- Article
Periodic TiO2 Nanostructures with Improved Aspect and Line/Space Ratio Realized by Colloidal Photolithography Technique
- Loïc Berthod,
- Olga Shavdina,
- Isabelle Verrier,
- Thomas Kämpfe,
- Olivier Dellea,
- Francis Vocanson,
- Maxime Bichotte,
- Damien Jamon and
- Yves Jourlin
This paper presents substantial improvements of the colloidal photolithography technique (also called microsphere lithography) with the goal of better controlling the geometry of the fabricated nano-scale structures—in this case, hexagonally arranged...