Multiple Silicon Nanowires with Enzymatic Modification for Measuring Glucose Concentration
1
Department of Photonics Engineering, Yuan Ze University, 135, Yuan-Tung Road, Chung-Li 32003, Taiwan
2
Department of Mechanical and Electromechanical Engineering, Tamkang University, New Taipei 25137, Taiwan
*
Author to whom correspondence should be addressed.
†
These authors contributed equally to this work.
Academic Editor: Joost Lötters
Micromachines 2015, 6(8), 1135-1142; https://doi.org/10.3390/mi6081135
Received: 10 July 2015 / Revised: 3 August 2015 / Accepted: 6 August 2015 / Published: 14 August 2015
This study fabricated a multiple poly-Si nanowires sensor through a top-down method and immobilized glucose oxidase on the multiple nanowires for determining glucose concentration. The proposed sensor is 340 nm in width and uses five physically identical and parallel nanowires. The sensor contained nanowires of various lengths (3, 5, and 10 μm). Experimental results showed that sensor sensitivity is inversely proportional to nanowire length. The sensor with 3 μm in nanowire length exhibited a theoretical resolution of 0.003 mg/dL and the highest sensitivity of 0.03 μA/(mg/dL). Furthermore, the proposed sensor retains this performance when reused for up to 10 applications.
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MDPI and ACS Style
Hsu, C.-C.; Liao, Y.-C.; Tsai, Y.-T.; Yeh, H.-I.; Wu, C.-C. Multiple Silicon Nanowires with Enzymatic Modification for Measuring Glucose Concentration. Micromachines 2015, 6, 1135-1142.
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