A TSV-Structured Room Temperature p-Type TiO2 Nitric Oxide Gas Sensor
Abstract
:1. Introduction
2. Materials and Methods
3. Results
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Materials | Structure | Concentration (ppm) | Optimum Operation Temperature (°C) | Response Time (s.) | Recovery Time (s.) | Reference |
---|---|---|---|---|---|---|
TiO2NP/ZnO film | Planar | 10 | 360 | 492 | 336 | [36] |
TiO2-rGO Nanocomposite | Planar | 2.75 | RT | 440 | 881 | [37] |
TiO2@NGQDs | Planar | 100 | RT | 235 | 285 | [38] |
PEDOT–PSS:DEG-TiO2 | Planar | 1 | RT | 416 | 33 | [39] |
TiO2 nanodot | Planar | 10 | RT | 91 | 184 | [40] |
TiO2 Film | TSV | 4 | RT | 109 | 144 | This work |
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Yeh, Y.-M.; Chang, S.-J.; Wang, P.-H.; Hsueh, T.-J. A TSV-Structured Room Temperature p-Type TiO2 Nitric Oxide Gas Sensor. Appl. Sci. 2022, 12, 9946. https://doi.org/10.3390/app12199946
Yeh Y-M, Chang S-J, Wang P-H, Hsueh T-J. A TSV-Structured Room Temperature p-Type TiO2 Nitric Oxide Gas Sensor. Applied Sciences. 2022; 12(19):9946. https://doi.org/10.3390/app12199946
Chicago/Turabian StyleYeh, Yu-Ming, Shoou-Jinn Chang, Pin-Hsiang Wang, and Ting-Jen Hsueh. 2022. "A TSV-Structured Room Temperature p-Type TiO2 Nitric Oxide Gas Sensor" Applied Sciences 12, no. 19: 9946. https://doi.org/10.3390/app12199946