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Keywords = microelectromechanical systems (MEMS)

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49 pages, 1722 KB  
Review
Smart Chemical Sensors for Monitoring and Detection of Spoilage in Fermented and Non-Fermented Food Products
by Catarina Marques-Gomes, Fernanda Cosme, Ivo Oliveira, Berta Gonçalves, Teresa Pinto, António Inês, Alfredo Aires, Reinaldo Gomes, Sílvia Afonso and Alice Vilela
Sensors 2026, 26(16), 5186; https://doi.org/10.3390/s26165186 (registering DOI) - 16 Aug 2026
Abstract
Smart chemical sensors have emerged as promising tools for real-time monitoring of food spoilage in both fermented and non-fermented products. By detecting key spoilage indicators—including biogenic amines, ammonia, hydrogen sulfide, methane, pH variations, and microbial volatile organic compounds (MVOCs)—these systems enable rapid, on-site [...] Read more.
Smart chemical sensors have emerged as promising tools for real-time monitoring of food spoilage in both fermented and non-fermented products. By detecting key spoilage indicators—including biogenic amines, ammonia, hydrogen sulfide, methane, pH variations, and microbial volatile organic compounds (MVOCs)—these systems enable rapid, on-site assessment of food quality, offering a viable alternative to conventional, time-consuming laboratory analyses. Recent advances encompass diverse sensing mechanisms, including chemiresistive platforms based on conducting polymers and MEMS (Microelectromechanical Systems); optical/colorimetric systems using dyes, metal–organic frameworks, and porphyrins; and electrochemical and biosensing approaches employing enzymes, antibodies, aptamers, and whole-cell recognition elements. These sensors demonstrate high sensitivity (ppb–ppm range), enabling early detection of spoilage before sensory perception or microbiological threshold exceedance. Their applicability has been validated across a wide range of food matrices, including meat, fish, dairy products, vegetables, beverages, and fermented foods. Despite significant progress, key challenges persist, including signal drift, limited specificity, susceptibility to environmental factors such as humidity and temperature, and interference from complex food matrices. Furthermore, integration into intelligent packaging requires the development of flexible, food-safe, and regulatory-compliant materials. Emerging approaches that combine sensor arrays with machine learning and MVOC pattern recognition are enhancing predictive accuracy and enabling food classification across commodity types. Overall, smart chemical sensing technologies are rapidly transitioning from laboratory prototypes to practical applications in intelligent packaging and wireless monitoring systems, with ongoing research focused on improving robustness, standardization, and scalability for commercial deployment. This article provides an overview of the topic, drawing on the available bibliography from the last five years and the most-cited scientific databases. Full article
(This article belongs to the Special Issue Use of Sensors and Chemical Analysis for Food Safety and Quality)
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38 pages, 5215 KB  
Article
Multi-Modal Nonlinear Response of an Electrically Actuated Microelectromechanical System Resonator
by Mohamed Emad Abdelraouf, Kai Morino, Ahmed Elsaid, Waheed Zahra and Ali Kandil
Mathematics 2026, 14(16), 2946; https://doi.org/10.3390/math14162946 - 14 Aug 2026
Viewed by 117
Abstract
Microelectromechanical systems (MEMS) have a widespread use in several applications such as signal filtering, time referencing, and sensing. This paper explores the nonlinear dynamic behavior of a MEMS resonator using a reduced-order modeling approach. The study focuses on how multi-modal formulation and detuning [...] Read more.
