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Micromachines
Special Issues
Advances in MEMS Inertial Sensors
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Advances in MEMS Inertial Sensors

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A：Physics".

Deadline for manuscript submissions: 31 July 2025 | Viewed by 13072

Special Issue Editors

Dr. Tong Zhou

E-Mail Website
Guest Editor
School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
Interests: MEMS sensors; MEMS gyroscope; MEMS inertial sensors
Dr. Jing Zhang

E-Mail Website
Guest Editor
School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
Interests: MEMS sensor; MEMS inertial sensors; inertial navigation system
Prof. Dr. Yan Su

E-Mail Website
Guest Editor
School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
Interests: MEMS sensors; MEMS inertial sensors; inertial navigation system; MEMS sensor chips and systems

Special Issue Information

Dear Colleagues,

The journal Micromachines is pleased to announce the Special Issue "Advances in MEMS Inertial Sensors". Microelectromechanical systems (MEMS) inertial sensors play an increasingly important role in modern technology, providing crucial sensing capabilities for applications such as unmanned vehicles, smartphones, wearable devices, and more. This Special Issue aims to gather the latest research findings, exploring the cutting-edge advancements and applications of MEMS inertial sensor technology. We sincerely invite researchers, engineers, and experts from academia and industry to submit original research papers, review articles, and technical reports to share their latest achievements, innovative approaches, and practical experiences. We look forward to this Special Issue making significant contributions to the development of MEMS inertial sensor technology and providing a platform for exchange among peers in the scientific and engineering communities. 

Topics include, but are not limited to, the following:

  • Design, fabrication, and integration of MEMS inertial sensors;
  • Calibration and testing methods for high-precision MEMS inertial sensors;
  • Applications of MEMS inertial sensors in navigation, inertial navigation systems, and inertial measurement units;
  • Applications of MEMS inertial sensors in unmanned systems, intelligent transportation systems, and virtual reality;
  • Energy-efficient design and low-power techniques for MEMS inertial sensors;
  • Applications of MEMS inertial sensors in medical health monitoring and motion tracking;
  • Novel materials, manufacturing processes, and packaging technologies for MEMS inertial sensors. 

Scholars and experts are encouraged to submit original research on the above topics or related areas to promote the development and application of MEMS inertial sensor technology.

Dr. Tong Zhou
Dr. Jing Zhang
Prof. Dr. Yan Su
Guest Editors

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Micromachines is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2100 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • MEMS inertial sensors
  • inertial navigation systems
  • inertial measurement units

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Further information on MDPI's Special Issue policies can be found here.

Published Papers (6 papers)

