Selective Transfer of Si Thin-Film Microchips by SiO2 Terraces on Host Chips for Fluidic Self-Assembly
Fujita, Y.; Ishihara, S.; Nakashima, Y.; Nishigaya, K.; Tanabe, K. Selective Transfer of Si Thin-Film Microchips by SiO2 Terraces on Host Chips for Fluidic Self-Assembly. Appl. Mech. 2021, 2, 16-24. https://doi.org/10.3390/applmech2010002
Fujita Y, Ishihara S, Nakashima Y, Nishigaya K, Tanabe K. Selective Transfer of Si Thin-Film Microchips by SiO2 Terraces on Host Chips for Fluidic Self-Assembly. Applied Mechanics. 2021; 2(1):16-24. https://doi.org/10.3390/applmech2010002
Chicago/Turabian StyleFujita, Yutaka, Shoji Ishihara, Yuki Nakashima, Kosuke Nishigaya, and Katsuaki Tanabe. 2021. "Selective Transfer of Si Thin-Film Microchips by SiO2 Terraces on Host Chips for Fluidic Self-Assembly" Applied Mechanics 2, no. 1: 16-24. https://doi.org/10.3390/applmech2010002