Microelectromechanical systems (MEMS) have a widespread use in several applications such as signal filtering, time referencing, and sensing. This paper explores the nonlinear dynamic behavior of a MEMS resonator using a reduced-order modeling approach. The study focuses on how multi-modal formulation and detuning affect the system’s response under primary resonance. Using the method of multiple scales, amplitude–phase response equations are derived, and time-domain simulations are generated with the Runge–Kutta method. Two mode combinations are examined: the first mode combined with the second mode and the first mode with the third mode for multi-modal influence evaluation. Results indicate that the first mode provides the dominant behavior to MEMS response, while the second and third modes exhibit minimal participation despite the nonlinearities retained in the presented multi-modal model. Additionally, a detuning study reveals that the geometric and forcing nonlinear effects are stronger near resonance and diminish as the system moves away from it. The analysis suggests that the significant features of the response can be captured in the case of primary resonance using only the first mode, which offers an effective modeling approach. From a design perspective, finding that the first mode alone is sufficient means that the essential dynamic behavior of the MEMS resonator can be predicted and controlled by focusing on its first mode of vibration. In practical terms, this greatly allows engineers to optimize geometry, driving voltage, or control parameters to target the first mode natural frequency without accounting for higher modes, which reduces computational cost and design complexity. Full article
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20 pages, 11392 KB  
Article
Stability of Operating Noise for Packaged MEMS Gyroscopes in Low-Speed Vehicle Motion Scenarios
by Xu Yang, Yanshun Zhang, Zhaoyang Liu, Yajuan Wang, A-Ni Li and Yang Pang
Micromachines 2026, 17(8), 947; https://doi.org/10.3390/mi17080947 - 8 Aug 2026
Viewed by 174
Abstract
Micro-Electro-Mechanical System (MEMS) gyroscopes serve as core components for attitude-sensing systems in low-speed unmanned vehicles and mobile robots. The long-term dynamic stability of MEMS gyroscopes under actual continuous low-speed vehicle operation is significantly inferior to the nominal performance derived from laboratory-based static calibration. [...] Read more.
Micro-Electro-Mechanical System (MEMS) gyroscopes serve as core components for attitude-sensing systems in low-speed unmanned vehicles and mobile robots. The long-term dynamic stability of MEMS gyroscopes under actual continuous low-speed vehicle operation is significantly inferior to the nominal performance derived from laboratory-based static calibration. This paper adopts a navigation-grade fiber optic gyroscope as the high-precision angular velocity reference. Angular velocity error sequences between the MEMS gyroscope and fiber optic gyroscope are established using field test data collected from a low-speed vehicle experiment lasting approximately 3.3 h. Three analytical approaches are applied to systematically characterize noise evolution features of the MEMS gyroscope under static and dynamic conditions from multiple dimensions. These approaches include time-domain drift analysis, angle random walk evaluation via Allan Variance, and frequency-domain interpretation based on Welch power spectral density. The test results reveal that vehicle motion significantly degrades the 10 s averaged bias stability of the MEMS gyroscope. The bias stability values under dynamic conditions increase by 2.1, 2.7 and 7.7 times compared with static states respectively. Root mean square analysis through band segmentation integration of Welch power spectral density indicates that vehicle motion induces the most obvious rise in noise energy in the middle frequency band. The amplification factor of noise along the Y axis reaches 24.7 times. The joint analytical framework proposed in this paper takes fiber optic gyroscope measurements as the reference and integrates time-domain analysis, Allan Variance and frequency-domain methods. It can provide sufficient experimental evidence and technical support for dynamic error compensation of MEMS gyroscopes deployed on low-speed mobile platforms. Full article
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19 pages, 19004 KB  
Article
Symmetrized Dot Patterns and CNN-Based Acoustic Signal Analysis for Fault Diagnosis in Internal Combustion Engines
by Robinson Xavier Rojas Espinoza, Rafael Wilmer Contreras Urgiles and Milton Garcia Tobar
Sensors 2026, 26(15), 4873; https://doi.org/10.3390/s26154873 - 2 Aug 2026
Viewed by 225
Abstract
Early detection of faults in internal combustion engines (ICEs) remains an important challenge for improving operational reliability and supporting condition assessment. Conventional approaches based on On-Board Diagnostics II OBD-II data, vibration, or exhaust gas analysis face practical limitations, motivating the exploration of non-invasive [...] Read more.
