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- Communication
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Selective Transfer of Si Thin-Film Microchips by SiO2 Terraces on Host Chips for Fluidic Self-Assembly
- Yutaka Fujita,
- Shoji Ishihara,
- Yuki Nakashima,
- Kosuke Nishigaya and
- Katsuaki Tanabe
Fluidic self-assembly is a versatile on-chip integration method. In this scheme, a large number of semiconductor microchips are spontaneously deposited onto a host chip. The host chip typically comprises a Si substrate with an array of pockets at the...

