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Article

Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel

1
Institute for Semiconductor Technology and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Hans-Sommer-Str. 66/Langer Kamp 6a, 38106 Braunschweig, Germany
2
Fraunhofer Wilhelm-Klauditz-Institut (WKI), Bienroder Weg 54E, 38106 Braunschweig, Germany
*
Author to whom correspondence should be addressed.
Academic Editor: George Amarandei
Sensors 2021, 21(11), 3731; https://doi.org/10.3390/s21113731
Received: 12 May 2021 / Revised: 21 May 2021 / Accepted: 24 May 2021 / Published: 27 May 2021
(This article belongs to the Special Issue Advances in Cantilever Sensors)
To monitor airborne nano-sized particles (NPs), a single-chip differential mobility particle sizer (DMPS) based on resonant micro cantilevers in defined micro-fluidic channels (µFCs) is introduced. A size bin of the positive-charged fraction of particles herein is separated from the air stream by aligning their trajectories onto the cantilever under the action of a perpendicular electrostatic field of variable strength. We use previously described µFCs and piezoresistive micro cantilevers (PMCs) of 16 ng mass fabricated using micro electro mechanical system (MEMS) technology, which offer a limit of detection of captured particle mass of 0.26 pg and a minimum detectable particulate mass concentration in air of 0.75 µg/m3. Mobility sizing in 4 bins of a nebulized carbon aerosol NPs is demonstrated based on finite element modelling (FEM) combined with a-priori knowledge of particle charge state. Good agreement of better than 14% of mass concentration is observed in a chamber test for the novel MEMS-DMPS vs. a simultaneously operated standard fast mobility particle sizer (FMPS) as reference instrument. Refreshing of polluted cantilevers is feasible without de-mounting the sensor chip from its package by multiply purging them alternately in acetone steam and clean air. View Full-Text
Keywords: differential mobility particle sizer; micro electro mechanical system; micro-fluidic channel; piezoresistive micro cantilever; picogram balance; ultrafine particles; carbon aerosol differential mobility particle sizer; micro electro mechanical system; micro-fluidic channel; piezoresistive micro cantilever; picogram balance; ultrafine particles; carbon aerosol
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MDPI and ACS Style

Bertke, M.; Kirsch, I.; Uhde, E.; Peiner, E. Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel. Sensors 2021, 21, 3731. https://doi.org/10.3390/s21113731

AMA Style

Bertke M, Kirsch I, Uhde E, Peiner E. Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel. Sensors. 2021; 21(11):3731. https://doi.org/10.3390/s21113731

Chicago/Turabian Style

Bertke, Maik, Ina Kirsch, Erik Uhde, and Erwin Peiner. 2021. "Ultrafine Aerosol Particle Sizer Based on Piezoresistive Microcantilever Resonators with Integrated Air-Flow Channel" Sensors 21, no. 11: 3731. https://doi.org/10.3390/s21113731

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