Early detection of faults in internal combustion engines (ICEs) remains an important challenge for improving operational reliability and supporting condition assessment. Conventional approaches based on On-Board Diagnostics II OBD-II data, vibration, or exhaust gas analysis face practical limitations, motivating the exploration of non-invasive acoustic diagnostics. This study proposes and validates a pipeline that combines acoustic signals, Symmetrized Dot Pattern (SDP) transformations, and convolutional neural networks (CNNs) to identify injector and ignition failures in multicylinder ICEs. Acoustic measurements were acquired in a purpose-built semi-anechoic chamber using a smartphone equipped with Micro-Electro-Mechanical Systems (MEMS) microphones, ensuring high-signal-to-noise-ratio recordings under controlled fault conditions. A total of 540 independent acoustic recordings were transformed into 540 grayscale SDP images, which were used to train and test a custom CNN architecture. Results demonstrated an overall accuracy of 81.11% in independent verification, with outstanding performance in Spark Plug 3 and Spark Plug 4 (F1 = 1.000), as well as Injector 4 and normal operation (F1 = 0.947). More challenging cases included Injector 1, Injector 3, and Spark Plug 1 (F1 ≈ 0.70–0.78), where spectral overlap led to cross-misclassifications. These findings are consistent with recent studies reporting the robustness of SDP for representing transient acoustic phenomena and the superior classification capability of CNNs for pattern recognition tasks. The study extends SDP applications to internal combustion engines, demonstrating the feasibility of detecting injection and ignition faults using acoustic measurements. The proposed SDP–CNN pipeline represents a non-invasive, low-cost approach to acoustic fault analysis using consumer-grade sensing devices. Future research should focus on expanding datasets, incorporating domain adaptation techniques, and validating performance under real-world operating conditions to improve generalization and support practical acoustic monitoring applications. Full article
(This article belongs to the Section Fault Diagnosis & Sensors)
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12 pages, 449 KB  
Review
Data-Driven Fusion Algorithms for Temperature-Drift Compensation of MEMS Gyroscopes: A Mini Review
by Haoze Lan and Yingjie Xu
Micromachines 2026, 17(8), 924; https://doi.org/10.3390/mi17080924 - 31 Jul 2026
Viewed by 245
Abstract
Microelectromechanical systems (MEMS) gyroscopes are now standard rate sensors in inertial navigation, automotive electronics, industrial automation, and medical instrumentation because they are inexpensive, compact, and readily integrated. Their accuracy, however, degrades with temperature: damping and quadrature coupling change, and readout-electronics behavior shifts, producing [...] Read more.
Microelectromechanical systems (MEMS) gyroscopes are now standard rate sensors in inertial navigation, automotive electronics, industrial automation, and medical instrumentation because they are inexpensive, compact, and readily integrated. Their accuracy, however, degrades with temperature: damping and quadrature coupling change, and readout-electronics behavior shifts, producing temperature-dependent zero-rate-output drift, elevated random noise, and poorer long-term stability. Hardware- and structure-based temperature compensation address part of the problem but carry cost and generality penalties, which has moved recent work toward data-driven software-based temperature-drift compensation. This review focuses on the fusion algorithms that have come to dominate that literature, organized as a four-stage pipeline: signal decomposition, learning-based drift modeling, adaptive filtering, and signal reconstruction. We examine how optimizer-tuned variational mode decomposition and improved empirical-mode-decomposition variants separate temperature-related components from noise; how deep temporal networks and optimizer-coupled learners model the nonlinear, time-lagged drift; and how adaptive Kalman variants and time-frequency filtering reconstruct a stable output. We close by identifying four open problems that recur across the recent gyroscope-specific work—cross-device generalization, temperature hysteresis, embedded real-time deployment, and physics-informed lightweight modeling. Full article
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21 pages, 20472 KB  
Article
An Adaptive-Output Operational Amplifier for Electrostatic Closed-Loop MEMS Gyroscope Drive Circuits
by Xiaoqin Li, Wanting Rong, Diqun Yan, Xiali Han, Shanshan Wang, Wenbo Zhang, Hao Ye and Xiangyu Li
Micromachines 2026, 17(8), 900; https://doi.org/10.3390/mi17080900 - 27 Jul 2026
Viewed by 227
Abstract
To address the challenge that microelectromechanical system (MEMS) gyroscope electrostatic force-modulated closed-loop self-excited driving circuits experience significant dynamic variations in capacitive load and driving demand under different operating conditions, such as start-up, steady-state resonance maintenance, and environmental perturbations, making it difficult to simultaneously [...] Read more.
