with cooling sheets to increase heat dissipation. The cooling sheet is constructed of a stack of aluminum layers and is mounted above the cold part of the thermocouple. A finite element method software, ANSYS, is utilized to compute the temperature distribution of the TEMH. The TEMH requires a post-process to obtain the suspended thermocouple structure. The post-process utilizes an RIE (reactive ion etch) to etch the two sacrificial materials, which are silicon dioxide and silicon substrate. The results reveal that the structure of the thermocouples is completely suspended and does not show any injury. The measured results reveal that the output voltage of the TEMH is 32.5 mV when the TD between the CHP of the thermocouples is 4 K. The TEMH has a voltage factor of 8.93 mV/mm2K. When the TD between the CHP of the thermocouples is 4 K, the maximum output power of the TEMH is 4.67 nW. The TEMH has a power factor of 0.31 nW/mm2K2. Full article
(This article belongs to the Special Issue CMOS-MEMS Fabrication Technologies and Devices)
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16 pages, 3453 KiB  
Article
BPF-Based Thermal Sensor Circuit for On-Chip Testing of RF Circuits
by Josep Altet, Enrique Barajas, Diego Mateo, Alexandre Billong, Xavier Aragones, Xavier Perpiñà and Ferran Reverter
Sensors 2021, 21(3), 805; https://doi.org/10.3390/s21030805 - 26 Jan 2021
Cited by 3 | Viewed by 3289
Abstract
A new sensor topology meant to extract figures of merit of radio-frequency analog integrated circuits (RF-ICs) was experimentally validated. Implemented in a standard 0.35 μm complementary metal-oxide-semiconductor (CMOS) technology, it comprised two blocks: a single metal-oxide-semiconductor (MOS) transistor acting as temperature transducer, which [...] Read more.
A new sensor topology meant to extract figures of merit of radio-frequency analog integrated circuits (RF-ICs) was experimentally validated. Implemented in a standard 0.35 μm complementary metal-oxide-semiconductor (CMOS) technology, it comprised two blocks: a single metal-oxide-semiconductor (MOS) transistor acting as temperature transducer, which was placed near the circuit to monitor, and an active band-pass filter amplifier. For validation purposes, the temperature sensor was integrated with a tuned radio-frequency power amplifier (420 MHz) and MOS transistors acting as controllable dissipating devices. First, using the MOS dissipating devices, the performance and limitations of the different blocks that constitute the temperature sensor were characterized. Second, by using the heterodyne technique (applying two nearby tones) to the power amplifier (PA) and connecting the sensor output voltage to a low-cost AC voltmeter, the PA’s output power and its central frequency were monitored. As a result, this topology resulted in a low-cost approach, with high linearity and sensitivity, for RF-IC testing and variability monitoring. Full article
(This article belongs to the Section Physical Sensors)
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20 pages, 2771 KiB  
Article
Effect of Temperature on Channel Compensation in Optical Camera Communication
by Daniel Moreno, Julio Rufo, Victor Guerra, Jose Rabadan and Rafael Perez-Jimenez
Electronics 2021, 10(3), 262; https://doi.org/10.3390/electronics10030262 - 22 Jan 2021
Cited by 11 | Viewed by 3367
Abstract
General-purpose Complementary Metal Oxide Semiconductor (CMOS) sensors perform the image desegregation in three channels (red, green, and blue) as a result of a band-pass wavelength filtering carried out using Foveon or Bayer filters. This characteristic can be used in Optical Camera Communication (OCC) [...] Read more.