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Research

17 pages, 5354 KiB  
Article
A Novel Closed-Loop Single-Channel Time Division Multiplexing Detection Circuit for Hemispherical Resonator Gyroscope
by Qi Wang, Weinan Xie, Boqi Xi, Hanshi Li and Guoxing Yi
Micromachines 2025, 16(3), 273; https://doi.org/10.3390/mi16030273 - 27 Feb 2025
Viewed by 365
Abstract
The vector control method is applied to a whole angle hemispherical resonator gyroscope (HRG). The detection and control of the resonator vibration state are implemented using orthogonal X/Y channels. However, the performance of the HRG is limited by the asymmetry in [...] Read more.
The vector control method is applied to a whole angle hemispherical resonator gyroscope (HRG). The detection and control of the resonator vibration state are implemented using orthogonal X/Y channels. However, the performance of the HRG is limited by the asymmetry in the gain and phase delay of X/Y channels. To address these issues, a novel detection circuit is proposed. The circuit leverages the closed-loop characteristics to achieve symmetry and stability in the X/Y channel gain while simultaneously eliminating phase delays within the loop. Firstly, a closed-loop single-channel time division multiplexing circuit is designed to overcome the deficiencies of the traditional dual-channel circuit. Secondly, a model is developed to analyze the time division detection errors, and an improved demodulation method is proposed to mitigate detection errors. Lastly, experimental results demonstrate that the designed circuit successfully suppresses drift in both gain and phase delay within the loop, confirming the effectiveness of the proposed solution in enhancing the performance of the HRG. Full article
(This article belongs to the Special Issue Advances in MEMS Inertial Sensors)
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14 pages, 4601 KiB  
Article
Modeling and Analysis of Vibration Coupling in Differential Common-Based MEMS Resonators
by Jing Zhang, Zhuo Yang, Tianhao Wu, Zhichao Yao, Chen Lin and Yan Su
Micromachines 2025, 16(2), 169; https://doi.org/10.3390/mi16020169 - 30 Jan 2025
Viewed by 703
Abstract
In differential MEMS resonant sensors, a pair of resonators are interconnected with other structural components while sharing a common substrate. This leads to mutual coupling of vibration energy between resonators, interfering with their frequency outputs and affecting the sensor’s static performance. This paper [...] Read more.
In differential MEMS resonant sensors, a pair of resonators are interconnected with other structural components while sharing a common substrate. This leads to mutual coupling of vibration energy between resonators, interfering with their frequency outputs and affecting the sensor’s static performance. This paper aims to model and analyze the vibration coupling phenomena in differential common-based MEMS resonators (DCMR). A mechanical model of the DCMR structure was established and refined through finite element simulation analysis. Theoretical calculations yielded vibration coupling curves for two typical silicon resonant accelerometer (SRA) structures containing DCMR: SRA-V1 and SRA-V2, with coupling stiffness values of 2.361 × 10−4 N/m and 1.370 × 10−2 N/m, respectively. An experimental test system was constructed to characterize the vibration coupling behavior. The results provided coupling amplitude-frequency characteristic curves and coupling stiffness values (7.073 × 10−4 N/m and 1.068 × 10−2 N/m for SRA-V1 and SRA-V2, respectively) that validated the theoretical analysis and computational model. This novel approach enables effective evaluation of coupling intensity between 5resonators and provides a theoretical foundation for optimizing device structural designs. Full article
(This article belongs to the Special Issue Advances in MEMS Inertial Sensors)
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11 pages, 3349 KiB  
Article
CFD Analysis of Particle Dynamics in Accelerated Toroidal Systems for Enhanced PIVG Performance
by Ramy Elaswad, Naser El-Sheimy and Abdulmajeed Mohamad
Micromachines 2024, 15(12), 1432; https://doi.org/10.3390/mi15121432 - 28 Nov 2024
Viewed by 3122
Abstract
This study investigates the movements of particles in an accelerated toroidal flow channel filled with water, with specific applications for a particle imaging velocimetry gyroscope (PIVG). We used computational fluid dynamics (CFD) to simulate particle behavior under different angular accelerations. These angular accelerations [...] Read more.
This study investigates the movements of particles in an accelerated toroidal flow channel filled with water, with specific applications for a particle imaging velocimetry gyroscope (PIVG). We used computational fluid dynamics (CFD) to simulate particle behavior under different angular accelerations. These angular accelerations were 4 rad/s2, 6 rad/s2, and 8 rad/s2 for particles densities of 1100 kg/m3, 1050 kg/m3, and 980 kg/m3. An examination was performed on the particles’ concentration distribution, velocity profiles, and displacement patterns with respect to the toroidal geometry, which had a volume fraction of 1.5% and was sized at 50 microns. Our results show that particle density significantly affects behavior and displacement within the toroidal flow, with heavier particles (1100 kg/m3) settling more quickly and concentrating near the lower z values over time, while lighter particles (980 kg/m3) maintain a more uniform distribution. This understanding is crucial for optimizing PIVG accuracy and reliability. Full article
(This article belongs to the Special Issue Advances in MEMS Inertial Sensors)
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22 pages, 5925 KiB  
Article
Research on Energy Dissipation Mechanism of Cobweb-like Disk Resonator Gyroscope
by Huang Yi, Bo Fan, Feng Bu, Fang Chen and Xiao-Qing Luo
Micromachines 2024, 15(11), 1380; https://doi.org/10.3390/mi15111380 - 15 Nov 2024
Cited by 1 | Viewed by 1851
Abstract