To address the challenge that microelectromechanical system (MEMS) gyroscope electrostatic force-modulated closed-loop self-excited driving circuits experience significant dynamic variations in capacitive load and driving demand under different operating conditions, such as start-up, steady-state resonance maintenance, and environmental perturbations, making it difficult to simultaneously achieve strong driving capability, stable oscillation, and low power consumption, this paper proposes a high-energy-efficiency adaptive output operational amplifier architecture. Based on a dynamic load-sensing mechanism, the design introduces a three-threshold decision scheme combining a high threshold, a low threshold, and a mid-supply reference voltage. By coordinating a continuous-time voltage detection circuit with a bidirectional shift register, the proposed approach enables accurate identification of the output state and the load level. A time-division-multiplexed two-stage control strategy is adopted to rapidly compensate for the drive capability under abrupt load changes, while proactively disabling redundant output units under steady-state conditions, thereby achieving power delivery on demand. The output stage employs a Class-AB push–pull structure integrating an improved low-leakage single-pole double-throw (SPDT) switch, which hard shuts off the power transistors in the non-operating state to effectively eliminate the subthreshold leakage current. Circuit simulations in a 0.18 μm CMOS process demonstrate that the proposed operational amplifier can adaptively regulate its output current in real time according to variations in the gyroscope driving demand, ensuring sufficient an electrostatic driving force and oscillation stability during transient conditions while significantly reducing static power consumption during the resonance steady state. The proposed design provides an effective solution for high-performance and high-energy-efficiency interface circuit design in MEMS gyroscope electrostatic force-modulated closed-loop self-excited driving systems. Full article
(This article belongs to the Special Issue MEMS Inertial Device, 3rd Edition)
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36 pages, 42013 KB  
Article
Precision and Error Propagation in Static MEMS-IMU Inertial Navigation: A Stochastic Time-Series Analysis
by Mohammad Mahdi Kariminejad, Mohammad Ali Sharifi, Mir Abolfazl Mostafavi and Alireza Amiri-Simkooei
Sensors 2026, 26(15), 4685; https://doi.org/10.3390/s26154685 - 23 Jul 2026
Viewed by 409
Abstract
This paper investigates the precision and stochastic error propagation of navigation solutions obtained from a low-cost microelectromechanical system inertial measurement unit (MEMS-IMU) under static conditions. A modern smartphone equipped with an MEMS-IMU was rigidly mounted at a calibrated fixed location to establish a [...] Read more.
This paper investigates the precision and stochastic error propagation of navigation solutions obtained from a low-cost microelectromechanical system inertial measurement unit (MEMS-IMU) under static conditions. A modern smartphone equipped with an MEMS-IMU was rigidly mounted at a calibrated fixed location to establish a zero-reference scenario, and inertial measurements were collected while the device remained stationary. The dataset was divided into 75 non-overlapping segments, each comprising 30 s of data sampled at 10 Hz, to enable statistically robust analysis. For each segment, velocity and position, which are theoretically zero under static conditions, were computed using strapdown inertial mechanization. A comprehensive statistical framework was then applied to characterize the stochastic behavior of both the raw inertial measurements and the derived navigation states. The methodology first assessed data normality, stationarity using the Augmented Dickey–Fuller (ADF) test, and variance homogeneity using Bartlett’s test. Subsequently, ARIMA models were identified and validated using the Ljung–Box (LB) test, while power spectral density (PSD) analysis provided complementary frequency-domain characterization. In addition, a multivariate, non-negative least squares variance component estimation (NNLS-VCE) method was employed to jointly estimate the variance components of multiple navigation state variables. The results demonstrate that the accelerometer and gyroscope measurements along all three axes are well characterized as stationary white-noise processes, with standard deviations in the order of 102 m/s2 and 104 rad/s, respectively. The estimated velocity random walk (VRW) coefficients are 0.197,0.201,0.160 m/s/h, while the corresponding angular random walk (ARW) coefficients are 0.009,0.012,0.008 rad/h. In contrast, the derived velocity and position estimates exhibit random walk behavior caused by error accumulation in the inertial mechanization process and are best represented by ARIMA(0,1,0) and ARIMA(0,2,0) models, respectively, consistent with the corresponding Allan variance analysis. After 30 s of static navigation, the average standard deviations of the ENU velocity estimates are σv=[0.77,0.44,0.29] m/s, while the corresponding position standard deviations are σp=[1.30,0.69,0.46] m. The proposed framework provides a comprehensive approach for the stochastic modeling, precision assessment, and error characterization of low-cost MEMS-IMU navigation systems. Full article
(This article belongs to the Special Issue Multi-Sensor Technology for Tracking, Positioning and Navigation)
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13 pages, 1867 KB  
Article
Nonlinear Refractive Index of Warm Rubidium Vapor
by Lovre Kardum, Grgur Premec, Neven Šantić and Damir Aumiler
Photonics 2026, 13(7), 672; https://doi.org/10.3390/photonics13070672 - 14 Jul 2026
Viewed by 381
Abstract
The potential to precisely control both the linear and nonlinear index of refraction through optical manipulation of the atomic states has recently pushed warm alkali vapors to the forefront of research in the field of quantum sensors, quantum memories, and quantum fluids of [...] Read more.
