Shi, Y.; He, L.; Guang, F.; Li, L.; Xin, Z.; Liu, R.
A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film. Micromachines 2019, 10, 552.
https://doi.org/10.3390/mi10080552
AMA Style
Shi Y, He L, Guang F, Li L, Xin Z, Liu R.
A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film. Micromachines. 2019; 10(8):552.
https://doi.org/10.3390/mi10080552
Chicago/Turabian Style
Shi, Yue, Liang He, Fangcao Guang, Luhai Li, Zhiqing Xin, and Ruping Liu.
2019. "A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film" Micromachines 10, no. 8: 552.
https://doi.org/10.3390/mi10080552
APA Style
Shi, Y., He, L., Guang, F., Li, L., Xin, Z., & Liu, R.
(2019). A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film. Micromachines, 10(8), 552.
https://doi.org/10.3390/mi10080552