Piezoelectric Thin Film MEMS

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: closed (30 November 2020) | Viewed by 8959

Special Issue Editor


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Guest Editor
National Institute of Advanced Industrial Science and Technology, Tokyo, Japan
Interests: PZT; MEMS; sensor; actuator

Special Issue Information

Dear Colleagues,

Piezoelectric MEMS are succesufully commercialized as ink-jet heads and actuators. Moreover, they have attracted more and more attention for the application to optical scanners, ultrasonic sensors, speakers, and so on. In this Special Issue, Micromachines invites original research papers related to piezoelectric MEMS, including piezoelectric thin films, fabrication processes, evaluations, and devices.

Dr. Takeshi Kobayashi
Guest Editor

Manuscript Submission Information

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Keywords

  • PZT, AlN
  • Piezoelectric MEMS
  • Scanner
  • Ultrasonic
  • Speaker

Published Papers (3 papers)

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Research

13 pages, 5044 KiB  
Article
Q-Factor Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonator by Phononic Crystal-Reflector Composite Structure
by Jiacheng Liu, Temesgen Bailie Workie, Ting Wu, Zhaohui Wu, Keyuan Gong, Jingfu Bao and Ken-ya Hashimoto
Micromachines 2020, 11(12), 1130; https://doi.org/10.3390/mi11121130 - 20 Dec 2020
Cited by 16 | Viewed by 3503
Abstract
Thin-film piezoelectric-on-silicon (TPoS) microelectromechanical (MEMS) resonators are required to have high Q-factor to offer satisfactory results in their application areas, such as oscillator, filter, and sensors. This paper proposed a phononic crystal (PnC)-reflector composite structure to improve the Q factor of TPoS resonators. [...] Read more.
Thin-film piezoelectric-on-silicon (TPoS) microelectromechanical (MEMS) resonators are required to have high Q-factor to offer satisfactory results in their application areas, such as oscillator, filter, and sensors. This paper proposed a phononic crystal (PnC)-reflector composite structure to improve the Q factor of TPoS resonators. A one-dimensional phononic crystal is designed and deployed on the tether aiming to suppress the acoustic leakage loss as the acoustic wave with frequency in the range of the PnC is not able to propagate through it, and a reflector is fixed on the anchoring boundaries to reflect the acoustic wave that lefts from the effect of the PnC. Several 10 MHz TPoS resonators are fabricated and tested from which the Q-factor of the proposed 10 MHz TPoS resonator which has PnC-reflector composite structure on the tether and anchoring boundaries achieved offers a loaded Q-factor of 4682 which is about a threefold improvement compared to that of the conventional resonator which is about 1570. Full article
(This article belongs to the Special Issue Piezoelectric Thin Film MEMS)
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14 pages, 2873 KiB  
Article
Experimental Research on PVDF Sensing Surface Characteristic Curve Applied to Topography Perception
by Zhen Yu, Jing-Xian Yu and Chen-Yang Zhang
Micromachines 2020, 11(11), 976; https://doi.org/10.3390/mi11110976 - 30 Oct 2020
Cited by 1 | Viewed by 1661
Abstract
With the development of intelligent technology, it is of great significance to develop intelligent equipment with topography self-sensing function. The micro morphology perception technology applied to intelligent equipment is the key technology for development. In this paper, at first, topography perception theory based [...] Read more.
With the development of intelligent technology, it is of great significance to develop intelligent equipment with topography self-sensing function. The micro morphology perception technology applied to intelligent equipment is the key technology for development. In this paper, at first, topography perception theory based on the PVDF (Polyvinylidene Fluoride) technology is researched, then an experimental study is conducted to sense the characteristic points of the geometric curve of the preset topography surface used in the PVDF film, and then the Ferguson curve model is used to reconstruct the topography characteristic curve. The experimental results show that the reconstruction curve can truly reflect the features of the characteristic curve of the surface of the preset topography, and the feasibility of topography surface sensing technology by PVDF sensing technology is verified. The research provides technical support for the development of intelligent equipment with topography self-sensing function. Full article
(This article belongs to the Special Issue Piezoelectric Thin Film MEMS)
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16 pages, 5454 KiB  
Article
Bidirectional Linear Motion by Travelling Waves on Legged Piezoelectric Microfabricated Plates
by Víctor Ruiz-Díez, Jorge Hernando-García, Javier Toledo, Abdallah Ababneh, Helmut Seidel and José Luis Sánchez-Rojas
Micromachines 2020, 11(5), 517; https://doi.org/10.3390/mi11050517 - 20 May 2020
Cited by 5 | Viewed by 3220
Abstract
This paper reports the design, fabrication and performance of MEMS-based piezoelectric bidirectional conveyors featuring 3D printed legs, driven by linear travelling waves (TW). The structures consisted of an aluminium–nitride (AlN) piezoelectric film on top of millimetre-sized rectangular thin silicon bridges and two electrode [...] Read more.
This paper reports the design, fabrication and performance of MEMS-based piezoelectric bidirectional conveyors featuring 3D printed legs, driven by linear travelling waves (TW). The structures consisted of an aluminium–nitride (AlN) piezoelectric film on top of millimetre-sized rectangular thin silicon bridges and two electrode patches. The position and size of the patches were analytically optimised for TW generation in three frequency ranges: 19, 112 and 420 kHz, by the proper combination of two contiguous flexural modes. After fabrication, the generated TW were characterized by means of Laser–Doppler vibrometry to obtain the relevant tables of merit, such as the standing wave ratio and the average amplitude. The experimental results agreed with the simulation, showing the generation of a TW with an amplitude as high as 6 nm/V and a standing wave ratio as low as 1.46 for a device working at 19.3 kHz. The applicability of the fabricated linear actuator device as a conveyor was investigated. Its kinetic performance was studied with sliders of different mass, being able to carry a 35 mg silicon slider, 18 times its weight, with 6 V of continuous sinusoidal excitation and a speed of 0.65 mm/s. A lighter slider, weighting only 3 mg, reached a mean speed of 1.7 mm/s at 6 V. In addition, by applying a burst sinusoidal excitation comprising 10 cycles, the TW generated in the bridge surface was able to move a 23 mg slider in discrete steps of 70 nm, in both directions, which is a promising result for a TW piezoelectric actuator of this size. Full article
(This article belongs to the Special Issue Piezoelectric Thin Film MEMS)
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