TiO
2 films and N-doped TiO
2 films modified with silver (Ag/N-TiO
2) were synthesized using DC magnetron sputtering. By varying the N
2 flow rate and the Ag sputtering power, respectively, the degree of doping and modification was managed. The microstructure,
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TiO
2 films and N-doped TiO
2 films modified with silver (Ag/N-TiO
2) were synthesized using DC magnetron sputtering. By varying the N
2 flow rate and the Ag sputtering power, respectively, the degree of doping and modification was managed. The microstructure, morphology, and properties of the thin film were studied using X-ray diffraction, field emission scanning electron microscopy, UV visible diffuse reflectance spectroscopy, and atomic force microscopy. The results show that TiO
2 in Ag/N-TiO
2 composite has an anatase structure, and the absorption spectrum of (Ag/N-TiO
2) thin film shows a red shift. The best photocatalytic degradation effect regarding the N-TiO
2 films was observed with an N
2 flow rate of 16 sccm (standard cubic per minute). The degradation rate in MO (Methyl orange) pure solution (C
0 = 10 mg/L) can reach 100% in 85 min, and in the MO-Na
2SO
4 mixed solution (C
0 = 10 mg/L, C C
Na2SO4 = 12.5 g/L), it only takes 40 min. Ag/N-TiO
2 films exhibited the highest degradation efficiency at a 5 W sputtering power and 50 s of sputtering time, reaching a 100% degradation rate in MO pure solution that can reach 100% in 50 min, and in the MO-Na
2SO
4 mixed solution, it only takes 36 min. The photocatalytic decomposition of MO was greatly accelerated by the addition of Na
2SO
4, which worked best with a 12.5 g/L concentration. However, when the concentration of Na
2SO
4 is above or below 12.5 g/L, Na
2SO
4 exhibits significant inhibition of photocatalytic degradation. Photocatalytic cycling experiments showed that the photocatalyst still maintained an effective degradation performance after four cycles. The degradation mechanism was analyzed using first-order kinetics and energy band theory. Compared to powder particles, the photocatalyst on the films has high stability and can be recovered 100%. So, photocatalysts on films have great potential for industrial applications.
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