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Article

Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System †

1
CEA-LETI Minatec, Université Grenoble-Alpes, F-38000 Grenoble, France
2
Institut des Nanotechnologies de Lyon, UMR CNRS 5270 Ecole Centrale de Lyon, Université de Lyon, F-69134 Ecully, France
3
FEMTOprint, CH-6933 Muzzano, Switzerland
*
Author to whom correspondence should be addressed.
This manuscript is extension version of the conference paper: Jobert, G.; Fournier, M.; Boutami, S.; Jamois, C.; Lovera, A.; Braga, D.; Seassal, C. Millimeter-Sized Particle Sensor Using a Wide Field of View Monolithic Lens Assembly for Light Scattering Analysis in Fourier Domain. In Proceedings of the Photonic Instrumentation Engineering VII; Soskind, Y., Busse, L.E., Eds.; SPIE: San Francisco, CA, USA, 2020; p. 24.
Academic Editor: Stefan Hippler
Sensors 2021, 21(9), 3181; https://doi.org/10.3390/s21093181
Received: 11 March 2021 / Revised: 7 April 2021 / Accepted: 28 April 2021 / Published: 3 May 2021
(This article belongs to the Section Optical Sensors)
Our latest advances in the field of miniaturized optical PM sensors are presented. This sensor combines a hybrid fluidic-optronic CMOS (holed retina) that is able to record a specific irradiance pattern scattered by an illuminated particle (scattering signature), while enabling the circulation of particles toward the sensing area. The holed retina is optically coupled with a monolithic, millimeter-sized, refracto-reflective optical system. The latter notably performs an optical pre-processing of signatures, with a very wide field of view of scattering angles. This improves the sensitivity of the sensors, and simplifies image processing. We report the precise design methodology for such a sensor, as well as its fabrication and characterization using calibrated polystyrene beads. Finally, we discuss its ability to characterize particles and its potential for further miniaturization and integration. View Full-Text
Keywords: air quality; particulate matter sensor; light-scattering; CMOS image sensor; miniature optics; micro-fabrication air quality; particulate matter sensor; light-scattering; CMOS image sensor; miniature optics; micro-fabrication
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MDPI and ACS Style

Jobert, G.; Barritault, P.; Fournier, M.; Monpeurt, C.; Boutami, S.; Jamois, C.; Bernasconi, P.; Lovera, A.; Braga, D.; Seassal, C. Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System. Sensors 2021, 21, 3181. https://doi.org/10.3390/s21093181

AMA Style

Jobert G, Barritault P, Fournier M, Monpeurt C, Boutami S, Jamois C, Bernasconi P, Lovera A, Braga D, Seassal C. Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System. Sensors. 2021; 21(9):3181. https://doi.org/10.3390/s21093181

Chicago/Turabian Style

Jobert, Gabriel, Pierre Barritault, Maryse Fournier, Cyrielle Monpeurt, Salim Boutami, Cécile Jamois, Pietro Bernasconi, Andrea Lovera, Daniele Braga, and Christian Seassal. 2021. "Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System" Sensors 21, no. 9: 3181. https://doi.org/10.3390/s21093181

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