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Journal: Micromachines, 2020
Volume: 11
Number: 782

Article: Random Access Addressing of MEMS Electrostatic Shutter Array for Multi-Object Astronomical Spectroscopy
Authors: by Xufeng Liu, Takuya Takahashi, Masahiro Konishi, Kentaro Motohara and Hiroshi Toshiyoshi
Link: https://www.mdpi.com/2072-666X/11/8/782

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