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Open AccessArticle

Effect of Substrate Temperature on the Optical and Electrical Properties of Nitrogen-Doped NiO Thin Films

by Yuan Tian 1,2,*, Lianguo Gong 1,2, Xueqian Qi 3, Yibiao Yang 1,2,* and Xiaodan Zhao 1,2
1
Key Lab of Advanced Transducers and Intelligent Control System, Ministry of Education and Shanxi Province, Taiyuan University of Technology, Taiyuan 030024, China
2
College of Physics and Optoelectronics, Taiyuan University of Technology, Taiyuan 030024, China
3
First Design and Research Institute, China Wuzhou Engineering Group Corporation LTD, Beijing 100053, China
*
Authors to whom correspondence should be addressed.
Coatings 2019, 9(10), 634; https://doi.org/10.3390/coatings9100634
Received: 21 August 2019 / Revised: 23 September 2019 / Accepted: 26 September 2019 / Published: 2 October 2019
(This article belongs to the Special Issue Advanced Thin Films Deposited by Magnetron Sputtering)
NiO is a widely used p-type semiconductor. The desired optical and electrical properties of NiO vary in different application fields. To modulate the properties of NiO, nitrogen (N)-doped NiO thin films were synthesized by reactive radio-frequency magnetron sputtering on ITO-coated glass substrates. The influence of substrate temperature on the properties of NiO was investigated. XRD studies indicated a cubic structure. With the increase of the substrate temperature, the average transmittance in the visible region gradually reduced from 90% to 50%. The bandgap energy narrowed from 3.5 to 3.08 eV. The intensity of the PL spectra weakened, and the electrical conductivity rose. Overall, changing the substrate temperature is an effective method to modulate the optical and electrical properties of N-doped NiO thin films. View Full-Text
Keywords: nitrogen-doped; nickel oxide; magnetron sputtering; substrate temperature; optical properties; electrical properties nitrogen-doped; nickel oxide; magnetron sputtering; substrate temperature; optical properties; electrical properties
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Tian, Y.; Gong, L.; Qi, X.; Yang, Y.; Zhao, X. Effect of Substrate Temperature on the Optical and Electrical Properties of Nitrogen-Doped NiO Thin Films. Coatings 2019, 9, 634.

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