Inertial MEMS Devices
A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".
Deadline for manuscript submissions: closed (15 February 2021) | Viewed by 6908
Special Issue Editor
Interests: MEMS; inertial sensors; microsystems; signal processing and control; microtechnologies; ultrasound; CMUT
Special Issues, Collections and Topics in MDPI journals
Special Issue Information
Dear Colleagues,
Despite being considered one of the most mature applications of micro-electromechanical systems (MEMS), inertial sensors still have a steady growth rate, with their range of applications extending from the initial automotive market to smartphones and wearable sensors for various body monitoring functions. Recent advances in this context range from alternative microfabrication technologies, beyond silicon, for low-cost wearable sensors, to new operating principles that lead to higher sensitivity of MEMS inertial sensors while maintaining the downscaling trend. Such new techniques exploit new electromechanical interactions at microscale, such as operation on the stability border, parametric amplification or mode localized sensing, pushing the inertial sensing limits set by the thermomechanical and electronic noise sources. The higher sensitivity and stable operation targets, leading, for instance, to demanding sensors like gravimeters, require in most cases an integration with electronic feedback loops—the trend here is to emphasize digital control such as sigma-delta or sliding mode techniques, for an easy and robust integration with other electronic subsystems. At the application level, many new directions lead to a structured data fusion of several sensing channels for the reconstruction of multiple degrees-of-freedom (DoFs), for instance, through Kalman filtering and its various extensions.
We intend therefore to cover in this Special Issue some of these exciting topics, through papers addressing a wide range of inertial sensors research avenues, including, but not limited to:
- modern microfabrication technologies for inertial MEMS sensors;
- Advanced sensing alternatives for high-sensitivity or robust inertial sensing;
- Modelling and simulation (information flow or energy flow) of inertial MEMS sensors;
- Specific packaging solutions for long term robust operation in a varying environment;
- Modern feedback control architectures dedicated to inertial sensors;
- Low-power readout electronics dedicated to inertial sensors;
- Self-calibrating techniques for a guaranteed accuracy in-the-field;
- Innovative applications of inertial sensors.
Prof. Edmond Cretu
Guest Editor
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Keywords
- inertial sensors
- MEMS
- accelerometer
- gyroscope
- inertial measurement unit
- microfabrication
- Kalman filtering
- reduced order macromodelling
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