General-purpose Complementary Metal Oxide Semiconductor (CMOS) sensors perform the image desegregation in three channels (red, green, and blue) as a result of a band-pass wavelength filtering carried out using Foveon or Bayer filters. This characteristic can be used in Optical Camera Communication (OCC) systems for increasing the links’ data rate by introducing Wavelength Division Multiplexing (WDM) or Color Shift Keying (CSK) modulation schemes. However, these techniques need a compensation stage to mitigate the cross-talk between channels introduced by the filters. This compensation is performed by a Channel State Information (CSI) estimation and a zero-forcing compensation scheme. The impact of the temperature effects of light-emitting diode (LED) emissions on the zero-forcing compensation scheme’s performance has not been analyzed in depth. This work presents a comprehensive methodology and experimental characterization of this impact for Foveon and Bayer-based image sensors, assuming that the CSI is estimated under temperature conditions different from the LED’s stationary temperature regime. Besides, Signal-to-Interference-plus-Noise Ratio (SINR) and Bit Error Rate (BER) performance metrics are presented in order to estimate the repercussion in an OCC link. The results reveal that the Foveon sensor obtains more unsatisfactory performance than the Bayer-based sensor. On the other hand, the blue band is the most penalized by the thermal effect. Full article
(This article belongs to the Special Issue Visible Light Communications Technology and Its Applications)
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18 pages, 4974 KiB  
Article
The Incorporation of Amplified Metal-Enhanced Fluorescence in a CMOS-Based Biosensor Increased the Detection Sensitivity of a DNA Marker of the Pathogenic Fungus Colletotrichum gloeosporioides
by Dorin Harpaz, Noam Alkan and Evgeni Eltzov
Biosensors 2020, 10(12), 204; https://doi.org/10.3390/bios10120204 - 13 Dec 2020
Cited by 10 | Viewed by 3986
Abstract
Half of the global agricultural fresh produce is lost, mainly because of rots that are caused by various pathogenic fungi. In this study, a complementary metal-oxide-semiconductor (CMOS)-based biosensor was developed, which integrates specific DNA strands that allow the detection of enoyl-CoA-hydratase/isomerase, which is [...] Read more.
Half of the global agricultural fresh produce is lost, mainly because of rots that are caused by various pathogenic fungi. In this study, a complementary metal-oxide-semiconductor (CMOS)-based biosensor was developed, which integrates specific DNA strands that allow the detection of enoyl-CoA-hydratase/isomerase, which is a quiescent marker of Colletotrichum gloeosporioides fungi. The developed biosensor mechanism is based on the metal-enhanced fluorescence (MEF) phenomenon, which is amplified by depositing silver onto a glass surface. A surface DNA strand is then immobilized on the surface, and in the presence of the target mRNA within the sample, the reporter DNA strand that is linked to horseradish peroxidase (HRP) enzyme will also bind to it. The light signal that is later produced from the HRP enzyme and its substrate is enhanced and detected by the coupled CMOS sensor. Several parameters that affect the silver-deposition procedure were examined, including silver solution temperature and volume, heating mode, and the tank material. Moreover, the effect of blocking treatment (skim milk or bovine serum albumin (BSA)) on the silver-layer stability and nonspecific DNA absorption was tested. Most importantly, the effect of the deposition reaction duration on the silver-layer formation and the MEF amplification was also investigated. In the study findings a preferred silver-deposition reaction duration was identified as 5–8 min, which increased the deposition of silver on the glass surface up to 13-times, and also resulted in the amplification of the MEF phenomenon with a maximum light signal of 50 relative light units (RLU). It was found that MEF can be amplified by a customized silver-deposition procedure that results in increased detection sensitivity. The implementation of the improved conditions increased the biosensor sensitivity to 3.3 nM (4500 RLU) with a higher detected light signal as compared to the initial protocol (400 RLU). Moreover, the light signal was amplified 18.75-, 11.11-, 5.5-, 11.25-, and 3.75-times in the improved protocol for all the tested concentrations of the target DNA strand of 1000, 100, 10, 3.3, and 2 nM, respectively. The developed biosensor system may allow the detection of the pathogenic fungus in postharvest produce and determine its pathogenicity state. Full article
(This article belongs to the Special Issue Fluorescence Biosensors 2020)
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21 pages, 2735 KiB  
Review
Categorization and Characterization of Time Domain CMOS Temperature Sensors
by Sangjin Byun
Sensors 2020, 20(22), 6700; https://doi.org/10.3390/s20226700 - 23 Nov 2020
Cited by 6 | Viewed by 4000
Abstract
Time domain complementary metal-oxide-semiconductor (CMOS) temperature sensors estimate the temperature of a sensory device by measuring the frequency, period and/or delay time instead of the voltage and/or current signals that have been traditionally measured for a long time. In this paper, the time [...] Read more.
