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Open AccessArticle

Fabrication of Random Microlens Array for Laser Beam Homogenization with High Efficiency

1
University of Electronic Science and Technology of China, Chengdu 610054, China
2
Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
*
Authors to whom correspondence should be addressed.
Micromachines 2020, 11(3), 338; https://doi.org/10.3390/mi11030338
Received: 25 February 2020 / Revised: 18 March 2020 / Accepted: 19 March 2020 / Published: 24 March 2020
(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)
The miniaturized and integrated microlens array (MLA) can effectively achieve the beam homogenization, compactness and miniaturization of laser systems. When the high-coherence laser beam is homogenized by means of using the MLA, interference fringes will occur in the homogenized light spot due to the periodicity of the MLA, which seriously affects the uniformity of the homogenized light spot. To solve this problem, a novel random microlens array (rMLA) structure was proposed for the purpose of achieving beam homogenization. The coherence in the homogenization process is suppressed by means of breaking the periodicity of the MLA. The homogenized light spot with a high energy utilization is then obtained accordingly. In the fabrication process, a clever method of combining chemical etching with lithography technology is performed to fabricate a honeycomb rMLA and a rectangular rMLA. The experimental results show that the energy utilization rate of the two types of the rMLAs is about 90%, and the uniformity of the homogenized light spots generated by the honeycomb rMLA and the rectangular rMLA are more than 80% and 85%, respectively. Meanwhile, fully cost-effective fabrication is possible to be realized. View Full-Text
Keywords: chemical etching; random microlens array; beam homogenization; laser chemical etching; random microlens array; beam homogenization; laser
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MDPI and ACS Style

Xue, L.; Pang, Y.; Liu, W.; Liu, L.; Pang, H.; Cao, A.; Shi, L.; Fu, Y.; Deng, Q. Fabrication of Random Microlens Array for Laser Beam Homogenization with High Efficiency. Micromachines 2020, 11, 338.

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