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Open AccessFeature PaperReview

Towards Integrated Mid-Infrared Gas Sensors

by Daniel Popa 1,* and Florin Udrea 1,2
Department of Engineering, University of Cambridge, Cambridge CB3 0FA, UK
ams Sensors UK Limited, Cambridge CB4 0DL, UK
Author to whom correspondence should be addressed.
Sensors 2019, 19(9), 2076;
Received: 2 April 2019 / Revised: 30 April 2019 / Accepted: 1 May 2019 / Published: 4 May 2019
(This article belongs to the Special Issue Semiconductor and CMOS-Based Sensors for Environmental Monitoring)
Optical gas sensors play an increasingly important role in many applications. Sensing techniques based on mid-infrared absorption spectroscopy offer excellent stability, selectivity and sensitivity, for numerous possibilities expected for sensors integrated into mobile and wearable devices. Here we review recent progress towards the miniaturization and integration of optical gas sensors, with a focus on low-cost and low-power consumption devices. View Full-Text
Keywords: gas sensors; mid-infrared; integrated sensors; MEMS; CMOS gas sensors; mid-infrared; integrated sensors; MEMS; CMOS
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Popa, D.; Udrea, F. Towards Integrated Mid-Infrared Gas Sensors. Sensors 2019, 19, 2076.

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