Time domain complementary metal-oxide-semiconductor (CMOS) temperature sensors estimate the temperature of a sensory device by measuring the frequency, period and/or delay time instead of the voltage and/or current signals that have been traditionally measured for a long time. In this paper, the time domain CMOS temperature sensors are categorized into twelve types by using the temperature estimation function which is newly defined as the ratio of two measured time domain signals. The categorized time domain CMOS temperature sensors, which have been published in literature, show different characteristics respectively in terms of temperature conversion rate, die area, process variation compensation, temperature error, power supply voltage sensitivity and so on. Based on their characteristics, we can choose the most appropriate one from twelve types to satisfy a given specification. Full article
(This article belongs to the Section Nanosensors)
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11 pages, 4370 KiB  
Brief Report
A High-Efficiency Driver Circuit for a Gas-Sensor Microheater Based on a Switch-Mode DC-to-DC Converter
by Tzu-Sen Yang and Jin-Chern Chiou
Sensors 2020, 20(18), 5367; https://doi.org/10.3390/s20185367 - 19 Sep 2020
Cited by 4 | Viewed by 3092
Abstract
Low power consumption is one of the critical factors for successful Internet of Things (IoT) applications. In such applications, gas sensors have become a main source of power consumption because energy conversion efficiency of the microheater is relative over a wide range of [...] Read more.
Low power consumption is one of the critical factors for successful Internet of Things (IoT) applications. In such applications, gas sensors have become a main source of power consumption because energy conversion efficiency of the microheater is relative over a wide range of operating temperatures. To improve the energy-conversion efficiency of gas-sensor microheaters, this paper proposes integrated switch-mode DC-to-DC power converter technology which we compare with traditional driving methods such as pulse-width modulation and the linear mode. The results indicate that energy conversion efficiency with this proposed method remains over 90% from 150 °C to 400 °C when using a 3.0, 4.2 and 5.0 V power supply. Energy-conversion efficiency increases by 1–74% compared with results obtained using the traditional driving methods, and the sensing film still detects alcohol and toluene at 200 °C and 280 °C, respectively, with high energy conversion efficiency. These results show that the proposed method is useful and should be further developed to drive gas-sensor microheaters, and then integrated into the circuits of the complementary metal-oxide-semiconductor micro electro mechanical systems (CMOS-MEMS). Full article
(This article belongs to the Special Issue Advanced Interface Circuits for Sensor Systems)
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19 pages, 4998 KiB  
Article
A Highly Accurate, Polynomial-Based Digital Temperature Compensation for Piezoresistive Pressure Sensor in 180 nm CMOS Technology
by Imran Ali, Muhammad Asif, Khuram Shehzad, Muhammad Riaz Ur Rehman, Dong Gyu Kim, Behnam Samadpoor Rikan, YoungGun Pu, Sang Sun Yoo and Kang-Yoon Lee
Sensors 2020, 20(18), 5256; https://doi.org/10.3390/s20185256 - 14 Sep 2020
Cited by 20 | Viewed by 6147
Abstract
Recently, piezoresistive-type (PRT) pressure sensors have been gaining attention in variety of applications due to their simplicity, low cost, miniature size and ruggedness. The electrical behavior of a pressure sensor is highly dependent on the temperature gradient which seriously degrades its reliability and [...] Read more.
Recently, piezoresistive-type (PRT) pressure sensors have been gaining attention in variety of applications due to their simplicity, low cost, miniature size and ruggedness. The electrical behavior of a pressure sensor is highly dependent on the temperature gradient which seriously degrades its reliability and reduces measurement accuracy. In this paper, polynomial-based adaptive digital temperature compensation is presented for automotive piezoresistive pressure sensor applications. The non-linear temperature dependency of a pressure sensor is accurately compensated for by incorporating opposite characteristics of the pressure sensor as a function of temperature. The compensation polynomial is fully implemented in a digital system and a scaling technique is introduced to enhance its accuracy. The resource sharing technique is adopted for minimizing controller area and power consumption. The negative temperature coefficient (NTC) instead of proportional to absolute temperature (PTAT) or complementary to absolute temperature (CTAT) is used as the temperature-sensing element since it offers the best temperature characteristics for grade 0 ambient temperature operating range according to the automotive electronics council (AEC) test qualification ACE-Q100. The shared structure approach uses an existing analog signal conditioning path, composed of a programmable gain amplifier (PGA) and an analog-to-digital converter (ADC). For improving the accuracy over wide range of temperature, a high-resolution sigma-delta ADC is integrated. The measured temperature compensation accuracy is within ±0.068% with full scale when temperature varies from −40 °C to 150 °C according to ACE-Q100. It takes 37 µs to compute the temperature compensation with a clock frequency of 10 MHz. The proposed technique is integrated in an automotive pressure sensor signal conditioning chip using a 180 nm complementary metal–oxide–semiconductor (CMOS) process. Full article
(This article belongs to the Special Issue Integrated Circuits and Systems for Smart Sensory Applications)
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