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Keywords = surface acoustic wave resonators

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21 pages, 2762 KB  
Article
Exploring Surface Acoustic Waves (SAWs) for Water Quality Sensor’s Anti-Biofouling Application: A New Direction for Acoustic Waves
by Asma Akther, Tim Malthus, Anusuya Willis, Régine Chantler, Stephen Gensemer, Hendrik Falk, Hanne Stang, Charlottle Farnworth and Anu Kumar
Sensors 2026, 26(11), 3480; https://doi.org/10.3390/s26113480 - 1 Jun 2026
Viewed by 310
Abstract
Biofouling presents numerous challenges across various sectors, including aquaculture, agriculture, infrastructure, and medicine. The development of anti-biofouling techniques remains a significant challenge. In the water industry, biofouling on monitoring sensors substantially compromises the accuracy of measurements by interfering with the sensors’ measuring ability. [...] Read more.
Biofouling presents numerous challenges across various sectors, including aquaculture, agriculture, infrastructure, and medicine. The development of anti-biofouling techniques remains a significant challenge. In the water industry, biofouling on monitoring sensors substantially compromises the accuracy of measurements by interfering with the sensors’ measuring ability. Biofouling also significantly increases the running costs by increasing the frequency of maintenance needed to keep sensors clean and accurate. Consequently, anti-biofouling techniques are widely employed to clean in situ optical sensors, ensuring accurate measurements while minimizing overall system costs. The conventional approach for preventing biofouling from in situ sensors typically involves the application of coatings, mechanical brushes, ultraviolet radiation, and ultrasonic waves, which possess distinct advantages and disadvantages contingent upon their application. The challenges associated with protecting the small windows of water quality sensors from biofouling over extended periods using current methods are either expensive or adversely affect the integrity of monitoring data. This study introduces a low-cost centimeter-scale high-frequency surface acoustic wave (SAW) device to protect the small windows of in situ water quality sensors continuously from biofouling, functioning as an auxiliary anti-biofouling mechanism. This study found that this 16 MHz SAW device can mitigate the formation of biofilms by adhesive diatom strains CS-1664, CS-1665, and by planktonic algae CS-327 by approximately 98% in comparison to control conditions, functioning effectively as an anti-biofouling tool for itself and surrounding surfaces without adversely affecting aquatic organisms. The dimension and resonance frequency (RF) of the SAW device are also capable of being fabricated according to the area requiring cleaning. A miniaturized 16 MHz SAW device can sustain operation for prolonged periods up to a couple of months without maintenance, at a low cost and power consumption, providing a new anti-biofouling technology. This methodology aims to assist the Australian inland and coastal water quality monitoring system by reducing maintenance costs while simultaneously enhancing the longevity of sensors submerged in water for extended periods. Full article
(This article belongs to the Section State-of-the-Art Sensors Technologies)
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17 pages, 1928 KB  
Article
C-Axis Oriented LiNbO3 Thin Film Grown by Chemical Beam Epitaxy for Surface Acoustic Wave Device Applications
by Nikolay Smagin, Thanh Ngoc Kim Bui, Zakariae Oumekloul, Rahma Moalla, William Maudez, Estelle Wagner, Marc Duquennoy, Rayen Kalai Mathlouthi, Yves Deblock, Hatem Dahmani, Denis Remiens, Julien Carlier and Giacomo Benvenuti
Sensors 2026, 26(9), 2858; https://doi.org/10.3390/s26092858 - 2 May 2026
Viewed by 1921
Abstract
High-frequency surface acoustic wave (SAW) devices require piezoelectric thin films combining strong electromechanical coupling, high acoustic velocity, and compatibility with scalable fabrication. Lithium niobate (LiNbO3) is a promising material, but the growth of high-quality thin films remains challenging because of lithium [...] Read more.
High-frequency surface acoustic wave (SAW) devices require piezoelectric thin films combining strong electromechanical coupling, high acoustic velocity, and compatibility with scalable fabrication. Lithium niobate (LiNbO3) is a promising material, but the growth of high-quality thin films remains challenging because of lithium volatility and process-control issues. In this work, chemical beam epitaxy (CBE) was investigated as an alternative route for the deposition of c-axis-oriented LiNbO3 thin films on C-plane sapphire at a relatively low growth temperature of 400 °C. Structural characterization confirmed high crystalline quality, with clear (006) and (0012) XRD reflections and a rocking-curve full width at half maximum of 0.04°. To evaluate acoustic performance, a SAW delay line and a one-port resonator were fabricated on 350 nm thick films using e-beam lithography. The devices operated in the 1–3 GHz range and exhibited electromechanical coupling factors of about 0.3% for the Rayleigh mode at 1.7 GHz and 3% for the Sezawa mode at 2.75 GHz. Propagation velocities ranged from 5094 to 8250 m/s, and the Rayleigh-mode resonator quality factor reached about 500. These results demonstrate the feasibility of CBE-grown LiNbO3 films for SAW device applications. Full article
(This article belongs to the Special Issue Smart Sensors Based on Optoelectronic and Piezoelectric Materials)
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30 pages, 11140 KB  
Review
Acoustofluidic Biosensors
by Chun-Jui Chen, Jae-Sung Kwon and Han-Sheng Chuang
Micromachines 2026, 17(5), 561; https://doi.org/10.3390/mi17050561 - 30 Apr 2026
Viewed by 492
Abstract
The rapid and precise detection of biomarkers and pathogens remains a critical challenge in clinical diagnostics. Traditional methodologies are frequently hindered by protracted workflows, complex sample preparation, and reliance on resource-intensive instrumentation. Acoustofluidics—the synergistic integration of acoustics and microfluidics—has emerged as a transformative [...] Read more.
The rapid and precise detection of biomarkers and pathogens remains a critical challenge in clinical diagnostics. Traditional methodologies are frequently hindered by protracted workflows, complex sample preparation, and reliance on resource-intensive instrumentation. Acoustofluidics—the synergistic integration of acoustics and microfluidics—has emerged as a transformative solution for point-of-care testing (POCT). Bulk acoustic wave (BAW) and surface acoustic wave (SAW) technologies enable the contactless, label-free, and biocompatible manipulation of bioparticles across micro- and nanometer scales. This review critically examines recent advancements in BAW- and SAW-based acoustofluidic biosensors. We elucidate the fundamental principles governing distinct acoustic modes—including Quartz Crystal Microbalance (QCM), film bulk acoustic resonator (FBAR), and Solidly Mounted Resonator (SMR) for BAW and Rayleigh and Love waves for SAW—and evaluate their specific roles in liquid-phase sensing, particle sorting, and cellular focusing. Results show that integrating on-chip sample preparation accelerates diagnostic workflows, reducing assay times to under 10 min. Coupling acoustic manipulation with optical, mass-based, or electrochemical modalities effectively overcomes fundamental diffusion limits, achieving ultrasensitive, multimodal detection. We address translational challenges—acoustothermal heating, biofouling, and scalable integration. Following a discussion of clinical applications in oncology and infectious diseases, we map emerging trajectories, emphasizing AI-driven intelligent microfluidics, modular architectures, and flexible wearable platforms that will ultimately democratize continuous precision diagnostics. Full article
(This article belongs to the Special Issue Point-of-Care Testing Based on Biosensors and Biomimetic Sensors)
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36 pages, 38341 KB  
Review
Surface Acoustic Wave Devices: New Mechanisms, Enabling Techniques, and Application Frontiers
by Hongsheng Xu, Xiangyu Liu, Weihao Ye, Xiangyu Zeng, Akeel Qadir and Jinkai Chen
Micromachines 2026, 17(4), 494; https://doi.org/10.3390/mi17040494 - 17 Apr 2026
Viewed by 671
Abstract
Surface Acoustic Wave (SAW) technology, long central to analog signal processing and RF filtering, is undergoing a major renewal. Driven by advances that decouple SAWs from traditional piezoelectric materials and fixed-function devices, the field is gaining unprecedented control over acoustic, optical, and electronic [...] Read more.
Surface Acoustic Wave (SAW) technology, long central to analog signal processing and RF filtering, is undergoing a major renewal. Driven by advances that decouple SAWs from traditional piezoelectric materials and fixed-function devices, the field is gaining unprecedented control over acoustic, optical, and electronic interactions at the micro and nanoscale. This review synthesizes these developments across four fronts: new physical mechanisms for SAW manipulation, emerging material platforms, ranging from thin films to 2D systems, along with reconfigurable device architectures and circuits, and the expanding landscape of applications they enable. Optical methods are reshaping how SAWs are generated and controlled, bypassing the limits of conventional electromechanical coupling. Coherent optical excitation of high-Q SAW cavities via Brillouin-like optomechanical interactions now grants access to modes in non-piezoelectric substrates such as diamond and silicon, while on-chip SAW excitation in photonic waveguides through backward stimulated Brillouin scattering opens new integrated sensing routes. In parallel, magneto-acoustic experiments have revealed nonreciprocal SAW diffraction from resonant scattering in magnetoelastic gratings. On the device side, ZnO thin-film transistors integrated on LiNbO3 exploit acoustoelectric coupling to realize voltage-tunable phase shifters; UHF Z-shaped delay lines achieve high sensitivity in a compact footprint; and parametric synthesis of wideband, multi-stage lattice filters targets 5G-class performance. Atomistic simulations show that SAW propagation in 2D MXene films can be engineered via surface terminations, while aerosol jet printing and SAW-assisted particle patterning provide agile, cleanroom-light fabrication of microfluidic and magnetic components. These advances enable applications ranging from hybrid quantum systems and quantum links to lab-on-a-chip particle control, SBS-based and UHF sensing, reconfigurable RF front-ends, and soft robotic actuators based on patterned magnetic composites. At the same time, optical techniques offer non-contact probes of dissipation, and MXenes and other emerging materials open new regimes of acoustic control. Conclusively, they are transforming SAW technology into a versatile, programmable platform for mediating complex interactions in next-generation electronic, photonic, and quantum systems. Full article
(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Devices, 2nd Edition)
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12 pages, 1615 KB  
Article
Plasma Regeneration of Microparticle-Structured Surface Acoustic Wave Resonators for Use as Biosensors
by Noreen Schöck, Maximilian Mann, Annika Pirker, Achim Voigt and Kerstin Länge
Coatings 2026, 16(3), 283; https://doi.org/10.3390/coatings16030283 - 27 Feb 2026
Viewed by 503
Abstract
Plasma regeneration was investigated as a means of regenerating microstructures on biosensors for repeated use. These microstructures were based on the deposition of suspensions containing polymer microspheres. While this method provides a simple way to structure surfaces, obtaining regular structures in a reproducible [...] Read more.
Plasma regeneration was investigated as a means of regenerating microstructures on biosensors for repeated use. These microstructures were based on the deposition of suspensions containing polymer microspheres. While this method provides a simple way to structure surfaces, obtaining regular structures in a reproducible way remains a challenge. Therefore, it would be advantageous to be able to reuse regular structures, which requires regeneration. To investigate this concept, surface acoustic wave (SAW) resonators were structured using 5 µm and 20 µm polystyrene microspheres and coated with parylene C to stabilize the particle structures. After use in bioanalytical experiments, the biological residues and the parylene C cover layer were removed with plasma, and a new parylene C layer was added. Both atmospheric and low-pressure plasma were tested for regeneration. As a result, the low-pressure plasma was to be preferred because it did not damage the transducer structures on the SAW resonators, unlike the atmospheric plasma. Water contact angle measurements and transmission spectra recorded with a network analyzer confirmed that freshly prepared and regenerated structured SAW resonators coated with parylene C exhibited similar wetting properties and resonance parameters. Therefore, plasma regeneration is an effective way to enable the reuse of perfectly structured SAW resonators. Full article
(This article belongs to the Special Issue Advances in Surface and Coatings Technologies)
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17 pages, 1650 KB  
Article
Inductor-Based Biosensors for Real-Time Monitoring in the Liquid Phase
by Miriam Hernandez, Patricia Noguera, Nuria Pastor-Navarro, Marcos Cantero-García, Rafael Masot-Peris, Miguel Alcañiz-Fillol and David Gimenez-Romero
Biosensors 2026, 16(2), 79; https://doi.org/10.3390/bios16020079 - 28 Jan 2026
Viewed by 908
Abstract
Current liquid-phase resonant biosensors, such as Quartz Crystal Microbalance, Surface Acoustic Wave, or Surface Plasmon Resonance, typically rely on specialized piezoelectric substrates or complex optical setups. These requirements often necessitate cleanroom fabrication, thereby limiting cost-effective scalability. This study presents a high-integration sensing platform [...] Read more.
Current liquid-phase resonant biosensors, such as Quartz Crystal Microbalance, Surface Acoustic Wave, or Surface Plasmon Resonance, typically rely on specialized piezoelectric substrates or complex optical setups. These requirements often necessitate cleanroom fabrication, thereby limiting cost-effective scalability. This study presents a high-integration sensing platform based on standard Printed Circuit Board (PCB) technology, incorporating an embedded inductor within a fluidic system for real-time monitoring. This design leverages industrial manufacturing standards to achieve a compact, low-cost, and scalable architecture. Detection is governed by shifts in the resonance frequency of an LC tank circuit; specifically, increases in bulk ionic strength induce a frequency decrease, whereas biomolecular adsorption at the sensor surface leads to a frequency increase. This phenomenon can be explained by the modulation of the inter-turn capacitance, which is modeled as a combination of capacitive elements accounting for contributions from the bulk electrolyte and the surface-bound dielectric layer. Such divergent responses provide an intrinsic self-discriminating capability, allowing for the analytical differentiation between surface interactions and bulk effects. To the best of our knowledge, this is the first demonstration of an inductor-based resonant sensor fully embedded in a PCB fluidic architecture for continuous liquid-phase analyte monitoring. Validated through a protein-antibody model (Bovine Serum Albumin-anti-Bovine Serum Albumin), the sensor demonstrated a limit of detection of 1.7 ppm (0.026 mM) and a linear dynamic range of 31–211 ppm (0.47–3.2 mM). These performance metrics, combined with a reproducibility of 4 ± 3%, indicate that the platform meets the requirements for robust analytical applications. Its inherent simplicity and potential for miniaturization position this technology as a viable candidate for point-of-care diagnostics in diverse environments. Full article
(This article belongs to the Section Biosensor and Bioelectronic Devices)
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11 pages, 2977 KB  
Article
Langasite (LGS) Surface Acoustic Wave (SAW) Pressure Sensor with Kovar Alloy Point-Force Packaging for High-Temperature Environments
by Yabing Ke, Ruoyu Zhang, Chen Fu, Jingting Luo, Zhengxi He and Zhiguang Deng
Sensors 2026, 26(2), 567; https://doi.org/10.3390/s26020567 - 14 Jan 2026
Cited by 1 | Viewed by 717
Abstract
Langasite (LGS)-based surface acoustic wave (SAW) sensors are promising for high-temperature pressure detection. However, their performance is limited by the low pressure sensitivity of conventional sealed-cavity packaging and temperature-induced measurement drift. To address these issues, this study introduces a novel LGS SAW pressure [...] Read more.
Langasite (LGS)-based surface acoustic wave (SAW) sensors are promising for high-temperature pressure detection. However, their performance is limited by the low pressure sensitivity of conventional sealed-cavity packaging and temperature-induced measurement drift. To address these issues, this study introduces a novel LGS SAW pressure sensor featuring two key innovations: a Kovar alloy point-force packaging structure to amplify pressure-induced LGS substrate deformation, enhancing sensitivity compared to traditional designs, and SAW resonators fabricated on an LGS (0°, 138.5°, 26.7°) cut, selected based on electromechanical simulations for its superior intrinsic pressure sensitivity and monotonic frequency–temperature response, effectively mitigating temperature interference on pressure measurements. Experimental characterizations show the resonator achieves a high Q-value of ~3000 at ~357 MHz. Tested under conditions of 250 °C and 0–0.4 MPa, the sensor exhibits a pressure sensitivity of 0.1866 MHz/MPa with a relative error of only 4.8% versus the finite element method (FEM)-simulated 0.196 MHz/MPa, demonstrating the proposed design’s effectiveness for accurate, stable pressure monitoring in harsh high-temperature environments such as turbine engines and high-temperature manufacturing lines. Full article
(This article belongs to the Special Issue Exploring the Sensing Potential of Acoustic Wave Devices)
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15 pages, 3223 KB  
Article
First Clinical Description of Coagulation of Whole Blood with Resonant Acoustic Rheometry
by Connor M. Bunch, Weiping Li, Kiera Downey, Timothy L. Hall, Allen Chehimi, Samuel J. Thomas, Afsheen Mansoori, Miguel Velasco, Marie N. Karam, Jenny Chen, Jacob Tuttle, Matthew R. Walsh, Scott G. Thomas, Mark M. Walsh, Joseph B. Miller, Jan P. Stegemann and Cheri X. Deng
Diagnostics 2026, 16(1), 47; https://doi.org/10.3390/diagnostics16010047 - 23 Dec 2025
Viewed by 1365
Abstract
Background/Objectives: The timely evaluation of blood clot formation and breakdown is essential in the care of patients with severe bleeding or critical illness. Resonant acoustic rheometry is a novel, non-contact ultrasound method that measures changes in the viscoelastic properties of blood in [...] Read more.
Background/Objectives: The timely evaluation of blood clot formation and breakdown is essential in the care of patients with severe bleeding or critical illness. Resonant acoustic rheometry is a novel, non-contact ultrasound method that measures changes in the viscoelastic properties of blood in a standard microplate format. Here, we present the first clinical description of whole blood coagulation and fibrinolysis assessed with resonant acoustic rheometry, with paired thromboelastography measurements for comparison. Methods: In this retrospective analysis, whole blood samples from three critically ill patients were divided and tested under four different conditions that included a control mixture, kaolin activation, tissue factor activation, and a tissue factor mixture supplemented with tissue plasminogen activator. The resonant acoustic rheometry system obtained real time measurements of resonant surface waves and displacements from the samples. Heat maps and spectrograms of the resonant surface waves were analyzed to determine the onset of clotting, the rate of viscoelastic stiffening, the time to maximum rigidity, and the onset as well as magnitude of fibrinolysis. These measurements were compared with thromboelastography reaction time, clot strength, fibrinogen contribution, and lysis values. Results: Resonant acoustic rheometry detected reproducible transitions from liquid to clot and from clot to lysis in all samples. Activator-dependent changes in clot initiation and propagation matched the expected hierarchy observed in thromboelastography. Significantly, samples exposed to tissue plasminogen activator demonstrated a clear fall in resonant frequency and a corresponding rise in surface displacement that reflected fibrinolysis. The technique also reproduced clinically meaningful patterns of hemostasis that aligned with each patient’s underlying disease. Conclusions: Whole blood clotting can be measured with resonant acoustic rheometry in a manner that aligns with established clinical assays. These results suggest strong potential for future use of resonant acoustic rheometry as a cost-effective, complementary platform for rapid, scalable, and clinically informative hemostatic assessment. Full article
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19 pages, 7895 KB  
Article
Langmuir and Langmuir–Blodgett Monolayers from 20 nm Sized Crystals of the Metal–Organic Framework MIL-101(Cr)
by Asen Dimov, George R. Ivanov, Leonard Keil, Andreas Terfort, Jinxuan Liu and Velichka Strijkova
Coatings 2025, 15(12), 1449; https://doi.org/10.3390/coatings15121449 - 8 Dec 2025
Cited by 1 | Viewed by 1227
Abstract
Metal–Organic Frameworks (MOFs) have diverse applications due to their tunable porosity, large surface area, and diverse chemical functionalities. Among them, one of the most researched MOFs is MIL-101(Cr), which, in addition, is very stable in water. We have used a commercially available substance [...] Read more.
Metal–Organic Frameworks (MOFs) have diverse applications due to their tunable porosity, large surface area, and diverse chemical functionalities. Among them, one of the most researched MOFs is MIL-101(Cr), which, in addition, is very stable in water. We have used a commercially available substance with approximately 300 nm large crystals for the preparation of a sensing nano-thin layer for the emerging water contaminant PFOS, due to its high selectivity towards this compound. Here, we have synthesized 20 nm sized crystals of MIL-101(Cr), which are among the smallest reported, and compared them to the same material with 300 nm sized crystals. The material was characterized by TEM and XPS. It was possible to prepare insoluble monolayers at the air–water interface (Langmuir films), which were characterized with film compression isotherms, Brewster angle microscopy, and surface potential measurements. The Langmuir–Blodgett (LB) method was used to deposit monolayers on Si wafers and 434 MHz Surface Acoustic Wave resonator simultaneously. The LB layers were very stable over time. The smaller-sized MIL-101 (Cr) crystals exhibit denser, more homogeneous water coverage and packing upon compression, with no observable 10–100 µm aggregates. LB monolayers from the 20 nm particles have approximately six times lower surface roughness. The LB monolayer is far from being smooth, but this will allow excellent access to the MOF pores by the tested analyte in a chemical sensing application. The lack of research on depositing presynthesized MOFs using probably the best method for nanoarchitectonics—the LB method—is addressed. The 20 nm sized MOF crystals are the smallest deposited by this method so far. Full article
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9 pages, 4397 KB  
Proceeding Paper
Extract Temperature Coefficients of LGS for High-Temperature Applications Based on the Finite Element Method
by Danyu Mu, Hong Zhang, Jikai Zhang, Yan Feng, Hao Jin and Shurong Dong
Eng. Proc. 2025, 110(1), 4; https://doi.org/10.3390/engproc2025110004 - 24 Nov 2025
Viewed by 460
Abstract
Surface-acoustic-wave (SAW) sensors with Langasite (LGS) substrate have broad prospects in the field of wireless passive temperature sensing in harsh environments. However, there are still challenges in terms of accuracy regarding the material temperature coefficient of LGS and the temperature simulation of heavy [...] Read more.
Surface-acoustic-wave (SAW) sensors with Langasite (LGS) substrate have broad prospects in the field of wireless passive temperature sensing in harsh environments. However, there are still challenges in terms of accuracy regarding the material temperature coefficient of LGS and the temperature simulation of heavy mass load electrodes. This paper presents a method for fitting the material temperature coefficient of LGS based on a combination of finite element simulation (FEM) and measured data. Eleven different cuts of LGS SAW resonators were fabricated, and the frequency response of each cut device at 30–800 °C was obtained through experiments. Some of the data were used in the training dataset and the material temperature coefficient of LGS was obtained through comsol simulation fitting. The remaining data were used as a test dataset to verify the accuracy of the results. The results show that the material coefficient obtained using this method has good accuracy in the frequency prediction of thick electrode LGS SAW sensors at different temperatures with different cuts. Full article
(This article belongs to the Proceedings of The 2nd International Conference on AI Sensors and Transducers)
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14 pages, 9937 KB  
Article
The Suppression of Spurious Modes in TC-SAW Resonators by the Application of Bent Metal Strips
by Menghui Li, Mengke Qi, Yuanhang Chen, Yimin Cheng, Liang Cao, Hong Zhou and Xiaojing Mu
Sensors 2025, 25(22), 6926; https://doi.org/10.3390/s25226926 - 13 Nov 2025
Viewed by 888
Abstract
This article investigates the use of bent metal strips on the top of a SiO2 layer for the suppression of spurious modes in temperature-compensated surface acoustic wave (TC-SAW) resonators employing a SiO2/Cu/128°YX-LiNbO3 structure. The proposed metal strip method includes [...] Read more.
This article investigates the use of bent metal strips on the top of a SiO2 layer for the suppression of spurious modes in temperature-compensated surface acoustic wave (TC-SAW) resonators employing a SiO2/Cu/128°YX-LiNbO3 structure. The proposed metal strip method includes two parts: a primary metal strip located at the edge of the interdigital transducer (IDT) aperture region and a secondary metal strip in the gap region. The impact of the geometric parameters of bent metal strips was calculated by the 3D finite element method (FEM), and theoretical simulation results show that this method can effectively suppress the transverse modes and mitigate the gap modes originating from the gap region in conventional TC-SAW resonators. Furthermore, experimental validation further confirms that the proposed method can effectively suppress nearly all spurious modes without degrading the performance of the quality factor. Full article
(This article belongs to the Special Issue Exploring the Sensing Potential of Acoustic Wave Devices)
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17 pages, 2813 KB  
Article
Acoustic Emission from GaN-on-Sapphire Structures
by Bartlomiej K. Paszkiewicz, Bogdan Paszkiewicz and Andrzej Dziedzic
Electronics 2025, 14(21), 4146; https://doi.org/10.3390/electronics14214146 - 23 Oct 2025
Viewed by 2646
Abstract
This paper presents a study on the propagation of acoustic waves in gallium nitride (GaN) layers deposited on sapphire substrate. The influence of GaN layer thickness and the configuration of interdigital transducers (IDTs) on the generation and propagation of different surface wave modes, [...] Read more.
This paper presents a study on the propagation of acoustic waves in gallium nitride (GaN) layers deposited on sapphire substrate. The influence of GaN layer thickness and the configuration of interdigital transducers (IDTs) on the generation and propagation of different surface wave modes, including Rayleigh, Sezawa, and Love waves, was analyzed. Experimental measurements in the 100 MHz–6 GHz range were complemented by numerical simulations using the finite element method (FEM). The results demonstrated a strong dependence of wave characteristics on technological parameters, particularly the quality of the GaN–sapphire interface. The data obtained can be utilized for optimizing the design of acoustic sensors, resonators, and RF filters. Full article
(This article belongs to the Section Electronic Materials, Devices and Applications)
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14 pages, 4357 KB  
Article
Thermal Gas Flow Sensor Using SiGe HBT Oscillators Based on GaN/Si SAW Resonators
by Wenpu Cui, Jie Cui, Wenchao Zhang, Guofang Yu, Di Zhao, Jingqing Du, Zhen Li, Jun Fu and Tianling Ren
Micromachines 2025, 16(10), 1151; https://doi.org/10.3390/mi16101151 - 10 Oct 2025
Viewed by 962
Abstract
This paper presents a thermal gas flow sensing system, from surface acoustic wave (SAW) temperature sensor to oscillation circuit and multi-module miniaturization integration. A single-port GaN/Si SAW resonator with single resonant mode and excellent characteristics was fabricated. Combined with an in-house-developed SiGe HBT, [...] Read more.
This paper presents a thermal gas flow sensing system, from surface acoustic wave (SAW) temperature sensor to oscillation circuit and multi-module miniaturization integration. A single-port GaN/Si SAW resonator with single resonant mode and excellent characteristics was fabricated. Combined with an in-house-developed SiGe HBT, a temperature-sensitive high-frequency oscillator was constructed. Under constant temperature control, system-level flow measurement was achieved through dual-oscillation configuration and modular integration. The fabricated SAW device shows a temperature coefficient of frequency (TCF) −28.29 ppm/K and temperature linearity 0.998. The oscillator operates at 1.91 GHz with phase noise of −97.72/−118.62 dBc/Hz at 10/100 kHz offsets. The system demonstrates excellent dynamic response and repeatability, directly measuring 0–50 sccm flows. For higher flows (>50 sccm), a shunt technique extends the test range based on the 0–10 sccm linear region, where response time is <1 s with error <0.9%. Non-contact operation ensures high stability and long lifespan. The sensor shows outstanding performance and broad application prospects in flow measurement. Full article
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15 pages, 6813 KB  
Article
Mass Transfer Mechanism and Process Parameters in Glycerol Using Resonant Acoustic Mixing Technology
by Ning Ma, Guangbin Zhang, Xiaofeng Zhang, Yuqi Gao and Shifu Zhu
Processes 2025, 13(9), 2845; https://doi.org/10.3390/pr13092845 - 5 Sep 2025
Viewed by 1081
Abstract
Resonant acoustic technology utilizes low-frequency vertical harmonic vibrations to induce full-field mixing effects in processed materials, and it is regarded as a “disruptive technology in the field of energetic materials”. Although numerous scholars have investigated the mechanisms of resonant acoustic mixing, there remains [...] Read more.
