- Article
The Influence of Nitrogen Flow Rate on the Structure and Properties of Mo-Hf-Y-Si-B-N Coatings
- Philipp Kiryukhantsev-Korneev,
- Alina Sytchenko,
- Fedor Chudarin,
- Boris Senatulin and
- Evgeny Levashov
This work is devoted to the production of Mo-Hf-Y-Si-B-N coatings using magnetron sputtering with varying N2 flow rate; the analysis of magnetron discharge plasma; and the investigation of the structure, and optical, mechanical, and tribological char...