The micro disk resonator gyroscope is a micro-mechanical device with potential for navigation-grade applications, where the performance is significantly influenced by the quality factor, which is determined by various energy dissipation mechanisms within the micro resonant structure. To enhance the quality factor, these [...] Read more.
The micro disk resonator gyroscope is a micro-mechanical device with potential for navigation-grade applications, where the performance is significantly influenced by the quality factor, which is determined by various energy dissipation mechanisms within the micro resonant structure. To enhance the quality factor, these gyroscopes are typically enclosed in high-vacuum packaging. This paper investigates a wafer-level high-vacuum-packaged (<0.1 Pa) cobweb-like disk resonator gyroscope, presenting a systematic and comprehensive theoretical analysis of the energy dissipation mechanisms, including air damping, thermoelastic damping, anchor loss, and other factors. Air damping is analyzed using both a continuous fluid model and an energy transfer model. The analysis results are validated through quality factor testing on batch samples and temperature characteristic testing on individual samples. The theoretical results obtained using the energy transfer model closely match the experimental measurements, with a maximum error in the temperature coefficient of less than 2%. The findings indicate that air damping and thermoelastic damping are the predominant energy dissipation mechanisms in the cobweb-like disk resonant gyroscope under high-vacuum conditions. Consequently, optimizing the resonator to minimize thermoelastic and air damping is crucial for designing high-performance gyroscopes. Full article
(This article belongs to the Special Issue Advances in MEMS Inertial Sensors)
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24 pages, 7576 KiB  
Article
Development of Anemometer Based on Inertial Sensor
by Álvaro B. Rocha, Eisenhawer de M. Fernandes, Joyce I. V. Souto, Ricardo S. Gomez, João M. P. Q. Delgado, Felipe S. Lima, Railson M. N. Alves, André L. D. Bezerra and Antonio G. B. Lima
Micromachines 2024, 15(10), 1186; https://doi.org/10.3390/mi15101186 - 25 Sep 2024
Cited by 1 | Viewed by 1434
Abstract
The current article elucidates a study centered on the development of an anemometer leveraging an inertial sensor for wind speed measurement in the northeast region of Brazil, focusing on renewable energy generation. The study encompassed a series of experiments aimed at calibrating the [...] Read more.
The current article elucidates a study centered on the development of an anemometer leveraging an inertial sensor for wind speed measurement in the northeast region of Brazil, focusing on renewable energy generation. The study encompassed a series of experiments aimed at calibrating the anemometer, analyzing the noise generated by the inertial sensor, and scrutinizing the data acquired during wind speed measurement. The calibration process unfolded in three stages: initial noise analysis, subsequent inertial data analysis, and the derivation of calibration curves. The first two stages involved experiments conducted at an average sampling rate of 10 Hz. Simultaneously, the third stage incorporated data collected over a 1 h duration while maintaining the same sampling rate. The outcomes underscore the suitability of the anemometer based on an inertial sensor for wind energy systems and diverse applications. While the wind readings from the prototype exhibit considerable fluctuations, a three-length moving average filter is applied to the prototype’s output to mitigate these fluctuations. The calibration surface was established using observational data, and the resultant surface is detailed. Data analysis assumes paramount significance in wind speed measurement, and the K-NN algorithm demonstrated superior efficacy in estimating the correspondence between measured and control data. Full article
(This article belongs to the Special Issue Advances in MEMS Inertial Sensors)
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18 pages, 9552 KiB  
Article
An In-Run Automatic Demodulation Phase Error Compensation Method for MEMS Gyroscope in Full Temperature Range
by Jianpeng Wang, Gongliu Yang, Yi Zhou, Jiangyuan Zhang, Fumin Liu and Qingzhong Cai
Micromachines 2024, 15(7), 825; https://doi.org/10.3390/mi15070825 - 26 Jun 2024
Cited by 2 | Viewed by 4736
Abstract
The demodulation phase error will cause the quadrature error to be coupled to the rate output, resulting in performance deterioration of the MEMS gyroscope. To solve this problem, an in-run automatic demodulation phase error compensation method is proposed in this paper. This method [...] Read more.
The demodulation phase error will cause the quadrature error to be coupled to the rate output, resulting in performance deterioration of the MEMS gyroscope. To solve this problem, an in-run automatic demodulation phase error compensation method is proposed in this paper. This method applies square wave angular rate input to the gyroscope and automatically identifies the value of the demodulation phase error through the designed automatic identification algorithm. To realize in-run automatic compensation, the demodulation phase error corresponding to the temperature point is measured every 10 °C in the full-temperature environment (−40~60 °C). The relationship between temperature and demodulation phase error is fitted by a third-order polynomial. The temperature is obtained by the temperature sensor and encapsulated in the ceramic packages of the MEMS gyroscope, and the in-run automatic compensation is realized based on the fitting curve. The temperature hysteresis effect on the zero-rate output (ZRO) of the gyroscope is eliminated after compensation. The bias instability (BI) of the three gyroscopes at room temperature (25 °C) is reduced by four to eight times to 0.1°/h, while that at full-temperature environment (−40~60 °C) is reduced by three to four times to 0.1°/h after in-run compensation. Full article
(This article belongs to the Special Issue Advances in MEMS Inertial Sensors)
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