Recent Progress in RF MEMS Devices and Applications

A special issue of Micromachines (ISSN 2072-666X). This special issue belongs to the section "A:Physics".

Deadline for manuscript submissions: 31 August 2025 | Viewed by 642

Special Issue Editor


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Guest Editor
School of Integrated Circuits Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
Interests: RF circuits and system; RF MEMS; acoustic filter; phononic crystal; low-noise oscillator
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Special Issue Information

Dear Colleagues,

Since the 1990s, researchers have been exploring the potential of MEMS technology to enhance radiofrequency (RF) performance. RF MEMS technology has drawn significant attention due to its unique performance, including miniaturization, low power consumption, high linearity, high durability, and lower manufacturing costs. These advantages make RF MEMS technology play an increasingly important role in modern wireless communications, the Internet of Things (IoT), smart systems, wearable technology, and biomedical devices.

This Special Issue seeks to showcase research papers and comprehensive reviews reporting novel materials, designs, fabrication techniques, applications, packaging methods, and the reliability of RF MEMS.

We look forward to receiving your submissions!

Prof. Dr. Jingfu Bao
Guest Editor

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Keywords

  • RF filters
  • RF MEMS
  • MEMS resonators
  • RF MEMS switches
  • antenna

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Published Papers (1 paper)

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Research

13 pages, 2748 KiB  
Article
Experimental Demonstration of Nanoscale Pillar Phononic Crystal-Based Reflector for Surface Acoustic Wave Devices
by Temesgen Bailie Workie, Lingqin Zhang, Junyao Shen, Jianli Jiang, Wenfeng Yao, Quhuan Shen, Jingfu Bao and Ken-ya Hashimoto
Micromachines 2025, 16(6), 663; https://doi.org/10.3390/mi16060663 - 31 May 2025
Viewed by 456
Abstract
This article presents an investigation into the use of nanoscale phononic crystals (PnCs) as reflectors for surface acoustic wave (SAW) resonators, with a focus on pillar-based PnCs. Finite element analysis was employed to simulate the phononic dispersion characteristics and to study the effects [...] Read more.
This article presents an investigation into the use of nanoscale phononic crystals (PnCs) as reflectors for surface acoustic wave (SAW) resonators, with a focus on pillar-based PnCs. Finite element analysis was employed to simulate the phononic dispersion characteristics and to study the effects of the pillar shape, material and geometric dimensions on achievable acoustic bandgap. To validate our concept, we fabricated SAW resonators and filters incorporating the proposed pillar-based PnC reflectors. The PnC-based reflector shows promising performance, even with smaller number of PnC arrays. In this regard, with a PnC array reflector consisting of 20 lattice periods, the SAW resonator exhibits a maximum bode-Q of about 1600, which can be considered to be a reasonably high value for SAW resonators on bulk 42° Y-X lithium tantalate (42° Y-X LiTaO3) substrate. Furthermore, we implemented SAW filters using pillar-based PnC reflectors, resulting in a minimum insertion loss of less than 3 dB and out-of-band attenuation exceeding 35 dB. The authors believe that there is still a long way to go in making it fit for mass production, especially due to issues related with the accuracy of fabrication. But, upon its successful implementation, this approach of using PnCs as SAW reflectors could lead to reducing the foot-print of SAW devices, particularly for SAW-based sensors and filters. Full article
(This article belongs to the Special Issue Recent Progress in RF MEMS Devices and Applications)
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