Advanced Micro- and Nano-Manufacturing Technologies, 3rd Edition

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D3: 3D Printing and Additive Manufacturing".

Deadline for manuscript submissions: 31 December 2026 | Viewed by 1684

Special Issue Editor


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Guest Editor
1. State Key Laboratory of Mechanical Transmission for Advanced Equipment, Chongqing University, Chongqing 400044, China
2. Chongqing Key Laboratory of Metal Additive Manufacturing (3D Printing), Chongqing University, Chongqing 400044, China
3. College of Mechanical and Vehicle Engineering, Chongqing University, Chongqing 400044, China
Interests: additive manufacturing of high-performance materials; intelligent mechanical processing integrated with high-throughput materials design; laser processing and manufacturing technologies; artificial Intelligence processing; machine learning methodology; materials computation and phase transformation
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Special Issue Information

Dear Colleagues,

Burgeoning advanced high-energy nano/micro-manufacturing provides a state-of-the-art technique for engineering. An emerging issue in recent decades is the development of advanced materials and manufacturing using their advantages to expand the scientific technologies and industrial applications. This requires extensive, dedicated research on advanced processes, manufacturing methodologies, post-processing technologies, and assisted numerical simulation and analyses, which significantly affects the quality of mechanical parts. Advanced manufacturing technologies will drive high performance and functionality in global technologies.

Therefore, this Special Issue focuses on recent works related to advanced high-energy nano/micro-manufacturing technologies for engineering. Topics can include, but are not limited to, the following:

  1. Advanced high-energy nano/micro-manufacturing processes;
  2. Post-processing technology of mechanical parts;
  3. Functional/graded materials using advanced manufacturing methodologies;
  4. Modeling and numerical analyses in advanced manufacturing processes;
  5. Advanced detection, monitoring and intelligent control for manufacturing.

Prof. Dr. Kun Li
Guest Editor

Manuscript Submission Information

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Keywords

  • high energy additive manufacturing (HEAM) processes
  • advanced materials by HEAM
  • performance and applications of HEAM
  • post-processing of HEAM parts
  • modeling and design of AM processes

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Published Papers (3 papers)

