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Journal: MicromachinesVolume: 17Number: 753
Article: Nonlinear Modeling and Differential-Voltage Control of an Electrostatic MEMS Micromirror for Miniaturized Laser Communication Terminals
- Authors:
- Xuan Wang 1,2,
- Chen Wang 1,2 and
- Junfeng Han 1,2,*
- et al.
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