The potential to precisely control both the linear and nonlinear index of refraction through optical manipulation of the atomic states has recently pushed warm alkali vapors to the forefront of research in the field of quantum sensors, quantum memories, and quantum fluids of light. Rubidium (Rb) vapor in centimeter-scale glass cells or millimeter-scale micro-electro-mechanical system (MEMS) cells has proven to be a very promising platform for these applications, yet only a handful of research works have been dedicated to the investigation of the (non)linear refractive index of Rb vapor. We present results of theoretical calculations of the (non)linear refractive index of warm Rb vapor, based on the optical Bloch equations for 6-level Rb atoms interacting with a probe laser. They are compared to the experimental results obtained using an interferometric technique, showing very good quantitative agreement. A Kerr nonlinear refractive index n2 of up to 1.2×104 cm2/W is obtained. Python scripts for all theoretical calculations presented in this work are provided, including the refractive index calculation, that can readily be used in practical implementations for simulating the (non)linear refractive index of Rb vapor including the effects of Doppler broadening, transit time broadening, pressure broadening, saturation, optical pumping, and spin-exchange collisions. Full article
(This article belongs to the Section Optoelectronics and Optical Materials)
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8 pages, 1437 KB  
Proceeding Paper
Structural Health Monitoring on Liquid Hydrogen Tanks for Aviation Using MEMS, Shape Memory Alloy Strain Sensor and H2 Leakage Sensors
by Ray Saupe, Andrea Boehm, Roy Buschbeck, Daniel Buelz, Jörn Langenickel, Thomas Oehme, Remi Pantou, Bjoern Senf, Alexey Shaporin, Sven Voigt and Sebastian Weidlich
Eng. Proc. 2026, 133(1), 201; https://doi.org/10.3390/engproc2026133201 - 24 Jun 2026
Viewed by 1187
Abstract
The aviation industry is adopting liquid hydrogen (LH2) for sustainable flight, requiring robust safety systems. This work is an example of adaptation of a Micro-Electro-Mechanical Systems (MEMS)-based structural health monitoring (SHM) system for LH2 tanks, developed in the H2ELIOS project. [...] Read more.
The aviation industry is adopting liquid hydrogen (LH2) for sustainable flight, requiring robust safety systems. This work is an example of adaptation of a Micro-Electro-Mechanical Systems (MEMS)-based structural health monitoring (SHM) system for LH2 tanks, developed in the H2ELIOS project. It uses a multisensor approach that combines MEMS sensors to monitor vibration and acceleration, shape memory alloy (SMA) strain sensors for measuring tank expansion, and hydrogen leakage sensors to prevent false alarms. This SHM technology detects cracks and delamination of material and coating, enabling predictive maintenance via digital twins and ensuring structural integrity. Full article
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19 pages, 38718 KB  
Article
Integrating Seismic Threshold Modelling and Real-Time Monitoring for Landslide Early Warning in Volcanic Slopes
by Iwan Gunawan Tejakusuma, Evensius Bayu Budiman, Euthalia Hanggari Sittadewi, Wira Cakrabuana, Titin Handayani, Zufialdi Zakaria, Hilmi El Hafidz Fatahillah, Michele Daly, Asep Mulyono, Teguh Prayogo, Fardy Septiawan, Muhammad Luthfi Aziz, Imam Santosa and Raden Arif Suryanegara
Eng 2026, 7(6), 296; https://doi.org/10.3390/eng7060296 - 15 Jun 2026
Viewed by 651
Abstract
Earthquake-induced landslides represent a critical threat to transportation infrastructure in tectonically active mountainous regions, particularly in tropical volcanic settings where weak, highly weathered geomaterials dominate. This study develops an integrated framework that directly links physically based seismic threshold modelling with real-time landslide monitoring [...] Read more.
