Dear Colleagues,

Resonance, as a natural phenomenon, is a fundamental physical property of any object. Resonant devices, such as resonators, filters and sensors, are widely used in our daily life and have been for several years.

With advances in micro/nano-manufacturing technology, recent developments of novel MEMS/NEMS (micro/nano-electromechanical systems) resonant devices with high-quality characteristics have become dominant in timing, sensing and other emerging applications, which attract widespread research interest. Great progress has been made in the theory of resonance, including energy loss mechanisms for high-quality and nonlinear characteristics of resonators and the optical and quantum resonance effect in nano-resonators. A large number of novel MEMS/NEMS resonators has been fabricated to achieve high-frequency and high-quality characteristics, with a limit to their theoretical advantages. High-performance MEMS resonant filters and oscillators with ASIC circuits are superior to traditional devices. Plenteous new sensing materials and metamaterials have been integrated with resonant sensors for the ultra-sensitive detection of target molecules or biomarkers in bio-systems. Great breakthroughs in novel MEMS/NEMS resonant devices are imminent, including multidisciplinary efforts in artificial-intelligence network-computing resonant devices, opto-mechanical coupling nano-resonant devices, quantum spin coupled nano-resonant devices, and others, all of which have broad application prospects in future high-precision timing, sensing, AI and quantum computing systems.

In this Special Issue, we invite authors to submit original research articles and reviews on novel MEMS/NEMS resonant devices, such as resonant timing devices, sensing devices and computing devices, including but not limited to resonators, filters, oscillators, physical or bio-sensors, as well as frontier topics of resonant computing devices and optical and quantum nano-resonant devices. All aspects of resonator-related topics are welcome for this Special Issue, such as novel resonance phenomena, functional materials, micro/nano manufacturing and systems integration. Research areas may include but are not limited to the following:

• Novel transduction phenomena-based resonant devices;
• MEMS/NEMS resonators, filters, oscillators and micro/nano manufacturing;
• MEMS/NEMS resonant sensors for physical or bio application;
• Novel MEMS/NEMS computing resonant devices for AI application;
• Novel opto-MEMS and quantum nano-resonant devices;
• MEMS/NEMS resonator and ASIC circuits for system integration.

We look forward to receiving your contributions.

Dr. Quan Yuan
Dr. Xiaoguang Zhao
Dr. Yuyi Feng
Guest Editors

Manuscript Submission Information

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Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Nanomanufacturing is an international peer-reviewed open access quarterly journal published by MDPI.

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• MEMS/NEMS resonators
• MEMS/NEMS resonant device
• MEMS/NEMS resonant sensor
• MEMS/NEMS resonant computing
• optical-MEMS and quantum nano-resonators
• micro/nano fabrication