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Impact of Carbon Impurities on Air Stability of MOCVD 2D-MoS2
- Amir Ghiami,
- Annika Grundmann,
- Songyao Tang,
- Hleb Fiadziushkin,
- Zhaodong Wang,
- Stephan Aussen,
- Susanne Hoffmann-Eifert,
- Michael Heuken,
- Holger Kalisch and
- Andrei Vescan
Metal–organic chemical vapor deposition (MOCVD) is a key method for scalable synthesis of two-dimensional transition metal dichalcogenide (2D-TMDC) layers. However, it faces several challenges, such as the unintentional co-deposition of carbon...