Earthquake-induced landslides represent a critical threat to transportation infrastructure in tectonically active mountainous regions, particularly in tropical volcanic settings where weak, highly weathered geomaterials dominate. This study develops an integrated framework that directly links physically based seismic threshold modelling with real-time landslide monitoring and operational early warning. The approach is demonstrated in the Cugenang area of Cianjur Regency, West Java, Indonesia, which was severely impacted by the moment magnitude (Mw) 5.6 earthquake in 2022. Slopes composed of highly weathered pyroclastic deposits [Plasticity Index (PI) = 54–68%; porosity > 60%] exhibit low shear strength and high sensitivity to seismic loading. Limit equilibrium analysis using the Morgenstern–Price method that combines the influence of seismic loading and groundwater conditions suggests that a horizontal seismic coefficient (kh) of approximately 0.06, corresponding to a Peak Ground Acceleration (PGA) of about 0.12 gravitational acceleration (g), is a critical threshold for initial landsliding. This comparatively low threshold challenges commonly reported values and demonstrates that slope failure in tropical volcanic terrains can occur under moderate ground shaking, reinforcing the need for site-specific hazard characterisation. The derived thresholds are operationalised within a multi-sensor early warning system integrating Micro-Electro-Mechanical Systems (MEMS) accelerometers and inclinometer measurements. Three hazard levels—Normal (<0.06 g), Alert (0.06–0.12 g), and Emergency (≥0.12 g)are combined with deformation thresholds [<10 milimeter (mm), 10–30 mm, >30 mm] to capture progressive failure processes and minimise false alarms. By coupling geotechnical modelling and real-time monitoring, this study provides a transferable and scalable framework for enhancing infrastructure resilience in landslide-prone regions. Full article
(This article belongs to the Section Chemical, Civil and Environmental Engineering)
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27 pages, 3877 KB  
Article
Reliability Assessment of MEMS Gyroscopes via Dual-Mechanism Synergistic Degradation: A Generalized Linear Model with Physics-Informed Wiener Processes
by Pengbin Yang, Zhen Liu, Yuhang Liang, Xinfeng Guo and Hang Geng
Sensors 2026, 26(12), 3774; https://doi.org/10.3390/s26123774 - 12 Jun 2026
Cited by 1 | Viewed by 1269
Abstract
As the core sensor of inertial measurement units, the reliability of Micro-Electro-Mechanical Systems (MEMS) gyroscopes is critical for long-term navigation and motion control applications. To bridge the mechanism-data gap in MEMS multi-mechanism degradation modeling, this paper proposes a physics-informed dual-indicator reliability assessment framework [...] Read more.
As the core sensor of inertial measurement units, the reliability of Micro-Electro-Mechanical Systems (MEMS) gyroscopes is critical for long-term navigation and motion control applications. To bridge the mechanism-data gap in MEMS multi-mechanism degradation modeling, this paper proposes a physics-informed dual-indicator reliability assessment framework based on Wiener processes. Two degradation indicators under consideration are frequency-related degradation caused by stiffness degradation and Q-factor degradation caused by damping degradation, for which corresponding physics-embedded stochastic degradation models are formulated. The two indicators are normalized and fused through a generalized weighted limit state function, where failure is defined as gyroscope-level performance failure. Closed-form reliability expressions are derived for linear limit states, while Monte Carlo simulation is used for nonlinear cases. Reduced-order multiphysics simulation cases, including a double-ended fixed beam and a cantilevered MEMS mass block, are used to demonstrate the mechanism-to-indicator-to-reliability modeling procedure. The results show that the proposed dual-indicator framework provides more balanced reliability assessment than single-indicator analysis under the simulation setting. The proposed method offers an alternative mechanism-informed approach for reliability analysis and lifetime prediction of other MEMS devices. Full article
(This article belongs to the Topic MEMS Sensors and Resonators, 2nd Edition)
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19 pages, 2879 KB  
Article
Reliability-Aware Microsystem Design; Compensation for an Ultra-Low-Power Current-Reuse LC-VCO
by Tayebeh Azadmousavi and Ebrahim Ghafar-Zadeh
Micromachines 2026, 17(6), 713; https://doi.org/10.3390/mi17060713 - 11 Jun 2026
Viewed by 566
Abstract
Aggressive technology scaling has led to a significant increase in manufacturing process variations and transistor aging effects, which critically degrade the performance of radio frequency (RF) circuits. These reliability challenges are particularly pronounced in voltage-controlled oscillators (VCOs), where phase noise and operating frequency [...] Read more.
