Plasma, Volume 4, Issue 2

We have designed, fabricated and characterized an ion source based on a vacuum magnetron discharge. The magnetron discharge is initiated by a vacuum arc discharge, the plasma of which flows onto the magnetron sputtering target working surface. The va...

We describe some modifications to a Bernas-type ion source that improve the ion beam production efficiency and source operating lifetime. The ionization efficiency of a Bernas type ion source has been improved by using a small anode that is a thin ro...

Dust particles on a nonconductive surface are known to acquire electric charge and detach from the surface under plasma conditions and/or when affected by ultraviolet radiation. Similar phenomena occur as a result of electrostatic surface cleaning (s...