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Micromachines
Special Issues
Polymer Based MEMS and Microfabrication II
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Polymer Based MEMS and Microfabrication II

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "D：Materials and Processing".

Deadline for manuscript submissions: closed (31 October 2021) | Viewed by 11122

Special Issue Editors

Prof. Dr. Dan Sameoto

E-Mail Website
Guest Editor
Department of Mechanical Engineering, University of Alberta, Edmonton, AB T6G 1H9, Canada
Interests: microfabrication; polymers; lab-on-a-chip; MEMS; biomimetic adhesives; composites; additive manufacturing
Special Issues, Collections and Topics in MDPI journals
Dr. Anastasia Elias

E-Mail Website
Guest Editor
Department of Chemical and Materials Engineering, University of Alberta, Edmonton, Canada
Interests: functional and responsive polymers and composites; microfabrication; sensors; flexible electronics

Special Issue Information

Dear Colleagues,

The use of polymers in microfabrication has become increasingly important, with applications ranging from microfluidic systems, neural probes, wearable bioelectronics, microrobotics and biomimetic materials all benefiting from the unique manufacturing options and material properties available with polymers in comparison to traditional silicon based microfabrication. In this Special Issue, we aim to highlight some of the recent application of polymers in MEMS, microfluidics and smart materials applications, as well as unique fabrication methods that integrate electrical and mechanical functionality with flexible, stretchable, biocompatible, or disposable devices. Challenges in fabrication reliability, scalable production, and integration with other microfabrication technologies are still being addressed by researchers and companies around the world and solutions to these challenges are expected to permit polymers to be used in a much wider variety of microfabricated products in the future. We invite research papers, reviews and communications that focus on the use of polymers in microfabricated products that combine either sensing or actuation features common to MEMS. Topics of particular interest include, but are not limited to, micromanufacturing of polymer based sensors and actuators, microrobotic systems, bio-inspired surfaces for tailored wetting and adhesion properties, novel fabrication processes and polymer materials, stretchable electronics, microinjection molded products, biocompatibility of polymer MEMS, polymer microfluidic systems, and additive manufacturing of MEMS.

Prof. Dan Sameoto
Dr. Anastasia Elias
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2600 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • polymers
  • microfabrication
  • MEMS
  • microfluidics
  • biomimetics
  • composites
  • microrobotics
  • additive manufacturing
  • sensors and actuators
  • stretchable electronics
  • novel fabrication processes

Published Papers (2 papers)

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Research

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16 pages, 4724 KiB  
Article
A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures
by Chang Ge and Edmond Cretu
Micromachines 2020, 11(3), 317; https://doi.org/10.3390/mi11030317 - 18 Mar 2020
Cited by 2 | Viewed by 3603
Abstract
In this paper, a simple fabrication process for SU-8 in-plane micro electro-mechanical systems (MEMS) structures, called “border-bulk micromachining”, is introduced. It aims to enhance the potential of SU-8 MEMS structures for applications such as low-cost/disposable microsystems and wearable MEMS. The fabrication process is [...] Read more.
In this paper, a simple fabrication process for SU-8 in-plane micro electro-mechanical systems (MEMS) structures, called “border-bulk micromachining”, is introduced. It aims to enhance the potential of SU-8 MEMS structures for applications such as low-cost/disposable microsystems and wearable MEMS. The fabrication process is robust and uses only four processing steps to fabricate SU-8 in-plane MEMS structures, simplifying the fabrication flow in comparison with other reported attempts. The whole fabrication process has been implemented on copper-polyimide composites. A new processing method enables the direct, laser-based micromachining of polyimide in a practical way, bringing in extra processing safety and simplicity. After forming the polymeric in-plane MEMS structures through SU-8 lithography, a copper wet etching masked by the SU-8 structure layers is carried out. After the wet etching, fabricated in-plane MEMS structures are suspended within an open window on the substrate, similar to the final status of in-plane MEMS devices made from industrial silicon micromachining methods (such as SOIMUMPS). The last step of the fabrication flow is a magnetron sputtering of aluminum. The border-bulk micromachining process has been experimentally evaluated through the fabrication and the characterization of simple in-plane electrically actuated MEMS test structures. The characterization results of these simple test structures have verified the following process qualities: controllability, reproducibility, predictability and general robustness. Full article
(This article belongs to the Special Issue Polymer Based MEMS and Microfabrication II)
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Review

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29 pages, 5813 KiB  
Review
Smart Textiles for Visible and IR Camouflage Application: State-of-the-Art and Microfabrication Path Forward
by Lauren M. Degenstein, Dan Sameoto, James D. Hogan, Asad Asad and Patricia I. Dolez
Micromachines 2021, 12(7), 773; https://doi.org/10.3390/mi12070773 - 30 Jun 2021
Cited by 21 | Viewed by 6909
Abstract
Protective textiles used for military applications must fulfill a variety of functional requirements, including durability, resistance to environmental conditions and ballistic threats, all while being comfortable and lightweight. In addition, these textiles must provide camouflage and concealment under various environmental conditions and, thus, [...] Read more.
Protective textiles used for military applications must fulfill a variety of functional requirements, including durability, resistance to environmental conditions and ballistic threats, all while being comfortable and lightweight. In addition, these textiles must provide camouflage and concealment under various environmental conditions and, thus, a range of wavelengths on the electromagnetic spectrum. Similar requirements may exist for other applications, for instance hunting. With improvements in infrared sensing technology, the focus of protective textile research and development has shifted solely from providing visible camouflage to providing camouflage in the infrared (IR) region. Smart textiles, which can monitor and react to the textile wearer or environmental stimuli, have been applied to protective textiles to improve camouflage in the IR spectral range. This study presents a review of current smart textile technologies for visible and IR signature control of protective textiles, including coloration techniques, chromic materials, conductive polymers, and phase change materials. We propose novel fabrication technology combinations using various microfabrication techniques (e.g., three-dimensional (3D) printing; microfluidics; machine learning) to improve the visible and IR signature management of protective textiles and discuss possible challenges in terms of compatibility with the different textile performance requirements. Full article
(This article belongs to the Special Issue Polymer Based MEMS and Microfabrication II)
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