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Journal: MicromachinesVolume: 11Number: 782
Article: Random Access Addressing of MEMS Electrostatic Shutter Array for Multi-Object Astronomical Spectroscopy
  • Authors:
  • Xufeng Liu1,
  • Takuya Takahashi1 and
  • Masahiro Konishi2
  • et al.
Link: https://www.mdpi.com/2072-666X/11/8/782

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