Aggressive technology scaling has led to a significant increase in manufacturing process variations and transistor aging effects, which critically degrade the performance of radio frequency (RF) circuits. These reliability challenges are particularly pronounced in voltage-controlled oscillators (VCOs), where phase noise and operating frequency stability are compromised. While design strategies incorporating micro-electromechanical systems (MEMS) actuators enhance VCO performance by leveraging MEMS varactors or inductors with substantially higher quality factors (Q), this benefit is progressively undermined over time by process variations and aging-induced shifts in the threshold voltage and carrier mobility of the VCO’s transistors. This work presents an ultra-low-power current-reuse voltage-controlled oscillator (VCO) designed to maintain stable performance under process variability and reliability-induced parameter shifts. Robust operation is achieved using a self-detecting–correcting (SDC) bias scheme that senses performance drift and applies corrective feedback through body-bias control in the VCO core. Analytical relations are derived to describe the impact of threshold voltage and mobility variations, and the approach is validated via post-layout simulations in a 130 nm complementary metal-oxide semiconductor (CMOS). Under 18% variations in threshold voltage and carrier mobility, the proposed SDC scheme preserves oscillation frequency, phase noise, and figure of merit (FoM) while also mitigating the intrinsic output amplitude imbalance of conventional current-reuse VCOs. Monte Carlo analysis (500 runs) demonstrates low sensitivity to fabrication uncertainty, with a standard deviation below 0.14 dBc/Hz for phase noise, 210 kHz for oscillation frequency, and 0.4 dBc/Hz for FoM. The VCO operates from a 0.9 V supply, consumes 175 μW, and achieves −124 dBc/Hz phase noise at 1 MHz offset near 2.4 GHz (FoM ≈ −199 dBc/Hz). Full article
(This article belongs to the Special Issue MEMS Actuators and Their Applications, Second Edition)
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20 pages, 6730 KB  
Article
Design of MEMS Gas Sensors and Integration for Multiple Gas Classification for Lithium-Ion Battery Thermal Runaway Warning
by Haiping Liu, Sen Zhang, Shan Xue, Delong Liu, Zeyu Sun, Lianshi Li, Qi Zhang and Mingzhi Jiao
Materials 2026, 19(11), 2419; https://doi.org/10.3390/ma19112419 - 5 Jun 2026
Viewed by 471
Abstract
Characteristic gas-based detection technology can facilitate the warning of lithium-ion battery thermal runaway with a high accuracy at an early stage. Microelectromechanical system (MEMS) metal–oxide–semiconductor (MOS) gas sensors have advantages of a low cost, a high accuracy, and low power consumption; therefore, they [...] Read more.
Characteristic gas-based detection technology can facilitate the warning of lithium-ion battery thermal runaway with a high accuracy at an early stage. Microelectromechanical system (MEMS) metal–oxide–semiconductor (MOS) gas sensors have advantages of a low cost, a high accuracy, and low power consumption; therefore, they are ideal candidates for the lithium-ion battery thermal-runaway warning. MEMS MOS gas sensors are composed of a micro-hotplate and gas-sensitive materials. The micro-hotplate component strongly influences the device’s mechanical and thermal properties. Initially, we used COMSOL to optimize the micro-hotplate component. Then, we fabricated the device based on the optimal micro-hotplate. Next, gas-sensitive materials made of ZnO and ZnO-Au were deposited on the micro-hotplate by radio-frequency magnetic sputtering. The self-made and commercial MEMS MOS sensors were integrated to form an electronic nose. The as-made electronic nose can classify hydrogen, ethylene, acetylene, methane, carbon monoxide, and ethanol with a maximum accuracy of 99.4% using gas response data acquired over only 20 s. The reported work can provide a solution for an early and accurate lithium-ion battery thermal runaway warning. Full article
(This article belongs to the Special Issue Advanced Thin-Film Technologies for Semiconductor Applications)
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15 pages, 15799 KB  
Article
Synergistic Defect and Phase Boundary Engineering for Large Strain and Superior Low-Field Energy Storage in Bi0.5Na0.5TiO3-Based Relaxors
by Hui Li, Zhongfeng Shang, Xiaojun Ren, Wenfang Li, Shengguo Gao, Tengfei Zhang, Pingyuan Liu, Zongshuai Shao and Yangyang Zhang
Materials 2026, 19(11), 2328; https://doi.org/10.3390/ma19112328 - 1 Jun 2026
Cited by 1 | Viewed by 359
Abstract
The advancement of microelectromechanical systems (MEMS) drives the demand for multifunctional ferroelectrics that synergistically combine substantial strain with competitive energy storage capabilities. In this work, the simultaneous enhancement of electromechanical strain and energy storage properties is achieved in (1−x)(Bi0.5Na [...] Read more.
