Next Article in Journal
Learning Low-Dimensional Embeddings of Audio Shingles for Cross-Version Retrieval of Classical Music
Next Article in Special Issue
Geometrical Calibration of a 2.5D Periapical Radiography System
Previous Article in Journal
Influence of Multiple-Support Excitation on Seismic Response of Reinforced Concrete Arch Bridges
Previous Article in Special Issue
Theoretical Study on Pressure Damage Based on Clinical Purpura during the Laser Irradiation of Port Wine Stains with Real Complex Vessels
 
 
Search for Articles:
Title / Keyword
Author / Affiliation / Email
Journal
Article Type
 
 
Advanced Search
 
Section
Special Issue
Volume
Issue
Number
Page
 
Journals
Applied Sciences
Volume 10
Issue 1
10.3390/app10010018
applsci-logo
Submit to this Journal Review for this Journal Propose a Special Issue
► Article Menu

Article Menu

share Share announcement Help format_quote Cite question_answer Discuss in SciProfiles
first_page
settings
Order Article Reprints
Font Type:
Arial Georgia Verdana
Font Size:
Aa Aa Aa
Line Spacing:
Column Width:
Background:
Article

Measurement of Structural Loads Using a Novel MEMS Extrinsic Fabry–Perot Strain Sensor

by
Yufang Bai
1,
Jie Zeng
1,*,
Jiwei Huang
1,
Shaolong Zhong
2,
Zhuming Cheng
1 and
Dakai Liang
1
1
State Key Laboratory of Mechanics and Control of Mechanical Structures, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
2
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
*
Author to whom correspondence should be addressed.
Appl. Sci. 2020, 10(1), 18; https://doi.org/10.3390/app10010018
Submission received: 7 November 2019 / Revised: 15 December 2019 / Accepted: 16 December 2019 / Published: 18 December 2019
(This article belongs to the Special Issue Biomedical Optics and Engineering)
Browse Figures
Versions Notes

Abstract

In this paper, microelectromechanical systems (MEMS) technology was used to fabricate a novel extrinsic fiber Fabry–Perot (EFFP) strain sensor; this fiber sensor is applied to measure load with higher precision for a small structure. The sensor cavity consists of two Fabry–Perot (FP) cavity mirrors that are processed by surface micromachining and then fused and spliced together by the silicon–glass anode bonding process. The initial cavity length can be strictly controlled, and the excellent parallelism of the two faces of the cavity results in a high interference fineness. Then, the anti-reflection coating process is applied to the sensor to improve the clarity of the interference signal with the cavity, with its wavelength working within the range of the C + L band. Next, the sensor placement is determined by the finite element software Nastran. Experimental results indicate that the sensor exhibits a good linear response (99.77%) to load changes and a high repeatability. Considering the strain transfer coefficient, the sensitivity for the tested structure load is as high as 35.6 pm/N. Due to the miniaturization, repeatability, and easy-to-batch production, the proposed sensor can be used as a reliable and practical force sensor.
Keywords: microelectromechanical systems; extrinsic Fabry-Perot interferometer; strain sensor; load measurement; repeatability microelectromechanical systems; extrinsic Fabry-Perot interferometer; strain sensor; load measurement; repeatability

Share and Cite

MDPI and ACS Style

Bai, Y.; Zeng, J.; Huang, J.; Zhong, S.; Cheng, Z.; Liang, D. Measurement of Structural Loads Using a Novel MEMS Extrinsic Fabry–Perot Strain Sensor. Appl. Sci. 2020, 10, 18. https://doi.org/10.3390/app10010018

AMA Style

Bai Y, Zeng J, Huang J, Zhong S, Cheng Z, Liang D. Measurement of Structural Loads Using a Novel MEMS Extrinsic Fabry–Perot Strain Sensor. Applied Sciences. 2020; 10(1):18. https://doi.org/10.3390/app10010018

Chicago/Turabian Style

Bai, Yufang, Jie Zeng, Jiwei Huang, Shaolong Zhong, Zhuming Cheng, and Dakai Liang. 2020. "Measurement of Structural Loads Using a Novel MEMS Extrinsic Fabry–Perot Strain Sensor" Applied Sciences 10, no. 1: 18. https://doi.org/10.3390/app10010018

APA Style

Bai, Y., Zeng, J., Huang, J., Zhong, S., Cheng, Z., & Liang, D. (2020). Measurement of Structural Loads Using a Novel MEMS Extrinsic Fabry–Perot Strain Sensor. Applied Sciences, 10(1), 18. https://doi.org/10.3390/app10010018

Note that from the first issue of 2016, this journal uses article numbers instead of page numbers. See further details here.

Article Metrics

Back to TopTop