Next Article in Journal
Microfluidic In-Situ Measurement of Poisson’s Ratio of Hydrogels
Previous Article in Journal
Preparation of Superhydrophobic Surface on Titanium Alloy via Micro-Milling, Anodic Oxidation and Fluorination
Open AccessArticle

A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures

Department of Electrical and Computer Engineering, University of British Columbia; 3063-2332 Main Mall, Vancouver, BC V6T 1Z4, Canada
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(3), 317; https://doi.org/10.3390/mi11030317
Received: 21 February 2020 / Revised: 11 March 2020 / Accepted: 18 March 2020 / Published: 18 March 2020
(This article belongs to the Special Issue Polymer Based MEMS and Microfabrication II)
In this paper, a simple fabrication process for SU-8 in-plane micro electro-mechanical systems (MEMS) structures, called “border-bulk micromachining”, is introduced. It aims to enhance the potential of SU-8 MEMS structures for applications such as low-cost/disposable microsystems and wearable MEMS. The fabrication process is robust and uses only four processing steps to fabricate SU-8 in-plane MEMS structures, simplifying the fabrication flow in comparison with other reported attempts. The whole fabrication process has been implemented on copper-polyimide composites. A new processing method enables the direct, laser-based micromachining of polyimide in a practical way, bringing in extra processing safety and simplicity. After forming the polymeric in-plane MEMS structures through SU-8 lithography, a copper wet etching masked by the SU-8 structure layers is carried out. After the wet etching, fabricated in-plane MEMS structures are suspended within an open window on the substrate, similar to the final status of in-plane MEMS devices made from industrial silicon micromachining methods (such as SOIMUMPS). The last step of the fabrication flow is a magnetron sputtering of aluminum. The border-bulk micromachining process has been experimentally evaluated through the fabrication and the characterization of simple in-plane electrically actuated MEMS test structures. The characterization results of these simple test structures have verified the following process qualities: controllability, reproducibility, predictability and general robustness. View Full-Text
Keywords: polymeric MEMS; SU-8 micromachining; polymer substrate; maskless lithography; laser micromachining polymeric MEMS; SU-8 micromachining; polymer substrate; maskless lithography; laser micromachining
Show Figures

Figure 1

MDPI and ACS Style

Ge, C.; Cretu, E. A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures. Micromachines 2020, 11, 317.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop