Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics
Center for Biomolecular Nanotechnologies @UNILE, Istituto Italiano di Tecnologia (IIT), Arnesano (LE) 73010, Italy
Dipartimento di Ingegneria dell’Innovazione, Università del Salento, Lecce 73100, Italy
Faculty of Technology and Bionics, Rhine-Waal University of Applied Sciences Kleve 47533, Germany
Authors to whom correspondence should be addressed.
These authors contributed equally to this work.
Academic Editor: Vittorio M. N. Passaro
Received: 14 March 2017 / Revised: 1 May 2017 / Accepted: 5 May 2017 / Published: 10 May 2017
PDF [5530 KB, uploaded 23 May 2017]
The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for the microfabrication of a class of flexible micro-electro-mechanical systems. The approach exploits the material stress differences among the constituent layers of nitride-based (AlN/Mo, Si
/Si and AlN/polyimide) mechanical elements in order to create microstructures, such as upwardly-bent cantilever beams and bowed circular membranes. Piezoresistive properties of nichrome strain gauges and direct piezoelectric properties of aluminum nitride can be exploited for mechanical strain/stress detection. Applications in flow and tactile sensing for robotics are described.
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Abels, C.; Mastronardi, V.M.; Guido, F.; Dattoma, T.; Qualtieri, A.; Megill, W.M.; De Vittorio, M.; Rizzi, F. Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics. Sensors 2017, 17, 1080.
Abels C, Mastronardi VM, Guido F, Dattoma T, Qualtieri A, Megill WM, De Vittorio M, Rizzi F. Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics. Sensors. 2017; 17(5):1080.
Abels, Claudio; Mastronardi, Vincenzo M.; Guido, Francesco; Dattoma, Tommaso; Qualtieri, Antonio; Megill, William M.; De Vittorio, Massimo; Rizzi, Francesco. 2017. "Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics." Sensors 17, no. 5: 1080.
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