Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System

This manuscript is extension version of the conference paper: Jobert, G.; Fournier, M.; Boutami, S.; Jamois, C.; Lovera, A.; Braga, D.; Seassal, C. Millimeter-Sized Particle Sensor Using a Wide Field of View Monolithic Lens Assembly for Light Scattering Analysis in Fourier Domain. In Proceedings of the Photonic Instrumentation Engineering VII; Soskind, Y., Busse, L.E., Eds.; SPIE: San Francisco, CA, USA, 2020; p. 24.

Academic Editor: Stefan Hippler

Sensors 2021, 21(9), 3181; https://doi.org/10.3390/s21093181

Received: 11 March 2021 / Revised: 7 April 2021 / Accepted: 28 April 2021 / Published: 3 May 2021

(This article belongs to the Section Optical Sensors)

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Abstract

Our latest advances in the field of miniaturized optical PM sensors are presented. This sensor combines a hybrid fluidic-optronic CMOS (holed retina) that is able to record a specific irradiance pattern scattered by an illuminated particle (scattering signature), while enabling the circulation of particles toward the sensing area. The holed retina is optically coupled with a monolithic, millimeter-sized, refracto-reflective optical system. The latter notably performs an optical pre-processing of signatures, with a very wide field of view of scattering angles. This improves the sensitivity of the sensors, and simplifies image processing. We report the precise design methodology for such a sensor, as well as its fabrication and characterization using calibrated polystyrene beads. Finally, we discuss its ability to characterize particles and its potential for further miniaturization and integration. View Full-Text

Keywords: air quality; particulate matter sensor; light-scattering; CMOS image sensor; miniature optics; micro-fabrication

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MDPI and ACS Style

Jobert, G.; Barritault, P.; Fournier, M.; Monpeurt, C.; Boutami, S.; Jamois, C.; Bernasconi, P.; Lovera, A.; Braga, D.; Seassal, C. Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System. Sensors 2021, 21, 3181. https://doi.org/10.3390/s21093181

AMA Style

Jobert G, Barritault P, Fournier M, Monpeurt C, Boutami S, Jamois C, Bernasconi P, Lovera A, Braga D, Seassal C. Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System. Sensors. 2021; 21(9):3181. https://doi.org/10.3390/s21093181

Chicago/Turabian Style

Jobert, Gabriel; Barritault, Pierre; Fournier, Maryse; Monpeurt, Cyrielle; Boutami, Salim; Jamois, Cécile; Bernasconi, Pietro; Lovera, Andrea; Braga, Daniele; Seassal, Christian. 2021. "Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System" Sensors 21, no. 9: 3181. https://doi.org/10.3390/s21093181

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Author Biographies

Gabriel Jobert

Gabriel Jobert received the Engineering degree and the MSc degree in Photonics & Microelectronics from Grenoble Institute of Technology and University Grenoble-Alpes, in 2017. He previously worked on 'in-vivo' laser-scanning imaging systems at the Interdisciplinary Laboratory of Physics (CNRS) and on optronic characterizations on cooled HdCdTe infrared image sensors at Sofradir (now Lynred). He is currently working at CEA-Leti and Institut des Nanotechnologies de Lyon (INL) as a PhD student where he develops miniature optical environmental sensors.

Pierre Barritault

Pierre Barritault is an engineer in photonics at CEA-Leti. He graduated from the Institut d'Optique Graduate School (Paris Tech) in 1998. From 1999 to 2002, he prepared a thesis in a laboratory specialised in optical thin films coating (CEA Grenoble, France). This thesis, which was defended in October 2002, dealt with the theoretical and experimental study of the fluorescence of surface-bound molecules. For the past eight years, he has been working in the field of infrared gas sensors, on the design and development of NDIR gas sensors and also on the characterisation of QCL based gas sensors. For the past two years, he has developed and characterized a new type of Particulate Matter Sensors based on imaging of scattered light by a drilled imager.

Maryse Fournier

Maryse Fournier received the Graduation degree from the Conservatoire National des Arts et Metiers, Grenoble, France, in 1993. She worked for 10 years at Sofradir (now Lynred) company where she was in charge of the flip-chip assembly of cooled infrared focal planes. In 2000, she joined CEA-Leti to develop processes and electro-optical characterizations of advanced infrared detectors. From 2010 to 2015, she has been working in the 200 mm CMOS foundry to develop Silicon Photonics devices for data and telecoms applications. She is currently a project coordinator and a process integration manager to develop sensors devices, as PM, chemical, bio-photonics, sensors for spectroscopic or life science applications.

Salim Boutami

Salim Boutami received his Engineering and PhD degrees in electrical engineering from the Ecole Centrale de Lyon, France, in 2004 and 2007 respectively. Since 2007, he has been a researcher at the Optronics Division of CEA-Leti, Grenoble, France, working on computational electromagnetism for photonics design. In 2017-2018, he was a visiting scholar in Professor Shanhui Fan's group at Stanford University. He has authored and co-authored about 40 articles in peer-reviewed journals, filed about 85 patents, and written one book. He was acknowledged in both 2016 and 2017 as 1st inventor of CEA, France.

Pietro Bernasconi

Pietro Bernasconi received his PhD in Physics from the Institute of Quantum Electronics at the Swiss Federal Institute of Technology in Zurich in 1998. He then joined the Bell Laboratories (USA) as a research scientist in the Photonics Integration Group and later in the Photonics Networking Group where he developed and investigated photonics integrated circuits (PICs) for telecom and datacom transmission systems. In 2012, he returned to Switzerland as an R&D engineer at Diamond focusing his activities on opto-mechanical interfaces for components based upon specialty fibers. In 2018 Pietro joined the R&D group of FEMTOprint where he is currently developing optical processes for the manufacturing of micro-optical, micro-fluidic and micro-mechanical devices.

Christian Seassal

Christian Seassal is Research Director at CNRS. He graduated from Insitut National des Sciences Appliquées de Lyon, France, in 1993, and received the PhD Degree in Condensed Matter in 1997 from Ecole Centrale de Lyon, France. He joined the CNRS in 1998, and he is now the head of the i-Lum (Light Engineering and Conversion) research team. He has been Deputy Director of INL (2010-2020) and Associate Editor and then Deputy Editor to Optics Express and Editor of its Energy Express supplement (2010-2020). His research activities have concerned Micro-Opto-Electro-Mechanical Systems (MOEMS) based on III-V compound semiconductors. His current research interest focus on photonic crystals and nanostructures for integrated photonics and solar energy. He is the author and co-author of approximately 130 papers in international journals, 70 invited conferences. He recieved the CNRS bronze medal in 2002.

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Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System^†