The advancement of microelectromechanical systems (MEMS) drives the demand for multifunctional ferroelectrics that synergistically combine substantial strain with competitive energy storage capabilities. In this work, the simultaneous enhancement of electromechanical strain and energy storage properties is achieved in (1−x)(Bi0.5Na0.5)0.94Ba0.06(Ti0.98Mn0.02)O3-xSrTiO3 (0 ≤ x ≤ 0.3) ceramics by synergistically employing A-site defect engineering and the nonergodic/ergodic relaxor (NR/ER) phase boundary design. The incorporation of Sr2+ plays a dual role: it induces cationic disorder that expands the polarization difference (ΔP = PmaxPr), thereby effectively boosting the recoverable energy density (Wrec). Concurrently, it stabilizes a critical NR/ER phase ratio near room temperature, which maximizes the strain while minimizing the strain hysteresis. Consequently, when x = 0.15, the optimized system delivers a large strain of 0.45% (d33* = 562 pm/V) with low hysteresis (H = 10.8%). In addition, the x = 0.25 composition exhibits an enhanced Wrec of 1.06 J/cm3, a competitive energy-storage potential (Wrec/E) of 0.013 mC/cm2, and a high efficiency (η) of 81% under 80 kV/cm. This work provides an effective strategy for developing multifunctional lead-free materials for integrated actuators and energy storage devices. Full article
(This article belongs to the Section Materials Physics)
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23 pages, 10226 KB  
Article
Rotor Attitude Estimation for Spherical Motors Using Geometry-Constrained Kalman Transformer Algorithm in Monocular Vision
by Fucong Liu, Baokaidi Tian, Faqiang Wen, Lei Yu, Tianxiang Yu and Min Li
Sensors 2026, 26(10), 3156; https://doi.org/10.3390/s26103156 - 16 May 2026
Viewed by 443
Abstract
Permanent-magnet spherical motors (PMSpMs) possess three-degree-of-freedom omnidirectional motion characteristics, and rotor attitude estimation (RAE) is essential for closed-loop control. This article proposes a visual RAE method for spherical motors using a Kalman filter and geometric constraint Transformer (GK-TransT). An RAE system was equipped [...] Read more.
Permanent-magnet spherical motors (PMSpMs) possess three-degree-of-freedom omnidirectional motion characteristics, and rotor attitude estimation (RAE) is essential for closed-loop control. This article proposes a visual RAE method for spherical motors using a Kalman filter and geometric constraint Transformer (GK-TransT). An RAE system was equipped with a monocular area scan camera with a visual feature component (VFC) mounted on the bottom of the rotor. In the proposed GK-TransT algorithm, the Kalman filter is used to enhance the robustness and accuracy of the TransT tracker. To verify the algorithm, a tracking comparison was conducted among the GK-TransT, original TransT, KCF, and CSRT algorithms. The results indicate that the tracking precisions of the proposed GK-TransT algorithm for the main and auxiliary feature points reach 90.9% and 94.4%, respectively, with an average processing speed of 61.23 FPS and a single-frame latency of 16.33 ms. Considering the tracking precision, real-time performance, and robustness under occlusion and motion blur conditions, the GK-TransT algorithm is more applicable for the RAE of the PMSpM. In addition, an RAE test bench was developed, and the GK-TransT-based method and a micro-electro-mechanical system (MEMS) sensor were compared. The physical ground truth of a hydraulic rotary table was used as the benchmark. The comparison results indicate that the GK-TransT-based method achieves a higher accuracy than the MEMS method. Finally, the practicability of the proposed method is proved. Full article
(This article belongs to the Section Sensors and Robotics)
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