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Micromachines 2018, 9(2), 69; https://doi.org/10.3390/mi9020069

High-Performance MIM Capacitors for a Secondary Power Supply Application

1,2,* , 1,2,* , 1,2
,
1,2
and
1
1
Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
2
School of Instrument and Electronics, North University of China, Taiyuan 030051, China
*
Authors to whom correspondence should be addressed.
Received: 20 October 2017 / Revised: 26 January 2018 / Accepted: 31 January 2018 / Published: 4 February 2018
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Abstract

Microstructure is important to the development of energy devices with high performance. In this work, a three-dimensional Si-based metal-insulator-metal (MIM) capacitor has been reported, which is fabricated by microelectromechanical systems (MEMS) technology. Area enlargement is achieved by forming deep trenches in a silicon substrate using the deep reactive ion etching method. The results indicate that an area of 2.45 × 103 mm2 can be realized in the deep trench structure with a high aspect ratio of 30:1. Subsequently, a dielectric Al2O3 layer and electrode W/TiN layers are deposited by atomic layer deposition. The obtained capacitor has superior performance, such as a high breakdown voltage (34.1 V), a moderate energy density (≥1.23 mJ/cm2) per unit planar area, a high breakdown electric field (6.1 ± 0.1 MV/cm), a low leakage current (10−7 A/cm2 at 22.5 V), and a low quadratic voltage coefficient of capacitance (VCC) (≤63.1 ppm/V2). In addition, the device’s performance has been theoretically examined. The results show that the high energy supply and small leakage current can be attributed to the Poole–Frenkel emission in the high-field region and the trap-assisted tunneling in the low-field region. The reported capacitor has potential application as a secondary power supply. View Full-Text
Keywords: microelectromechanical systems (MEMS); microstructures; metal-insulator-metal capacitors; secondary power supply; electrical properties microelectromechanical systems (MEMS); microstructures; metal-insulator-metal capacitors; secondary power supply; electrical properties
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Mu, J.; Chou, X.; Ma, Z.; He, J.; Xiong, J. High-Performance MIM Capacitors for a Secondary Power Supply Application. Micromachines 2018, 9, 69.

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