Resonant acoustic technology utilizes low-frequency vertical harmonic vibrations to induce full-field mixing effects in processed materials, and it is regarded as a “disruptive technology in the field of energetic materials”. Although numerous scholars have investigated the mechanisms of resonant acoustic mixing, there remains a lack of parameter selection methods for improving product quality and production efficiency in engineering practice. To address this issue, this study employs phase-field modeling and fluid–structure coupling methods to numerically simulate the transport process of glycerol during resonant acoustic mixing. The research reveals the mass transfer mechanism within the flow field, establishes a liquid-phase distribution index for quantitatively characterizing mixing effectiveness, and clarifies the enhancement effect of fluid transport on solid particle mixing through particle tracking methods. Furthermore, parameter studies on vibration frequency and amplitude were conducted, yielding a critical curve for guiding parameter selection in engineering applications. The results demonstrate that Faraday instability first occurs at the fluid surface, generating Faraday waves that drive large-scale vortices for global mass transfer, followed by localized mixing through small-scale vortices. The transport process of glycerol during resonant acoustic mixing comprises three distinct stages: stable Faraday wave oscillation, rapid mass transfer during flow field destabilization, and localized mixing upon stabilization. Additionally, increasing either vibration frequency or amplitude effectively enhances both the rate and effectiveness of mass transfer. These findings offer theoretical guidance for optimizing process parameters in resonant acoustic mixing applications. Full article
(This article belongs to the Section Materials Processes)
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10 pages, 2877 KB  
Communication
Localized Surface Phonon Polaritons and Infrared Optical Absorption of ScAlN Nanoresonators
by Huanhuan Zhao, Tao Cheng, Xinlei Duan, Mingxin Lv, Jia-Yue Yang and Linhua Liu
Materials 2025, 18(16), 3906; https://doi.org/10.3390/ma18163906 - 21 Aug 2025
Viewed by 1813
Abstract
Alloying AlN with ScN provides a robust strategy for engineering its intrinsic bandgap, phonons and dielectric functions, and ScAlN alloys have demonstrated great promise in applications including the 5G mobile network, surface acoustic wave devices and nanophotonics. Sc doping has been shown to [...] Read more.
Alloying AlN with ScN provides a robust strategy for engineering its intrinsic bandgap, phonons and dielectric functions, and ScAlN alloys have demonstrated great promise in applications including the 5G mobile network, surface acoustic wave devices and nanophotonics. Sc doping has been shown to greatly influence the phonons and infrared dielectric functions of AlN, yet few studies have focused on its influence on surface phonon polaritons, which are crucial to modulating the radiative properties of ScAlN metasurfaces. Herein, we combined first-principles and finite element method (FEM) simulations to fully investigate the effects of Sc incorporation on the phonon dispersion relation, propagation and localization of SPhPs and the modulated radiative properties of ScAlN nanoresonators. As the Sc doping concentration increases, the highest optical phonon frequencies are reduced and are largely directly related to enlarged lattice parameters. Consequently, the coupling strength among incident photons and phonons decreases, which leads to a reduced absorption peak in the infrared dielectric functions. Moreover, the propagation length of the SPhPs in ScAlN is largely reduced, and localized resonance modes gradually disappear at a higher Sc doping concentration. This work provides physical insights into the spectra tuning mechanisms of ScAlN nanoresonators via Sc doping and facilitates their applications in nanophotonic devices. Full article
(This article belongs to the Special Issue Research Progress of Advanced Crystals: Growth and Doping)
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