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Research

17 pages, 3986 KB  
Article
A Computer Numerical Control Wire Electrical Discharge Machining Strategy for Fabricating Cobalt–Copper Bimetallic Oxide Maze-like Micro-Supercapacitors
by Ziliang Chen, Rui Xie, Chunlong Chen, Yiwei Zheng, Jianping Deng, Dawei Liu, Binbin Zheng, Wenxia Wang, Igor Zhitomirsky and Ri Chen
Micromachines 2026, 17(5), 516; https://doi.org/10.3390/mi17050516 - 23 Apr 2026
Viewed by 325
Abstract
Cobalt–copper bimetallic oxides (CoCuOx) show great potential for constructing high-performance micro-supercapacitors (MSCs) for micro-electronic applications. However, their poor conductivity and complex preparation procedures significantly hinder their broad applications. To address these challenges, oxygen-vacancy-modified CoCuOx-based binder-free electrodes were fabricated using [...] Read more.
Cobalt–copper bimetallic oxides (CoCuOx) show great potential for constructing high-performance micro-supercapacitors (MSCs) for micro-electronic applications. However, their poor conductivity and complex preparation procedures significantly hinder their broad applications. To address these challenges, oxygen-vacancy-modified CoCuOx-based binder-free electrodes were fabricated using a one-step computer numerical control wire electrical discharge machining (CNCWEDM) strategy. This approach enabled the fabrication of CoCuOx-based maze-like MSCs (CoCuMMSCs) with designable electrochemical performance, which could be simply controlled by their geometric shape and machining voltage. Subsequently, theoretical simulations were conducted for studying the effect of MSCs geometric shape on their capacitive behavior. Remarkably, the CoCuMMSCs fabricated by a machining voltage of 100 V achieved the maximum capacitance of 32.8 mF cm−2 at 0.15 mA cm−2. Furthermore, the CoCuMMSCs demonstrated outstanding performance at ultrahigh scan rates of up to 50,000 mV s−1, exceeding by more than two orders of magnitude the values previously reported in the literature. The obtained results proved that the development of the CNCWEDM technique facilitated manufacturing CoCuMMSCs devices with excellent performance by the comprehensive utilization of oxygen-vacancy incorporation, synergistic effect of cobalt and copper oxides, binder-free electrode design, proper device construction and controllable machining voltage. The advanced CNCWEDM strategy creates a new pathway for the high-efficiency fabrication of high-performance bimetallic-oxide-based micro-electronic devices, such as MSCs, intelligent micro-sensors and micro-batteries. Full article
(This article belongs to the Special Issue Advanced Micro- and Nano-Manufacturing Technologies, 3rd Edition)
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24 pages, 395 KB  
Article
Modelling Key Performance Indicators (KPIs) in the Optimisation of Nanoimprint Lithography (NIL) Processes
by Andrzej Pacana and Karolina Czerwińska
Micromachines 2026, 17(4), 491; https://doi.org/10.3390/mi17040491 - 17 Apr 2026
Viewed by 475
Abstract
Nanoimprint lithography (NIL) plays an increasingly important role in modern nanomanufacturing processes, but its effective application in production conditions requires precise tools for evaluating and optimising technological processes. The aim of the study was to develop and model key performance indicators (KPIs) supporting [...] Read more.
Nanoimprint lithography (NIL) plays an increasingly important role in modern nanomanufacturing processes, but its effective application in production conditions requires precise tools for evaluating and optimising technological processes. The aim of the study was to develop and model key performance indicators (KPIs) supporting the optimisation of the quality, stability and efficiency of nanoimprint lithography processes. As part of the selection of indicators, a literature review, surveys and in-depth interviews with industry experts were conducted, which enabled the identification of indicators relevant from a technological practice perspective. The proposed KPI classification was directly linked to the stages of the NIL process, creating a basis for operational performance control and process capability analysis. A novel aspect is the proposal of an integrated KPI model that combines the classification of indicators based on the stages of the NIL process with their direct link to technological parameters and measurable quality effects. These indicators have been linked to critical process parameters for different NIL variants, including Thermal NIL, UV-NIL, Roll-to-Roll NIL and Step-and-Repeat NIL, using a process analysis and multi-criteria optimisation approach. Research indicates that the use of an integrated KPI model improves the accuracy of nanostructure mapping, reduced defect density, and increased process efficiency without compromising technological stability. The proposed approach is a universal tool supporting NIL process control, its scaling to industrial applications, and integration with statistical process control and data-driven optimisation methods. Full article
(This article belongs to the Special Issue Advanced Micro- and Nano-Manufacturing Technologies, 3rd Edition)
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15 pages, 2119 KB  
Article
Effects of In Situ Preheating Technology on Mechanical Properties and Microstructure of FFF-Printed PEEK
by Junhua Wang, Yuanming Mao, Jianan Shen, Yan Lu, Kun Li, Junfei Xu, Zhuangya Zhang, Ruijie Gu and Tancheng Xie
Micromachines 2026, 17(3), 303; https://doi.org/10.3390/mi17030303 - 28 Feb 2026
Viewed by 586
Abstract
The Polyether ether ketone (PEEK) suffers from insufficient interlayer molecular chain diffusion and weak interfacial fusion during Fused Filament Fabrication (FFF) due to its high melt viscosity and rapid cooling characteristics, restricting the mechanical properties and engineering applications of printed parts. To improve [...] Read more.
The Polyether ether ketone (PEEK) suffers from insufficient interlayer molecular chain diffusion and weak interfacial fusion during Fused Filament Fabrication (FFF) due to its high melt viscosity and rapid cooling characteristics, restricting the mechanical properties and engineering applications of printed parts. To improve the interlayer bonding quality of FFF-printed PEEK, an in situ preheating technology integrated into the print nozzle was proposed and implemented. Through a high-temperature controllable preheating system that moves synchronously with the nozzle, local precise heating is performed on the surface of the deposited layer to actively regulate the thermal history of the interlayer interface. Systematic studies on the effect of preheating temperature were conducted. The results show that the influence of preheating temperature on part performance follows a trend of first increasing and then decreasing. When the preheating temperature is 280 °C, the comprehensive performance of the specimens is optimal: the tensile strength reaches 69.47 MPa, which is 21.3% higher than that of the non-preheated reference group; the elongation at break is 71.07%; and the porosity decreases to 8.36%. Microstructural analysis reveals that moderate preheating facilitates molecular chain diffusion and interfacial fusion, whereas excessive heating induces thermal oxidative degradation of PEEK, resulting in deteriorated mechanical performance. These findings confirm that in situ preheating represents an effective approach for enhancing interlayer bonding, thereby offering a practical solution for the additive manufacturing of high-performance PEEK components. Full article
(This article belongs to the Special Issue Advanced Micro- and Nano-Manufacturing Technologies, 3rd Edition)
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